LEJ-OM004xx

/m 3] 100,000 100,000 0/mi n(ANR) ISOclass6 50/mi n(ANR) 10,000 10,000 ISOclass5 ISOclass5 30/mi n(ANR) 1,000 1,000 ISOclass4 ISOclass4 100 100 90/mi n(ANR) 10 10 50/mi n(ANR) 1 1 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0.1 0.2 0.3 0.4 0.5 0.6 Particl diameter[m] Particl diameter[m] 2.2 Amount of vacuum aspiration The amount of recommended vacuum aspiration according to the clean time class is shown

V100

to 0.7 0 to 0.7 0 to 0.7 0 to 0.7 100 kPa to 0.6 100 kPa to 0.6 100 kPa to 0 100 kPa to 0 100 kPa to 0 100 kPa to 0 100 kPa to 0.6 100 kPa to 0.6 N.C.

LFE-OMZ0012

[%F.S.] 2.5 2.0 1.5 1.0 0.5 0.0 0 1 2 3 4 5 Response time[s] [s] Operating pressure range Pressure [MPa] Operating range Fluid temperature [oC] When fluids with high temperature are used, the operating pressure range will be reduced. Operate within the range mentioned above.

3-Position Rotary Table

3 @0 !7 @5 !1 #0 t u r w @3 !9 MSZAA (High precision type) $1 e $0 @7 @1 @9 !0 !2 #2 !6 !4 @4 #3 !8 #7 #8 o #6 q #9 y i $2 @3 @2 #1 @6 #4 #5 Component Parts Note Anodized Nickel plated Chromated Note No.

VXF

/$($* # # $0( , $0(1 2 # $)' , $)'1 )'% -.!/(%$* # # $'( , $((1 2 # $$' , 3'1 '4( PB !! / # # & , # # -.!/(% 17-3-71 2 The VX series will be revised shortly. Series VXF How to Order VXF 2150 06 1 G Solenoid type Normally closed VXFA 2150 06 Air operated type Option Nil S Standard With silencer Refer to the table (2) below for availability.

Series AS-FM/AS-M/ASD-FM

How to Order 01 2 2 0 0 M AS Body size Option None With sealant Nil S 1 2 M5 standard 1/8, 1/4 standard Type Control system 0 1 Direct cylinder connection elbow type M5 and U10/32 are not available with sealant.

Wireless System

Description 2 1 24 V (for control/input) 1 24 V (for output) 2 24 V (for output) 2 0 V (for output) 3 0 V (for control/input) 3 24 V (for control/input) 4 0 V (for output) 4 0 V (for control/input) 3 (86.6) 4 1 73.6 56.6 Power supply connector PWR OUT: M12 5-pin socket, A-coded Configuration EX600-ED4 (Pin arrangement 1) EX600-ED5 (Pin arrangement 2) Pin no. Description Pin no.

Modular Type Regulator Series AR

When the knob is not easily locked, turn it left and right a little and then push it (when the knob is locked, the "orange mark", i.e., the gap will disappear). 0.1 0.1 0 0 0 0 1000 2000 3000 4000 5000 200 400 600 800 Flow rate L/min (ANR) Flow rate L/min (ANR) AR25 Rc 3/8 AR50 Rc 1 0.6 0.6 0.5 0.5 Outlet pressure MPa Outlet pressure MPa 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 0 0 500 1000 1500

Rubber seal 5 Port Solenoid Valve Series SYJ7000

With light/surge voltage suppressor (Non-polar type) For AC voltage valves there is no S option.

Soft Start-up Valve AV2000/3000/4000/5000 1

How to Find the Flow Rate (At air temperature of 20C) Choke flow: (P2 + 0.1)/(P1 + 0.1) ) 0.5 293 273 + t Q = 120 x S x (P1 + 0.1) x Subsonic flow: when (P2 + 0.1)/(P1 + 0.1) > 0.5 Q = 240 x S x (P1 P2)(P2 + 0.1) x 293 273 + t Q: Air flow rate [ /min (ANR)] S: Effective area (mm2) P1: Upstream pressure [MPa] P2: Downstream pressure [MPa] t: Air temperature [C] Note 1) Formulas above are

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

60 90 75 40 60 Suction flow 45 20 30 15 0 0 20 40 60 80 100 0 0 0.1 0.2 0.3 0.4 0.5 0.6 Suction flow [L/min(ANR)] Supply pressure [MPa] 256 Vacuum Pad with Ejector ZHP Series Construction A-A Component Parts t !

11-cq2-e

6 Single acting, spring return Piston seal CQ2B12-S-PS Rod seal NBR 12 16 20 25 32 40 50 CQ2B12-S-PS CQ2B16-S-PS CQ2B20-S-PS CQ2B25-S-PS CQ2B32-S-PS CQ2B40-S-PS CQ2B50-S-PS CQ2B16-S-PS Gasket CQ2B20-S-PS CQ2B25-S-PS CQ2B32-S-PS CQ2B40-S-PS CQ2B50-S-PS Left no. !4. Seal kit includes !4. Order the seal kit, based on each bore size.

CUJ

Bore size (mm) Piano wire u Return spring CUJB4-S-PS 4 Sintered metallic BC i Bronze element CUJB6-S-PS 6 Set of nos. above !1 and an exclusive grease pack. o Magnet CUJB8-S-PS 8 Steel Nickel plated !0 Rod end nut CUJB10-S-PS 10 NBR !1 Piston seal NBR !2 Rod seal NBR !

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

0 !6 !5 y e o i r q !9 r u e y o i !0 i t !2 q !1 @0 !7 t !2 u !1 !7 !0 t !2 !7 !1 !5 !6 Component Parts Description Note Description No. Material Material Note No.

Peltier-type Chiller Thermo-con/ Compact Type

0 10 20 30 40 50 60 70 Circulating fluid temperature [C] 0 0 10 20 30 40 50 60 70 Circulating fluid temperature [C] For the high-pressure pump (Option), the cooling capacity decreases by approx. 20 W.

VXZ

PAX 0 * PB / / / / 1 ! ! 17-3-61 2 The VX series will be revised shortly.

Parallel Type Air Gripper

2 +0.043 MHZ2-16 M40.7 2.1 8 17H9 0 2 +0.043 MHZ2-20 M5 x 0.8 4.3 10 21H9 0 3 +0.052 MHZ2-25 M61 7.3 12 26H9 0 3.5 +0.052 MHZ2-32 M61 7.9 13 34H9 0 4 +0.062 MHZ2-40 M81.25 17.7 17 42H9 0 4 +0.062 Use the holes on the body end surface for positioning.

MHx-OMU0057

Nm MHZ2-10 M2.50.45 0.31 MHZ2-16 M30.5 0.59 MHZ2-20 M40.7 1.4 MHZ2-25 M50.8 2.8 MHZ2-32 M61 4.9 MHZ2-40 M81.25 11.8 6 - (Lmm) Nm (mm) (mm) L MHZ2-10 M30.5 0.88 6 11H9 0 2 +0.043 MHZ2-16 M40.7 2.1 8 17H9 +0.043 0 2 MHZ2-20 M50.8 4.3 10 21H9 +0.052 0 3 MHZ2-25 M61 7.3 12 26H9 +0.052 0 3.5 MHZ2-32 M61 7.9 13 34H9 +0.062 0 4 MHZ2-40 M81.25 17.7 17 42H9 +0.062 0 4 Nm Lmm MHZ2-10 M30.5 0.9

Electro-pneumatic Proportional Valve Series VEF/VEP 1

: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0.03 s or less 0.03 s or less 0.05 s or less 0.05 s or less Response time Hysteresis 3% F .S.

Series 10-V100 Rubber seal 3 port direct operated solenoid valve

100kPa to 0 100kPa to 0.6 100kPa to 0.6 100kPa to 0.6 100kPa to 0.6 100kPa to 0 100kPa to 0 10-V114 10-V114A 10-V124 Note 1) 0 to 0.7 0 to 0.7 0 to 0.7 0 to 0.7 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 N.C.