SMC Pneumatic Clean Series

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

Sine Rodless Cylinder Series REBR Direct Mount Type

0 @1 r t e u y @0 q @2 @4 @8 @9 !3 !8 !7 #0 @6 o @3 w @7 !5 @5 !4 REBR15 Parts list Parts list No. Description Material Note No.

Electro-Pneumatic Valve NVEP/NVEF Series

O F , < F , Q r '=r, @ r,> r, Pressure Raies (P1 =Primary Pressure) (P2=Secondary Pressure) NVEP3l2O-2 NVEP314O-'r -04 Primary Pressure P1 = 45 PSIG (3 KSI/cmr) E t2 I { t r S F g t o o E 28 (r. a ( 1 ) E a E a NVEHtl4O-1 E t ^ *t 6 S (0.15) (0.s) t . 5 ( 0 1 ) F 5 (0.05) NVEE NVEP CONSTRUCTION DETAIL Flow Raie'lvpo: VEF212O (2 Pdts) NVEF:112O (3 Porb) Pressuro llrp: NVEP3I2O (3 Porb) l

NVEPA|VEFseies

O F , < F , Q r '=r, @ r,> r, Pressure Raies (P1 =Primary Pressure) (P2=Secondary Pressure) NVEP3l2O-2 NVEP314O-'r -04 Primary Pressure P1 = 45 PSIG (3 KSI/cmr) E t2 I { t r S F g t o o E 28 (r. a ( 1 ) E a E a NVEHtl4O-1 E t ^ *t 6 S (0.15) (0.s) t . 5 ( 0 1 ) F 5 (0.05) NVEE NVEP CONSTRUCTION DETAIL Flow Raie'lvpo: VEF212O (2 Pdts) NVEF:112O (3 Porb) Pressuro llrp: NVEP3I2O (3 Porb) l l

E-P HYREG ® Series VY1 1

Actuating force F1 is applied to the top surface of pressure regulation piston r by the pilot pressure (pilot valve assembly q: VY1D B 00-00), and actuating force F2 is applied to the bottom surface of the piston by the port A pressure that pases through the feedback passage. Thus, the port A pressure that corresponds to the pilot pressure is established.

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"Materj, al' r' f{einagq~#ignati ,on No. 11) Lock nu.t for speed controller Carbon steel I Zinc chromate Ro.d _ ~o'Ver 0 Aluminum alloy Chromate QI) Bush for cleyis Oil impregnated sintered metal @ J[lbe"'Go:V~r Aluminum alloy Hard alumile QI Hexagon socket' plug Carbon steel h Fiistpn Aluminum alloy Hard alumile $ ' 4!

Air Cylinder MGQ Series Compact Guide Cylinder

, Q.2mm?.

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

0 @0 @1 @2 @3 r !6 !1 q y e t !7 !3 w !9 i u 125 80 to 125 (No flat washer for 125) 80 to 125 !5 !4 i o Replacement Parts/Seal Kit (Single rod) Component Parts Bore size (mm) Kit no. Contents No.

Dual Speed Controller with One-touch Fitting Series ASD 1

9 @0 @1 Note Material PBT PBT PBT Brass Brass Brass Brass Brass Brass(3) No. q w e r t y u i o !

ASD

9 @0 @1 Note Material PBT PBT PBT Brass Brass Brass Brass Brass Brass(3) No. q w e r t y u i o !

Series AV is a soft start up valve for low-speed air supply to gradually raise initial pressure in an air system and for quick exhaust by cutting off air supply. OSHA compliant, lockable soft start valve, Large effective area, Low power consumption, Modular design, SOFT START-UP VALVE W/ LOCKOUT, VALVE, SOFT START LOCKOUT, 241, 1 lb

Series AV is a soft start up valve for low-speed air supply to gradually raise initial pressure in an air system and for quick exhaust by cutting off air supply. OSHA compliant, lockable soft start valve, Large effective area, Low power consumption, Modular design, SOFT START-UP VALVE W/ LOCKOUT, VALVE, SOFT START LOCKOUT, 241, 1.84 lb

Series AV is a soft start up valve for low-speed air supply to gradually raise initial pressure in an air system and for quick exhaust by cutting off air supply. OSHA compliant, lockable soft start valve, Large effective area, Low power consumption, Modular design, SOFT START-UP VALVE W/ LOCKOUT, VALVE, SOFT START LOCKOUT, 241, 1.84 lb

Soft Start-up Valve AV2000/3000/4000/5000

Q C C Pressure gauge mounting bore 1/8 4-R R 4-R 36.8 E 36.8 E R P P D D + + MADE IN JAPAN MADE IN JAPAN Model Port size A B C D E G H I K L M N P Q R AV2000-02-G AV2000-02-GS AV2000-02-D AV2000-02-DZ AV2000-02-Y AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000

3-Screen Display High-Precision Digital Pressure Switch Air 1.0 MPa/1.6 MPa ISE70 ISE71

When used as a switch output device Setting of NPN open collector 2 outputs Setting of PNP open collector 2 outputs Brown DC(+) q Brown DC(+) q Load Black OUT1 r Black OUT1 r Load Main circuit Main circuit + + 12 to 24 VDC 12 to 24 VDC White OUT2 w White OUT2 w Load Load Blue DC() e Blue DC() e When used as an IO-Link device Brown L+ q L+ Black C/Q r Main circuit C/Q IO-Link master White

ML1

w e r t y u i o !

3 Port Solenoid Valve Series VQ100 1

VZ 1 (P) 3 (R) VS VFN Latching type (A) 2 1 (P) 3 (R) Clean Series Clean series is available for both standard and option specifications.

Air Cylinder CLA Series Fine Lock Model

t0 I Recommended Circuits I q+"'"' A,.r rr.nv . . . 1 1 I I I Construction/Parts List .12 l J l / 18-20 I nuto Switch Specif ications . .21 I nuto Switch Circuit Diagrams. .22 I Ruto Switch Dimensions/Operating Range .23 I Ruto Switch Connection . .24 I Ruto Switch MountinS. . .25 r"-"--'-""' I Annaccnriac I Pranar riinne .26 r "-"-" tri*,t l x}$x:? xxxs !

5 Port Solenoid Valve SY Series

w y q e (EB) 3 (EA) 5 (P) 1 t 2 position double JIS Symbol 2 position double (A) (B) 4 2 q w y u r (P) 1 (EB) 3 (EA) 5 t 3 Position Closed center / Exhaust center / Pressure center JIS Symbol 3 position closed center (A) (B) 4 2 q w y u r 3 position exhaust center 3 position pressure center (EB) 3 (EA) 5 (P) 1 t (This figure shows a closed center type.)

MTS

7 q e @0 !0 o @2 @3 !5 u t !8 @1 r @4 w MX MTS MY 12 to 40 CY @7 !1 !7 q !6 !0 @2 @3 o @4 @6 y e r !