Possible to transfer a workpiece at low-speed.

(Example) For M3: L1 = 6 Applicable shaft types: J, K, T Q1 = M K axis T, X shaft Q1 = M L1 = L2 + (3 x P) L2 + (3 x P) L1 + (3 x P) L1 + (3 x P) L2 = L2 = L1 = Q2 = M Q2 = M (mm) (mm) Q2 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Q1 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Size 10 15 20 30 40 Size 10 15 20 30 40 (mm) Q1 M3, M4 M3, M4, M5, M6 M4, M5, M6

MY1

NH NC DTT UU TT UU Auto switch magnet holder M5 x 0.8 (Port) -X GA GA 2-M5 x 0.8 (Hexagon socket head plug) 2-M5 x 0.8 (Hexagon socket head plug) Cushion needle G G 20GB M5 x 0.8 (Hexagon socket head plug) N A M5 x 0.8 (Port) Data Z + Stroke M5 x 0.8 (WW) (WW) (Hexagon socket head plug) 2 x 2-J depth K M5 x 0.8 (Hexagon socket head plug) XX XX M5 x 0.8 (Port) VV VV 2-M5 x 0.8 (Hexagon socket

MXS

CXT With end lock(12) MXS12-llR With buffer(12) MXS12-llF MX 2-M5 X 0.8 thread 8 deep MXU Operating port 2-M5 X 0.8 J 10.5 MXS 38 MXQ 9.5 14.5 MXF 16 37 3 29 MXW 30 0.5 * Other dimensions not indicated are same as the basic style.

KJ

(mm) <M5> <M5> Note) Weight (g) Model D1 P A M D2 L 2-applicable tubing M5 x 0.8 KJU23-M5 KJU23-01S KJU04-M5 KJU04-01S KJU06-M5 KJU06-01S 5.9 8.3 6.4 8.8 7.4 9.9 Reference dimensions after R thread installation.

Air Slide Table Series MXQ

Basic style 2 x M5 x 0.8 thread depth 8 Operating port 2 x M5 x 0.8 3 11 Max. 12 (Retraction end adjuster) 12 I J 5.5 1 11 5.5 Note 1) If long bolts are used, they can touch the guide block and cause malfunction, etc. Refer to the Specific Product Precautions. Note 2) Since the table is made of a magnetic substance, it could become magnetized if touched by a magnet, etc.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

AS121FM-M5-23 AS121FM-M5-04 AS121FM-M5-06 AS221FM-01-23 AS221FM-01-04 AS221FM-01-06 AS221FM-01-08 AS221FM-02-04 AS221FM-02-06 AS221FM-02-08 AS221FM-02-10 3.2 4 6 3.2 4 6 8 4 6 8 10 22.1 22.1 22.9 27.5 27.5 27.5 32.4 34.4 34.4 36.4 43.2 8.4 9.3 11.6 9.3 9.3 11.6 15.2 10.4 12.8 15.2 18.5 17.3 17.3 18.1 20.4 20.4 20.4 25.3 25.2 25.2 27.2 33.9 12.7 12.3 7 25.1 28.8 30.1 9.6 33.8 M5 x 0.8 8 13.5

Series AS-FM/AS-M/ASD-FM

Max. 3.2 4 6 3.2 4 6 8 4 6 8 10 22.1 22.1 22.9 27.5 27.5 27.5 32.4 34.4 34.4 36.4 43.2 8.4 9.3 11.6 9.3 9.3 11.6 15.2 10.4 12.8 15.2 18.5 17.3 17.3 18.1 20.4 20.4 20.4 25.3 25.2 25.2 27.2 33.9 AS121FM-M5-23 AS121FM-M5-04 AS121FM-M5-06 AS221FM-01-23 AS221FM-01-04 AS221FM-01-06 AS221FM-01-08 AS221FM-02-04 AS221FM-02-06 AS221FM-02-08 AS221FM-02-10 12.7 12.3 7 25 25.8 22.2 9.6 28.6 M5 x 0.8 8

MXS Series Air Slide Table

With end lock (12) MXS12R With buffer (12) MXS12F 2-M5 X 0.8 thread 8 deep Operating port 2-M5 X 0.8 J 10.5 9.5 38 14.5 16 37 3 29 30 0.5 Other dimensions not indicated are same as basic type.

MY1

needle NW Z + Stroke 2-P (Hexagon socket head taper plug) MW (mm) Bore size (mm) B 6 C 3.5 CH 25 G 8.5 GB 16.2 H 52 HG 13.5 J M5 x 0.8 K 10 L 110 LD 3.6 LH 38 LL 35 LW 84 M 6 MM M4 x 0.7 MW N 20 NC 13.5 NE 49.5 NG A 90 16 20 25 32 40 13.5 110 7.5 4.5 26 10.5 20 58 17 M6 x 1 12 130 4.8 39 45 88 7.5 M5 x 0.8 25 17 55.5 17 120 9 5.5 25.7 16 24.5 66 22 M6 x 1 9.5 142 5.6 38.7 49 100 10 M5

High Vacuum Angle Valve

0 Body Valve side exhaust Refer to the back of page 465 for Maintenance Parts. 457 A XLS Series Dimensions XLS/Without control power supply D Lead wire AWG20, O.D.: 2.63 mm E D F L J K 2 J K L 270 10 290 10 M J K J 33 25 C B 39 G G1/2 G1/2 C B B C A B C 6 to 9 G1/2 A DIN terminal (D) Terminal (T) Conduit (C) Grommet (G) XLS/With control power supply 41 26 J K 530 10 72 OPERATION V INPUT

Air Slide Table

I J 5.5 11 5.7 11.2 2 x M5 x 0.8 thread depth 8 5H9 depth 5 +0.030 0 N x M5 x 0.8 thread depth 6 5H9 depth 5 +0.030 0 5.7 11 6 1 1 28 24.5 58 29 24 49 14.5 24.5 3.5 F 6.5 4 x M5 x 0.8 thread depth 7 14 -1 x F 2 N 21 3 x M6 x 1 thread depth 10 M 10 KA 21 10 5.5 Bottom view of MXQR16-50 NA x M5 x 0.8 thread depth 6.5 45 35 13 K 21 33.7 0.3 10 5.5 5.5 37 Z ZZ G (NN-1) x H H 22.4 7.6 22.4 7.6

LX

Proximity switch (optional) depth 5 10 7.5 15 pin plug 5H9 +0.030 0 E-M5 x 0.8 thread depth10 Home position switch (optional) 6 Refer to page 100 for connection cables. LJ1 LG1 LC1 LX LC6D/LC6C Switches 76 46 38 2-M2.5 x 0.45 thread depth 4 5H9 +0.030 0 10 3 depth5 J 27 J x K 25 8 Motor unit Refer to "Applicable Motor List" below for dimensions.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(mm) (mm) Q1 M3 M4, M5, M6, M8 M4, M5, M6, M8, M10 M4, M5, M6, M8, M10, M12 M5, M6, M8, M10, M12 Q2 M3 M4, M5, M6, M8 M4, M5, M6, M8, M10 M4, M5, M6, M8, M10, M12 M5, M6, M8, M10, M12 Size 30 50 63 80 100 Size 30 50 63 80 100 Symbol: A35 Symbol: A36 Symbol: A37 Machine female threads into the short shaft.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(mm) (mm) Q1 M3 M4, M5, M6, M8 M4, M5, M6, M8, M10 M4, M5, M6, M8, M10, M12 M5, M6, M8, M10, M12 Q2 M3 M4, M5, M6, M8 M4, M5, M6, M8, M10 M4, M5, M6, M8, M10, M12 M5, M6, M8, M10, M12 Size 30 50 63 80 100 Size 30 50 63 80 100 Symbol: A35 Symbol: A36 Symbol: A37 Machine female threads into the short shaft.

LX

E-M5 thread depth 10 6 LJ1 LG1 LC1 LX LC6D/LC6C Switches 38 76 46 Motor wire (300mm) Photo micro sensor wire (300mm) 2-M2.5 thread depth 4 3 10 8 J 25 25 27 J x K Stroke + 220 10 Stroke + 127 13 15 (5) 0.5 46.5 3.5 2-M6 thread depth 13 58 52 27 19 [18] 15 Stroke + 127 (39) The dimension inside [ ] shows the location at which the home position switch operates. 58 (52) 28 36: T-slot pitch

Dual Rod Cylinder Series CXSJ/CXS

x 0.8 Rc 1/8 Slide bearing, Ball bushing bearing (Same dimensions for both) 0.095 J 0.0023 J 0.064 J 0.17 J 0.27 J 0.32 J Made to Order Specifications (For details, refer to pages 1851 to 1954 and 2003.)

Silencer Series AN

Construction/Parts/Dimensions AN05/10/20 AN15/30/40 No hexagonal part in AN05 and AN10 B Dimensions (mm) B Port size R, NPT A B D Model Sound absorbing material (Resin sintered body) AN05-M5 AN10-01 AN15-02 AN20-02 AN30-03 AN40-04 6.5 M5 x 0.8 15 Body (Resin) A 1/8 23 11 A 16 14 1/4 32 Hexagonal flats D 16.5 14 1/4 45 20 17 3/8 58.5 Port size 24 21 1/2 68 2 Silencer Compact Resin Type/One-touch

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

8 PP A N W Z + Stroke TW NL (mm) Model A 97 102.5 125 NT 8 8 9 NL 15 15 18 N 16.5 18 20.5 MM 8 8 10 M M5 x 0.8 M5 x 0.8 M6 x 1.0 LW 71.5 75.5 86 LL 44 48.5 56 L 106 108 138 J M5 x 0.8 M5 x 0.8 M6 x 1.0 HT 19 23.5 28 HP 42 50 58.5 HG 17 16 25 HC 45 53 61.5 HB 33.5 41.5 46 HA 33.5 42.5 46 H 46 54 63 EB 21 22 24 EA 26.5 26.5 29 CY1H15 CY1H20 CY1H25 Model P M5 x 0.8 Rc 1/8 Rc 1/8 Z 194 205 250

Battery-less

With motor cover: LEYG16DmE -mC A B C H Dimensions (Size 16) U 35 Motor cover direction H D1 42.3 D2 42.3 D3 55.1 D4 47 A + Stroke Y X2 Cable length 250 With lock/motor cover: LEYG16DmE -mW A B C Motor Cover Direction Cable length 350 D1 D2 J J J J J J J J 22.2 30.3 30.3 22.2 22.2 30.3 30.3 22.2 22.2 30.3 30.3 22.2 22.2 30.3 30.3 22.2 30.3 22.2 J 30.3 22.2 J 30.3 22.2 J 22.2 30.3 J 22.2

CJ5-S

GA GB H H1 I J K KA M MM NA P S ZZ MQQ M 20 Up to 350 18 15.5 13 7 M4 x 0.7 9 16.5 8 15 3 18 12 35 5 31 M4 x 0.7 depth 7 5 6 3 M8 x 1.25 29 1/8 83 118 25 Up to 400 22 19.5 17 8 M5 x 0.8 9.5 18.5 10 17 3 18 12 40 6 33 M5 x 0.8 depth 8 5.5 8 3.5 M10 x 1.25 29 1/8 83 123 RHC 32 Up to 450 22 19.5 17 8 M5 x 0.8 9.5 20 12 19 3 18 12 40 6 38 M5 x 0.8 depth 8 5.5 10 3.5 M10 x 1.25 35.5 1/8 85 125