PF2D

Real-time switch output Unit switching Hysteresis mode ON YES Display Real-time flow rate Accumulated flow OFF P-1 P-2 L/min L Real-time flow rate GPM gal (US) "P" Window comparator mode H : Hysteresis GPM = gal (US)/min H H Note) Fixed SI unit (L/min, L, m3 or m3x10) will be set for the type without the unit switching function.

MU

Size Dd9 H D L Part No. Size B d d C l 0.040 0.076 0.040 0.076 0.040 0.076 0.050 0.093 8 10 10 14 M10 X 1.25 19.6 21.9 25.4 31.2 16.5 18 21 26 25 32 40 50, 63 6 7 8 11 23 27 31 38 25 32 40 50, 63 17 19 22 27 7.6 9.6 9.6 13.4 18.2 22.2 26.2 32.2 CD-MU02 CD-MU03 CD-MU04 CD-MU05 NT-03 NT-MU03 NT-04 NT-05 M12 X 1.25 M14 X 1.5 M18 X 1.5 A nut is attached with rod end male thread as standard.

SI unit for DeviceNet ®

Instance attribute2 (I/O: Poll message) ID Access rule Description Value 1 Get State 01h 2 Get Instance_type 01h 3 Get TransportClass_trigger 82h 4 Get DeviceNet_produced_connection_id 5 Get DeviceNet_consumed_connection_id 6 Get DeviceNet_initial_comm_characteristics 01h 7 Get Produced_connection_size 00h 8 Get Consumed_connection_size 04 h: EX260-SDN1, EX260-SDN2 02 h: EX260-SDN3, EX260

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Real-time switch output Unit switching Hysteresis mode ON YES Accumulated flow l Display Real-time flow rate l/min OFF P-1 P-2 Real-time flow rate GPM gal (US) "P" Window comparator mode H : Hysteresis GPM = gal (US)/min H H Note) Fixed SI unit (l/min, l, m3 or m3x10) will be set for the type without the unit switching function.

Profile Design ISO/VDMA Air Cylinder Series CP95

D C d H B 32 40 50, 63 80 100 16.5 21 26 31 39 19.6 25.4 31.2 37.0 47.3 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 6 8 11 13 16 17 22 27 32 41 NT-03 NT-04 NT-05 NT-08 NT-10 Piston rod ball joint KJ (DIN 648) Zinc chromate plated steel Bore d3 Order No. d1 h d6 b3 b1 l d7 l3 sw 32 M10x1.25 KJ10D 10 43 28 10.5 14 20 19 13 14 17 40 M12x1.25 KJ12D 12 50 32 12 16 22 22 13 16 19 50/63

Compact Electric Actuator Series LG1

(With L and + disconnected) (With L and + shorted) Lighted Lighted Shaded Shaded Indicator light (red) Indicator light (red) Light on Light on Light off Light off Timing chart ON ON Output transistor Output transistor OFF OFF Operating Operating Load 1 (relay) Load 1 (relay) Return Return H H Load 2 Load 2 L L 15

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

OFF n-1 n-2 Real-time flow rate Error correction Window comparator mode H : Hysteresis Note1) "n" LED display Contents Solution H H ON A current of more than 80mA is flowing to OUT1 Check the load and wiring for OUT1 NO OFF n-2 n-1 Real-time flow rate Note1) Output mode is set to inverted output at the factory before shipment. The setting data has changed for whatever reasons.

CL

1.25 M14 x 1.5 Up to 200 Up to 300 Up to 300 Up to 300 15.5 19.5 19.5 27 M4 x 0.7 depth 7 4 5 5.5 6 6 8 8 10 12 16 10 14 M5 x 0.8 depth 7.5 M5 x 0.8 depth 8 M6 x 1 depth 12 Without rod boot ZZ e f h l ZZ With rod boot Stroke range Bore size (mm) H1 WA WW WB WH H PG PH PL PW S TA TB P TC W 30 30 25 20 20 25 32 40 178 193 196 221 198 215 218 241 55 62 62 70 16 17 17 17 30 30 35 35 35 40 40

CLQ

L d l D m d H B C IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 NT-02 NT-03 NT-04 NT-05 NT-08 NT-10 Type C 8 for axis 16.2 20.2 36.2 44.2 56.2 64.2 1.5 1.55 1.55 2.05 2.55 2.55 13 17 22 27 32 41 15.0 19.6 25.4 31.2 37.0 47.3 Type C 10 for axis Type C 10 for axis Type C 14 for axis Type C 18 for axis Type C 22 for axis 24 Series CLQ Compact Cylinder with Lock Double Acting, Single Rod Simple Joint

PF3A7xxH_eng

When the flow falls below the set value by the amount of hysteresis [H] or more, the switch will turn OFF. If the operation shown in the diagram below is acceptable, then keep these settings.

0.01

0 w q t e u Cover 2 Aluminum alloy Fitting body 3 Stainless steel alloy Bracket 4 Stainless steel alloy O-ring A 5 H-NBR O-ring B 6 H-NBR Rod cover 7 Stainless steel alloy Tie-rod 8 Stainless steel alloy Cap nut 9 Stainless steel alloy Plain washer 10 Stainless steel alloy Replacement Parts r y o No.

Magnetically Coupled

JM-025 NSNJ-015 JM-08 NSN-03 NSN-04 0.26 0.30 0.30 0.39 0.39 0.51 0.51 1.00 1.13 1.50 2.00 2.00 2.13 2.50 2.50 3.00 0.47 0.59 0.71 0.91 1.08 1.36 2.44 2.50 3.25 4.17 4.38 4.88 5.88 7.00 7.50 1.18 1.26 5/16-24UNF 3/8-24UNF 3.07 3.24 3.99 5.19 5.38 6.14 7.14 7.16 7.66 C H B d 1/4-28UNF 3/8-24UNF 5/8-18UNF 1-12UNF 1-1/4-12UNF H 0.16 0.12 0.38 0.31 0.43 B 0.44 0.55 0.94 1.22 1.61 C 0.51 0.64

Compact Cylinder

Knuckle pin (Common with double clevis pin) Rod end nut d C l Material: Carbon steel (mm) Material: Carbon steel (mm) B H Part no. Applicable bore size (mm) 32, 40 50, 63 Applicable bore size (mm) Retaining ring Dd9 d H B C Part no.

Lubricator Series AL10 to 60

C B R H J H IN OUT OUT IN OUT OUT A P Min. clearance for maintenance A Min. clearance for maintenance AL10, AL20 AL30, AL40, AL40-06, AL50, AL60 Applicable model Drain cock with barb fitting With drain cock With drain cock Metal bowl Metal bowl with level gauge Metal bowl with drain cock Metal bowl with drain cock Metal bowl with drain cock & level gauge Optional B specifications B B B B

Modular Type Lubricator Series AL

Note 3) Bowl assembly for AL30 to AL60 comes with a bowl guard (steel band material). 52 AL10 to 60 Dimensions AL10 AL20 L D Bracket (option) G F Port size K M A Port size C B R C J H OUT OUT IN OUT OUT IN B R P Min. clearance for maintenance Min. clearance for maintenance A AL50, 60 AL30, 40 L D D L Port size Bracket (option) Bracket (option) G F G F Port size M K M K E J C B R C B R H

Air Cylinder Series MB

Bore size (mm) Part No. l Dd9 L m d H B C D Applicable cotter pin 3 X 18 l 4 X 25 l 4 X 35 l 4 X 40 l 0.040 0.076 0.050 0.093 0.065 0.117 0.065 0.117 NT-03 NT-04 NT-05 NT-08 NT-10 NT-12M CD-M03 CD-M05 CD-M08 IY-12 32 40 50, 63 80 100 125 32, 40 50, 63 80, 100 125 10 14 22 25 36 51 72 44 60 82 4 4.5 5 5 3 4 4 4 M10 X 1.25 M14 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 M27 X 2.0 6 8 11 13 16 16 17

212

0 q 4 Series LVR Dimensions Integral ttings/LQ3 4 x 7 Mounting hole 1/8 (Rc, NPT) Pilot port A H D B G Model A B C D E LVR20-Z07(06) 40 40 49.3 68 20.1 LVR40-Z11(10) 82.5 82.5 89 115 33 LVR40-Z13(12) 82.5 82.5 89 115 33 LVR50-Z19 100 100 117.5 135 45 Breathing port M5 x 0.8 IN Model F G H J LVR20-Z07(06) 8 27 56 88 LVR40-Z11(10) 14 64.5 100 150.5 LVR40-Z13(12) 14 64.5 100 159.5 LVR50-Z19

D. P. Lube ALD600/900 Series

D OUT OUT IN E 2 x A (Port size) F SMC J C H 4 x K Bracket mounting thread A C D E F G H J K Model AF30-02 to 03-X2230 AF40-02 to 04-X2230 AF40-06-X2230 AF50-06 to 10-X2230 AF60-10-X2230 57 118 Rc 1/4, 3/8 Rc 1/4, 3/8, 1/2 Rc 3/4 Rc 3/4, 1 Rc 1 M4 x 0.7 x 0.5 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 44 35 53 14 53 258 245 169 165 78 73 60 60 63 59 47 47 73 73 95 90 70 70 24 24 20 18 95 90 75 70 1056

Auto Switch Guide

Lead wire length indication Note 1) Applicable auto switch with 5 m lead wire (Z) Reed switch: D-B53/B54, DC73(C)/C80C, D-A73(C)(H)/ A80C, D-A53/A54, D-Z73, D90/97/90A/93A Solid state switch: Manufactured upon receipt of order as standard.

HEC-OM-Y008

Selecting 04 in Setting mode activates the control setting mode. Small LED Product Status Reset whether or not an alarm has occurred. Each presses of the [MODE] key changes the operating mode as follows. Each presses of the [MODE] key changes the operating mode as follows.