High Vacuum L Type Valve

) 2 5 Body (Material: A6063) Valve (Material: SUS304) 6 Valve seal 2 (Maintenance part) 3 (Valve seal 2) Nut assembly (Maintenance part) (Set of a nut and a washer) 9 Washer (Material: SUS304 or equivalent) Nut (Material: SUS304 or equivalent) (Shaft) 11 XL-OMS0001-B 5-2.Dimensions C E C E E (KF flange) Fd (K flange) Fn D H B A G A Unit: mm Model A B C D E Fn Fd G H XLA-16-2 40 108 38 20

PF-OMN0009_C

1. 2. 3. 4

3 Position Cylinder Series RZQ

9 Rc1/8 24.5 14 10 5.5 7 4.5 49.5 14 32 110 92 16 28 52 35 14 9 M10 x 1.5 69 5 24 18 40 5.5 M6 x 1.0 9 Rc1/8 26 14 10 5.5 7 4.5 57 14 40 118.5 96.5 16 35 64 37 14 12 M10 x 1.5 86 7 30 22 50 6.6 M8 x 1.25 11 Rc1/4 30 17 14 3 8 5.5 71 19 50 45 M16 x 2.0 84 130 102 21 77 39.5 16.5 15 103 7 36 28 60 9 M10 x 1.5 14 Rc1/4 36.5 21.5 18 4.5 10.5 6.5 19 63 9 3 Position Cylinder Series RZQ Foot type

MR Unit (Regulator with Mist Separator) AMR3000 to 6000 Series

370 440 100 120 130 160 180 210 246 290 ITVX 1 4, 3 8, 1 2 1 4, 3 8, 1 2 1 2, 3 4 1 2, 3 4 PVQ 3 4, 1 3 4, 1 VY1 Adapter Assembly Installation Procedure Accessory/Compact Pressure Switch: IS10-01 For details, refer to Best Pneumatics No. 8.

Pressure Relief 3 Port Valve with Locking Holes

Dimensions Padlock mounting position (Port size) (Port size) Standard specifications Model P1 P2 A B C D E F G H VHS20 1/8, 1/4 1/8 71.5 23 40 37 28 42 17.5 40 VHS30 1/4, 3/8 1/4 87 32 53 49 38 53 20 53 VHS40 1/4, 3/8, 1/2 3/8 111 42.3 70 63 52 71 29 70 1 0 - Revision history Rev. A Safety Instructions (Piping) corrected.

AFF

pcs. each) AI-2S 2BJIS 10KFF 3BJIS 10KFF 4BJIS 10KFF Model AFF2B AFF4B AFF8B AFF11B AFF22B AFF37B AFF75B AFF75A AFF125A AFF150A AFF220A Model Note) Rated flow (l/min (ANR)) 300 750 1500 2200 3500 6000 12000 12000 22000 28000 42000 AFFB AFFA , , , , , , , , , , , flange 3B flange 4B flange 4B 2B 1 8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 3 4 1 2 3 4 Port size (Nominal size B) 3 4 2 11 2 1 1 1 2 1 1 flange

XL-OMY0001

1. 2. 3. 4. 2 XL-OMY0001 / 1 1.5 *3) 3)1 1 () 3 XL-OMY0001 1 &/ 1.52 2 ( ) 5 5 P-01-11 P-06-3 4 XL-OMY0001 2.2 A6063 SUS316L SUS304 5 P11 FKM 3 3[]P8 60 , 245250Hz 30m/s 5 XL-OMY0001 /H0 H4 H5 510% O 0.1mm0.2mm 6 P13 3 3 P7P8 5 P11 7 P14 P18 6 XL-OMY0001 33 5 P11 16 25 40 50 XLA16-30-1-2 XLA25-30-1-2 XLA40-30-1-2 XLA50-30-1-2 XLA16A-30-1-2 XLA25A-30-1-2

INFORMATION Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve For connecting to F.R.L. units AC25-A AC30-A AC40-A VP500 IN OUT VP700 Allows for space saving and reduced piping labor. Power consumption: 0.35 W (Without light) EXH Exam

A 67 G1/2 [3(R) port] (25.5) Type E 66.9 LOCK PUSH 5

Suction cups with flange

Be careful not to lose the O-ring. (3) Loosen the bolt for sealing (M6x8), then remove the cup from plate A. Completion drawing 2.

XL-OMY0003

SUS304> 5 (SUS304) () 2 4 (A6063) < A6063> C D E E F C H B G A A mm A B C D E F G H XLH-16 40 100.5 38 1 30 17 35 XLH-25 50 114 48 1 12 40 26 41 XLH-40 65 162.5 66 2 11 55 41 57 XLH-50 70 179.5 79 2 11 75 52 70 8 XL-OMY0003 5 10 []18 12 O 1) FKM M 10 FKM : 110 Pa <> 9 XL-OMY0003 6 6-1. 1 1P4P5 10 XL-OMY0003 6-2 1 2 b 3 1 2 O 4 a aa b O O 3 O O O O 11 XL-OMY0003

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

indication (2 color) F59 3 wire (NPN) IC circuit 5V, 12V 24V F5P 3 wire (PNP) J51 100V, 200V 2 wire J59 12V 3 wire (NPN) F59W IC circuit 5V, 12V Diagnostic indication (2 color) Relay PLC 3 wire (PNP) F5PW Grommet Yes J59W 12V 24V 2 wire Water resistant (2 color) F5BA * Lead wire length 0.5m (Example): A53 3m L (Example): A53L 5m Z (Example): A53Z IC circuit 3 wire (NPN) F5NT

High Purity Fluoropolymer Needle Valve Series LVN 1

43 52 88 110 124 12 18 22 24 30 36 17-5-135

Smooth Cylinder Series CQSY

NPN) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) Reed switch Solid state switch A96V A96 5 V IC Yes Yes Grommet A93 M9N M9P M9B F9N F9P F9B F9NW F9PW F9BW F9BA A93V F9NV F9PV F9BV F9NWV F9PWV F9BWV 100 V 24 V 12 V Relay, PLC 5 V, 12 V IC 12 V 5 V, 12 V IC Relay, PLC 24 V Grommet 12 V Diagnostic indication (2-color) 5 V, 12 V IC

CJ2Q

Rail mounting Grommet CDJ2QB16-60-A C73 C80 C73C C80C 100V 12V Band mounting CDJ2QB10-45-B No IC 100V 5V, 12V Relay PLC 2 wire Yes 24V 12V Connector No 24V 5V, 12V IC Diagnostic indication (2 color) Grommet Yes H7A1 H7A2 H7B H7C H7NW H7PW H7BW F79 F7P J79 3 wire (NPN) IC 5V, 12V Grommet 3 wire (PNP) 2 wire 12V Connector 3 wire (NPN) F79W F7PW J79W 5V, 12V IC Diagnostic indication (2 color

E/P Pressure Regulator

Station 4 Station 5 Station 6 Station 7 Station 8 Station 2 3 1/4 (1000, 2000) 3/8 (2000, 3000) 1 3 5 0.1 MPa 0.5 MPa 0.9 MPa Thread Type Nil N F Rc(PT) NPT NPTF Protocol SEN SMB Ethernet I/P Modbus TCP Porting ETHERNET ITV ETHERNET ITV Supply: 1/2 Out: 1/4 or 3/8 (per order) PWR NS MS PWR NS MS E/P REGULATOR E/P REGULATOR Thread Type: Rc, NPT or NPTF (per order) Dimensions H Length (mm)

P-E00-1A Models to accommodate a wide variety of applications Electric Actuators CAT. E101 A

100 0.05 Slide screw 200 2 Guide rod type Series LXP 200 3 0.05 Slide screw 100 4 Without motor brake 30 Ball screw 0.03 6 80 Ball bushing guide 100 Slide screw 0.05 200 2 200 3 Slide screw 0.05 100 4 With motor brake 30 Ball screw 0.03 5 80 100 Slide screw 0.05 200 3 Slide table type Series LXS 200 4.5 Slide screw 0.05 100 6 Without motor brake 100 9 30 10 Ball screw

Single Axis Electric Actuator Series LJ1

100 0.05 Slide screw 200 2 Guide rod type Series LXP 200 3 0.05 Slide screw 100 4 Without motor brake 30 0.03 Ball screw 6 80 Ball bushing guide 100 0.05 Slide screw 200 2 200 3 0.05 Slide screw 100 4 With motor brake 30 0.03 Ball screw 5 80 100 0.05 Slide screw 200 3 Slide table type Series LXS 200 4.5 0.05 Slide screw 100 6 Without motor brake 100 9 30 10 0.03 Ball

Load Mass (Horizontal Mounting)(kg): 20~39.9, Table Size Length L(mm): 86, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Rolling Guide] Ball bushing bearing, Table Size Width W(mm): 127, Table Size Height H(mm): 52, Table Surface Treatment: [Anodize] Alumite, Environment: General Purpose, Maximum Load(kg): 20, Types: Magnetic retention force H type

Screw Type: NPT, Cushion: Air cushion, Specification: Magnet built-in, Auto Switches: A93, Lead Wire Length(m): 3, Lead Wire Connector: -, The number of the switches: 3, Custom-made Specifications: 0.1 to 0.8, End Block: H, Custom-made: None

, Port Screw Type: NPT, Cushion: Air cushion, Specification: Magnet built-in, Auto Switches: M9PW, Lead Wire Length(m): 3, Lead Wire Connector: -, The number of the switches: 3, Custom-made Specifications: 0.1 to 0.8, End Block: H, Custom-made: None