HRX-OM-X010 Transporting and Installation . 3-1 3.1 Transporting . 3-1 3.1.1 Transporting with forklift . 3-2 3.1.2 Transporting with caster . 3-3 HRZ Series TOC-1 HRX-OM-X010 Table of Contents 3.2 Installation . 3-3 3.2.1 Installation conditions . 3-4 3.2.2 Installation location and maintenance work area . 3-5 3.3 Procedure for Installation . 3-6 3.3.1 Installation . 3-6 3.3.2 Procedure for system securing
3 5 22 22 14 14 1 1 2-Rc3/8 Ports R1, R2 Rc1/4, 3/8 Port P 25 25 2-Rc3/8 Ports R1, R2 25 25 Rc1/8 Port X (PE) Rc1/8 Port X (PE) Rc1/4, 3/8 Port P 3 Series VQ7-6 Prewired Connector Type 2 position/Single : VQ7-6-FG-SSC Single (reverse pressure): VQ7-6-YZ-SSC 68.5 120.5 52 120.5 2-6.5 Mounting hole 50 50 68.5 25 25 42.5 42.5 2-Rc3/8 (R1, R2) 13 (port A) 13 (port B) Manual override R1 R2 P A
SOL. location A B A B A B A B () A B () () 0 1 2 3 4 5 6 Double Double Single SI unit A side B side 3 position A B A B B A B A B A VQC Double Double Single SI unit A side B side 3 position Stations 1 2 3 4 5 SQ The places of asterisk are not used. 3 position uses two stations for wiring.
4 M5 x 0.8 1/8 1/4 4 12.6 9.1 14.4 A L2 14.7 3 M5 x 0.8 1/8 1/4 3/8 1/8 1/4 3/8 1/4 3/8 1/2 1/4 3/8 1/2 3/8 1/2 35.4 H 6 13.6 11.4 15.9 10.9 37.6 38.6 40.7 42.3 43.3 50.2 49.1 52 52.3 53.2 56.1 64.1 66.6 Connection thread 18.6 (R) 8 16.1 20.5 13.7 19.1 Applicable tube L1 M 10 21 17 33.5 16.6 D 22.6 12 47.7 18.6 18.7 23.6 A L2 26.3 27.3 71 100 H 16 20.8 24.6 Reference dimensions after installation
(g) Bag/Box Quantity Hex M D2 L1 L2 L3 A* 1/4 3/8** 1/2** 1/4** 3/8** 1/2** 3/8-18 3/8-18 3/8-18 3/8-18 3/8-18 3/8-18 3/8-18 3/8-18 3/8-18 Male Hex. Male Hex. Male Hex.
Single unit 1/8 to 3/4 2, 3, 4, 5, 7, 10 0 to 2 (1) 17-2-36 VV2CL2/3/4 N.C. Manifold 2, 3, 4, 5, 7 1/8, 1/4, (3/8) 17-2-42 VCS20/30/40 Single unit N.C. 2, 3, 4, 5, 7, 10 1/8 to 3/4 0 to 1 (1) 17-2-46 VV2CS2/3/4 N.C. Manifold 2, 3, 4, 5, 7 1/8, 1/4, (3/8) 2 port Direct operated 2, 3, 4, 5, 7, (10) (2) 17-2-52 VCW20/30/40 Single unit N.C.
- (2-3-1) LECPA . 32 (2-3-2) LECPA . 32 (2-3-3) LECPA . 34 5.4 .36 5.4.1 .36 (1) .36 (2) .38 5.4.2 .40 (1) .40 (2) .41 6. .42 6.1 .42 (1) .42 (2) .44 (2-1) LECPLECA .44 (2-2) LECPLECA .45 (2-3) LECPA .46 6.2 .47 (1) .47 (2) .47 (3) .48 (4) .50 (5) .51 (6) .52 (7) .54 (8) .54 6.3 .56 (1) .56 (2) .56 (2-1) .56 (2-2) .56 (3) .57 (3-1) .57 (3-1-a) TB Ver1.**. 57 (3-1-b) TB Ver2.**. 58 (3-2) .59
3 position closed center 3 position exhaust center 3 position pressure center 4 position dual 3 port valve: N.C.
Note 3) For AC specification power consumption, refer to page 3.
Setting Data Entry . 48 7.1 Profile parameter . 48 7.2 Basic parameter . 49 7.3 Return to origin parameter . 51 7.4 Step data . 52 (1) ABS . 54 (2) INC . 54 (3) LIN-A / LIN-I. 54 (4) CIR-R / CIR-L . 55 (5) SYN-I . 55 8.
15.6 LEC T1 3 G 3 3 S J E G No (2) (1) LCD (2) (1) (3) (4) (4) (5) (3) (6) (5) () (6) (7) 3m (8) (7) (8) CN4 69 - 15.7 5 4 3 2 1 LEC-CMJCC-Link MJ S T T 5 4 3 2 1 5 4 3 2 1 1 DA CC-Link A 2 DB CC-Link B 3 DG CC-Link 4 SLD CC-Link T 5 FG 70 - 16
3 !3 !0 !4 !7 !1 !9 !2 @1 @3 e u o t @2 !8 @0 @0 !2 !9 e @0 @1 o t u !8 @0 @2 !1 !4 @3 w i !5 y q r q w r y !5 !
10.5 [5m ] L E C P *B* (a) (b) 2 A B-1 L 1 A A-1 (b) 6 A B-1 B B-2 1 1.5m 5 A A-1 B A-2 3 3 3m B B-2 COM-A/COM B-3 4 B A-2 COM-B/A-3 5 5m (c) COM-A/COM B-3 Shield COM-B/ A-3 Vcc B-4 12 GND A-4 13 Vcc B-4 A B-5 7 GND A-4 A A-5 6 A B-5 B B-6 9 A A-5 S B A-6 8 (d) B B-6 3 B A-6 (a) + B-1 4 A-1 5 + B-3 1 2 A-3 (a) (8) (14.2) B1 A1 (b) 2 1 (17.7) (14) (18) (10.2) 6
13.7 M5 x 0.8 1/8 1/4 4 12.6 9.1 14.4 4 3 A L2 14.7 M5 x 0.8 1/8 1/4 3/8 1/8 1/4 3/8 1/4 3/8 1/2 1/4 3/8 1/2 3/8 1/2 35.4 H 6 13.6 11.4 15.9 10.9 37.6 38.6 40.7 42.3 43.3 50.2 49.1 52 52.3 53.2 56.1 64.1 66.6 Connection thread 18.6 (R) 8 16.1 20.5 13.7 19.1 Applicable tube L1 M 10 17 33.5 16.6 21 D 22.6 12 18.6 47.7 18.7 23.6 A L2 71 100 26.3 27.3 H 16 20.8 24.6 Connection thread (with sealant
S Standard cable Orange 9 B A-6 Black 8 3 Actuator side Controller side (14.2) (2) 2 1 (8) (1) B1 A1 (14) (18) (17.7) 6 5 (3) 2 1 A6 B6 15 16 L (11) (30.7) 14.2 Actuator cable [8 to 20m] (1) (2) LE-CPSignal name Terminal number Cable color Terminal number A B-1 Brown 2 Cable length (L) A A-1 Red 1 B B-2 Orange 6 8 8m * B A-2 Yellow 5 COM-A/COM B-3 Green 3 A 10m * COM-B/ A-3 Blue 4 (3) B 15m
flats 30 33 AV4000-04-5 to 6G(Z)-A 1/2 1/2 1/2 AV5000-06,10-1 to 4G(Z)-A 3/4,1 3/4,1 3/4 128 59 53 37 37 53 Width across flats 36 52 AV5000-06,10-5 to 6G(Z)-A 3/4,1 3/4,1 3/4 Optional specifications With bracket With built-in silencer Model K L M N P Q R S T U V W X Y AV2000-02-1 to 4G(Z)-A 30 50 51.5 44 5.5 10 66 2.3 33.5 54 M4 x 0.7 Depth 6 3 Width across flats 14 AV2000-02-5 to 6G(Z)
Alarm was generated in order of (1) -> (5) 6030h (1) 0-7 Alarm 1 6030h (2) 0-7 Alarm 2 Alarm 1 (Latest) (1) (2) (3) (4) (5) 6030h Alarm 2 0 (1) (2) (3) (4) (3) 0-7 Alarm 3 Alarm 3 0 0 (1) (2) (3) Alarm 4 0 0 0 (1) (2) (1) to (5) in the table indicate the alarm codes which are generated. 6030h Refer to 15.2.
of bottom positioning pin hole Position of bottom positioning pin hole Symmetric type For 180 For 90 Positioning pin hole Positioning pin hole 3 Counter-clockwise 3 B port 3 22.5 3 22.5 84 96 e ng e ng ra 3 ra on on ti A port ta 3 ti 90 4 ro ta 7 ro m 1 A port A port u Clockwise m e e m g s u 3 i ni n w im k C ra c l o Mi 6 8 3 ax n o 1 ti M ta ro e m g u m n ni Mi e ra C 180 s l i o
Electrical entry Nil L Grommet (0.6 m) (5) Digital vacuum switch unit Grommet (3 m) C Connector (0.6 m) CL Connector (3 m) CN Without connector L L plug connector Voltage 21 C 0X ZSE3 D 1 3 100 VAC 50/60 Hz 110 VAC 50/60 Hz 5 24 VDC 6 12 VDC V 6 VDC S 5 VDC R 3 VDC Applicable to plug connector. (Connector assembly with rectifier is attached.)
Note 3) Includes 1 L/min [ANR] of purge air flow (at 0.7 MPa inlet air pressure) for the dew point indicator (except IDG1, 3, 5).