Direct Operated Precision Regulator Modular Style Series ARP3000 1

Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions. 2) Install the valve guide (on the opposite side of the handle) 60 mm away from the ground surface. Maintenance and inspection will be facilitated. 3) Air is normally released from the bleed hole.

ZSE3/ISE3

output specifications 21 and 23.

VXA21/22

42.5 47.5 71 80 81 90 21 27 , , 1 4 3 8 17-3-104

3 Port Solenoid Valve

To remove the station, follow the same procedure for assembly and disassembly. 21 Series S070/Specific Product Precautions 3 Be sure to read before handling. Refer to pages 16 through 19 for safety instructions, precautions.

Series SYJA300 3 Port Air Operated Valve

28 44 29 25 36 18 27 34 X 21 14 1 R P 40 4 26 3.5 26 4 48.7 54.2 40.5 34 10 2-4.5 2-M4 X 0.7 55.5 3.6 54.2 (Mounting thread) (Mounting holes) 3-Rc(PT) 8 1 (P, A, R port) 0.8 P R 54.5 1.8 (Bleed port) 16 14.5 20 With filter (80mesh) 1.8 (Bleed port) 12 With filter (80mesh) 23 15 3-Rc(PT) (P, A, R port) , 8 1 4 1 48 3.3-4

Vacuum System Peripherals:

Section code 13-14-20 20 ZX ZR ZM ZH ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL ZY ZQ ZF ZP ZCU AMJ Misc. 13-14-21 Date issued: 21 Photo copying this page is recommended.

VHK

B L1 H 1(P) 2(A) C D E F G J K L3 L4 L5 L6 Q L2 M1 Model 1(P)2(A) 29.1 53.9 24.3 29.6 52.9 23.8 15.8 16.8 11 2.0 1.2 19 49 11 21 50 13 M5 4 6 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHKl-M5-06F VHKl-M5-04F 18 41 16.5 3.5 3.4 1.2 21 51 11 23 53 13 4 6 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHKl-01S-06F VHKl-01S-04F 18 41 55.4 23.8 31.6 56.9 24.3 32.6 16.5 3.5 15.8 16.8 11 7.2 9.7 1 8 8 VHKl-01S-08F 62.2

VKF300

Port Direct Operated Poppet Solenoid Valve SeriesVKF300 3 Port Direct Operated Poppet Solenoid Valve Series VKF300 Series VKF300 Compact with large flow rate Body width 18mm Cv0.25 (Standard: Base mounted type) Cv0.20 (Standard: Body ported type) Various manifold piping directions Output port: Manifold set-up allowing 360 rotation of 2(A) entry direction (in 90 increments) Types 20 and 21

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

L 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 VS 260.5 285.5 21 273 No.

VXA21/22

20 20 22.5 27.5 42.5 47.5 71 80 81 90 21 27 1 4 3 8 4.1-71 Direct Air Operated 3 Port Valve/Manifold Series VVXA31/32 For Air, Gas, Vacuum and Oil Compatible with a wide variety of fluids.

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Rc 3 8 ZH05DS-06-01-06 ZH05DL-06-01-06 ZH07DS-06-01-06 ZH07DL-06-01-06 ZH10DS-06-01-08 ZH10DL-06-01-08 ZH13DS-08-02-10 ZH13DL-08-02-10 ZH15DS-10-03-12 ZH15DL-10-03-12 12.8 24 21 7.8 6 17 24 12.8 24 21 6 17 24 12.8 24 22 6 17 24 12.8 24 22 6 17 24 13.7 26 24.5 8 20 28 13.7 26 24.5 8 20 28 15.3 28 27 10 22 30 15.3 28 27 10 22 30

NVKF

Oooosite side of 02 2 stations 20 20 stations Same side as A port Port size I B3T lone touch frttina fors/32'tube B7T lone touch fittino for 1/4" tube Body ported / Type 21 (A pon: top porting) NW3KF3-21-@-OOT Applicable valves NVKF3330 OOO -M5 NVKF333O OOO -o1T .

NVZseies

NVZsO4R-OM Lead wire length Tgpe 20 Manifold,/ Top Ported inch (mm) Gromm{ (G), (H) % NPTF 4 ports L type dug connectot(L) M type plug connector(M) 21 Manifold,/ Top Ported' inch (mm) Grommet (G), (H) 2 Mounting holes L Vpe dug cmnecto.

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, "MFLD, VALVE, VV5Q* MANIFOLD VQ 4/5 PORT, U6, VV5Q* BUILT IN FITTING

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, "MFLD, VALVE, VV5Q* MANIFOLD VQ 4/5 PORT, U6, VV5Q* BUILT IN FITTING

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, "MFLD, VALVE, VV5Q* MANIFOLD VQ 4/5 PORT, WM, VV5Q* BUILT IN FITTING >1/4

VQ valves are ideal for applications requiring high speed, frequent operation, stable response time and long service life. Innovative mounting methods allow valves to be changed without entirely disassembling the manifold. Built-in one-touch fittings save piping time and labor. Base mounted, plug-in type manifold for VQ2*0* valve, D-sub connector (25 pin standard, 15 pin option), Top or side

! Contact our sales office for delivery dates and prices as this is a special model. SP133X-010E P: RU P.G.Information (Specialized Product) SMC CORPORATION Pilot Operated Check Valve 4-14-1,SOTO-KANDA, CHIYODA

Model d T1 T2 H1 H2 D1 D2 L1 L2 L3 L4 A * M ASP330F-01-06S-X369 R1/8 M5X0.8 12 8 14.2 20.4 27.5 13.6 38.6 35.2 13.5 6 11.6 ASP430F-02-06S-X369 25.2 34.4 18.3 16.8 R1/4 17 18.5 48.7 42.4 ASP430F-02-08S-X369 27.2 36.4 18.4 18.5 Rc1/8 12 8 15.2 ASP530F-03-08S-X369 29.7 41.2 18.7 R3/8 19 23 21 56.2 50 ASP530F-03-10S-X369 31.6 43.1 20.8 10 18.5 ASP630F-04-10S-X369 33.6 47.9 25.6 20.8 R1/2 Rc1/

AZ1000

pressure: 600 psig (4.1 MPa) 1.5 (38.1) 80 0.55 0.48 70 2.62 (66.5) Delivery pressure (MPa) Delivery pressure (psig) 0.41 60 0.34 50 0.27 40 0.69 (17.5) 0.21 30 0.14 20 2.5 (63.5) 0.07 10 A 0.00 0 0 100 200 300 400 500 600 700 800 Flow rate (slpm, N2) 0.88 (22.4) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) AZ1402TA Inlet pressure: 2 psig (14 kPa) 760 0 -8 700 Delivery pressure (mm Hg) -21

Stroke Reading Cylinder and Counter

steel Aluminum alloy Hard chrome plated Head cover Hexagon socket head cap screw 3 17 Stainless steel Aluminum alloy Hard anodized Piston A Hexagon nut 4 18 Chromated Carbon steel Aluminum alloy Hard anodized Piston B Spring washer 5 19 Chromated Steel wire Aluminum alloy Hard anodized Piston rod Spring washer 6 20 Chromated Steel wire Carbon steel Hard chrome plated Tie-rod Hexagon nut 7 21