VSA4

2 position single: VSA4140 2 position double: VSA4240 3 position closed center: VSA4340 3 position exhaust center: VSA4440 4-9 (11) Mounting hole 4-9 (11) Mounting hole 4-9 (11) Mounting hole ( ): Valve for Rc 3/4 5-3-36 7 Series VSA40 Manifold Specifications Specifications Valve manifold with the same body size Valve manifold with the same body size Value manifold with the different body

Rotary Table

Warning Do not drop, bump or apply excessive impacts (300m/s2 or more for reed auto switches and 1000m/s2 or more for solid state auto switches) while handling. Although the body of the auto switch may not be damaged, the inside of the auto switch could be damaged and cause malfunction. 2. Observe the proper tightening torque for mounting an auto switch.

CRB2-OM00001

Do not drop, bump or apply excessive impacts (300m/s2 or more for reed auto switches and 1000m/s2 or more for solid state auto switches) while handling. Although the body of the auto switch may not be damaged, the inside of the auto switch could be damaged and cause malfunction. (2) Observe the proper tightening torque for mounting an auto switch.

Accuracy: Basic Type, Size: 40, Motor Type: S2 (100W Output, Incremental Encoder), Lead, mm: A (Size 40: 16mm, Size 63: 20mm, Size 100: 25mm), Stroke: 300mm, Motor Option: None, Cover: w/o Cover, Cable Type: S (Standard), Cable Length: 2m, Driver Type: A1 (LECSA1-S, 100~120V, Incremental, Pulse Input)

Accuracy: Basic Type, Size: 40, Motor Type: S2 (100W Output, Incremental Encoder), Lead, mm: A (Size 40: 16mm, Size 63: 20mm, Size 100: 25mm), Stroke: 300mm, Motor Option: None, Cover: w/o Cover, Cable Type: S (Standard), Cable Length: 2m, Driver Type: A2 (LECSA2-S, 200~230V Incremental, Pulse Input), I/O Connector: H (Connector)

Accuracy: Basic Type, Size: 40, Motor Type: S2 (100W Output, Incremental Encoder), Lead, mm: A (Size 40: 16mm, Size 63: 20mm, Size 100: 25mm), Stroke: 300mm, Motor Option: None, Cover: w/o Cover, Cable Type: R (Robotic, Flexible), Cable Length: 5m, Driver Type: A1 (LECSA1-S, 100~120V, Incremental, Pulse Input), I/O Connector: H (Connector)

Accuracy: Basic Type, Size: 40, Motor Type: 100W Output, Incremental Encoder, Lead, mm: Size 40: 16mm, Size 63: 20mm, Size 100: 25mm, Stroke: 300mm, Motor Option: None, Cover: w/o Cover, Cable Type: Standard, Cable Length: 2m, Driver Type: LECSA1-S, 100~120V, Incremental, Pulse Input, I/O Connector: -, Option: -

Accuracy: Basic Type, Size: 40, Motor Type: 100W Output, Incremental Encoder, Lead, mm: Size 40: 16mm, Size 63: 20mm, Size 100: 25mm, Stroke: 300mm, Motor Option: None, Cover: w/o Cover, Cable Type: Standard, Cable Length: 2m, Driver Type: LECSA2-S, 200~230V Incremental, Pulse Input, I/O Connector: Connector, Option: -

Accuracy: Basic Type, Size: 40, Motor Type: 100W Output, Incremental Encoder, Lead, mm: Size 40: 16mm, Size 63: 20mm, Size 100: 25mm, Stroke: 300mm, Motor Option: None, Cover: w/o Cover, Cable Type: Robotic, Flexible, Cable Length: 5m, Driver Type: LECSA1-S, 100~120V, Incremental, Pulse Input, I/O Connector: Connector, Option: -

Lubrication Equipment

A B 63 63 80 85 90 100 C Port size Rc(PT) INA-11-402 INA-11-403 INA-11-404 INA-11-405 INA-11-406 INA-11-407 Model No. 1/4 15 15 15 20 22 22 141 164.5 170 180 230 251 3/8 1/4 , 3/8 , 1/2 3/4 B C D E F Port size Rc(PT) 3/4 , 1 1 Model No. A 1 2 150 165 42.7 76.3 45 65 40 60 35 40 80 80 ALBA90-10 ALBA90-20 1.17-24

NCA1

/32 9/32 1.43 1 1.71 3 5/8 2.36 6.44 5/8 1 15/16 2 1/4 1.81 M16x1.5 200 (2) 5/8 7/16-20 3/4 2.6 1 1/8 3/8 9/16 5/16-24 2 1/2 0.3 3/8 1.26 1.06 11/32 11/32 1.84 1 1.71 3 5/8 2.40 6.44 7/8 1 15/16 2 1/4 1.81 M16x1.5 250 (2.5) 5/8 7/16-20 3/4 3.1 1 1/8 3/8 9/16 5/16-24 3 0 3/8 1.30 1.06 11/32 11/32 2.19 1 1.75 3 3/4 2.48 6.44 1 1/4 1 15/16 2 3/8 1.69 M16x1.5 325 (3.25) 1 3/4-16 1 1/8 3.9 1 1

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

10 11 10 13 7.2 7.2 b 0.18 0.24 0.18 0.24 0.28 0.25 0.16 0.26 0.26 0.27 Cv 2.4 3.0 2.4 3.0 2.4 2.8 2.4 2.8 2.4 3.3 b 0.24 0.27 0.24 0.27 0.24 0.27 0.20 0.27 0.25 0.29 Cv 3.0 3.3 3.0 3.3 2.4 2.8 2.4 3.3 2.8 3.0 C 12 13 12 13 10 11 10 13 11 12 7.0 7.0 Metal seal Rubber seal Metal seal Rubber seal Metal seal Rubber seal Metal seal Rubber seal Metal seal Rubber seal Metal seal Rubber

α PneuAlpha HARDWARE MANUAL

Installation. 11 2. Hardware Specification. 3 1. Introduction. 1 3.1 DIN RAIL Mounting . 11 3.2 Termination at Screw Terminals . 11 3.3 Installation Mounting Notes. 12 2.1 Available Models. 3 2.2 Power Supply Specification . 4 2.3 Input Specification. 5 2.4 Output Specification. 7 2.5 General Specification. 8 iii PneuAlpha 4. Wiring . 13 6.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

1000m/s2 Insulation resistance 50M or more at 500V DC (between lead wire and case) 1500V AC/min.

MHF2

11 Groove for auto switch mounting 2-M3 x 0.5 thread depth 4 Mounting thread 11 34 12-3-13 14 Series MHF2 Dimensions MHF2-8D2 2.5H9 +0.025 0 depth 2.5 17 17 17 2.5H9 +0.025 0 depth 2.5 3 3.4 64.3 4-M3 x 0.5 thread depth 7 Mounting thread 32 72 2-M3 x 0.5 thread depth 4 Mounting thread 15.8 58 5.9 E 11 11 14 19 E 0 -0.1 4-2.6 through (Mounting hole) M3 x 0.5 17 18 0.8 18 0.8 Finger closing

MHF2

, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 3.4 40.3 3 MHS MHC 32 48 2-M3 x 0.5 thread depth 4 Mounting thread MHT 15.8 34 5.9 E MHY 11 11 MHW 14 19 MRHQ E M3 x 0.5 0 -0.1 2-2.6 through (Mounting hole) 17 Misc.

Dedicated Controller

SET-ON 10 Start readiness signal CN2 24V DC + COM 1 COM 11 NO. 0 Indicates operation in progress when ON. ON when program is being executed and when returning to the home position. 2 BUSY 11 Operating signal NO. 1 12 NO. 2 3 <1> When this signal is OFF, an alarm is being generated for the actuator/controller.

Step Motor Controller With Step data Teaching Function (Servo / 24VDC)

Move Speed Position Accel PushingF T riggerL V PushingSp Moving F Area1 Area2 In posn mm/s2 mm/s mm mm/s2 mm/s mm mm mm 0 Absolute 100 20.00 1000 1000 0 0 0 100 18.00 22.50 0.5 1 Absolute 50 10.00 1000 1000 70 60 5 100 6.0 12.0 1.5 63 Absolute 20 5.00 500 500 0 0 0 100 3.0 8.0 1.2 6.

JXCx-OMT0028CN

11 L 12 H 2 065500 mm/s2 13 L H=L= (LECP6)(LECA6) 42 - Bit/Byte / Address ID No. 14 1 030 10% 15 1 030 10% 16 1 0255 mm/s ID1 17 1 030 10% 18 H 2 065500 0.01mm 19 L ID2 2039 ID1 ID3 4059 ID1 ID4 6079 ID1 ID5 8099 ID1 ID6 100119 ID1 ID7 120139 ID1 ID8 140159 ID1 ID9 160179 ID1 ID10 180199 ID1 ID11 200219 ID1 ID12 220239 ID1 240249 250253 254,255 / JOG(-) ON OFF FLGTH

EX600-DX_DY_DM_eng

4 4 1 2 3 4 1 2 3 4 1 2 3 4 1 2 3 4 2 1 3 5 4 7 6 9 8 11 10 13 12 2 1 3 5 4 7 6 9 8 11 10 13 12 7 6 5 7 6 5 Group Group Pin number Pin number Pin number 3 3 1 0 1 0 2 2 13 11 13 11 12 12 10 10 8 6 8 6 5 3 1 9 7 9 7 4 2 5 3 1 5 3 1 4 2 4 2 Pin number Pin number 4 3 2 1 4 3 2 1 4 3 2 1 4 3 2 1 4 3 2 1 4 3 2 1 4 3 2 4 3 2 1 EX600-DMPE EX600-DMPF EX600-DYPE EX600-DYPF 0 V (output) 24 V (output