3 Port Solenoid Valve Series VQ100 1

Lead wire color VQZ 4 1 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 Black Brown Red Orange Yellow Pink Blue Purple Gray White White Yellow Orange Yellow Pink Blue Purple Gray Orange Red VZ 5 10 16 11 20 17 VS VFN Multi-connector pin arrangement DIN rail mounting bracket Pin no. 1 SOL.

90

Release valve 9 stations Release valve 23 Supply valve 6 5 Supply valve 11 10 stations Release valve 10 stations 24 Release valve 4 3 12 Supply valve Supply valve 25 11 stations Release valve 11 stations Release valve 2 1 13 Supply valve Supply valve 12 stations Release valve 12 stations Release valve COM. 25 Triangle mark indicator position COM. 26 Positive common specification Positive

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Clean Room Specification 11-LEFS Series LEFS16, 25, 32, 40

3 H Clean Series q 11 Vacuum type q Accuracy w Size e Motor type 16 25 32 40 Nil Basic type H High precision type Symbol Type Applicable size Compatible controller/ driver 11-LEFS16 11-LEFS25 11-LEFS32 11-LEFS40 LECP6 LECP1 LECPA LECPMJ Nil Step motor (Servo/24 VDC) V V V V r Lead [mm] A Servo motor (24 VDC) V V LECA6 Symbol 11-LEFS16 11-LEFS25 11-LEFS32 11-LEFS40 A 10 12 16 20 B 5 6 8

HRX-OM-W004

SW screen TYPE Contact input signal 2 operation D.IN2 No.11 Setting input operation of contact input signal 2.

Vacuum Unit

Selectable option for manifold (Refer to i on pages 11 and 12, and y on page 13.)

MY1

) 5 (Max. 11) 5 (Max. 16.5) 8 (Max. 20) 9 (Max. 25) 13 (Max. 33) 13 (Max. 38) With low load shock absorber + Adjusting bolts MY1W Bore size Stroke L TT h h E F EA h EB W F Stroke adjusting unit S (Shock absorber stroke) T MY1W16, 20 F MY1W50, 63 Shock absorber EC EY h 3.6 3.6 3.5 4.5 4.5 5.5 5.5 TT 5.4 (Max. 11) 5 (Max. 11) 5 (Max. 16.5) 8 (Max. 20) 9 (Max. 25) 13 (Max. 33) 13 (Max. 38) S

REC

17 19 21 0.3 RHC G 7 11 13 13 0.5 10 10 50 100 200 300 400 (mm/s) (Initial cushioning speed) 4 7 9 9 0.7 500 MK(2) Rod side trunnion style: U Head side trunnion style: T 32 42 48 52 0.3 Clevis style: C, D RS Q G C 22 30 35 37 0.5 Graph (2) Applicable Max.

Digital Flow Switches

Pin description PF2A7H-(-M) 68 69 1 DC(+) 2 Analog output 3 DC() Accumulated pulse output wiring examples 4 OUT1 4-I thread with depth J 40 Max. 30V 80mA or less OUT1 Black Load H 0V Blue 50msec PF2A7H-(-M) 28 29 B C D E F G H I J A Model Brown PF2A703H PF2A706H PF2A712H 55 160 40 92 67 55 Rc 1, NPT 1, G 1 36 M5 x 0.8 8 OUT1 80mA Load Black 65 180 45 104 79 65 Rc 11/2, NPT 11/2, G 11/2 Rc

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

For detailed selection procedures, refer to pages 8-11-12 to 8-11-13. 8-12-7 8 Series MY1W Maximum Allowable Moment/Maximum Load Weight Maximum Allowable Moment: MY1MW MY1MW/M2 MY1MW/M3 MY1MW/M1 200 40 50 20 100 30 10 20 50 40 5 4 30 10 3 MY1MW63 MY1MW63 MY1MW63 MY1MW63 MY1MW63 MY1MW63 20 MY1MW63 MY1MW63 MY1MW63 2 MY1MW50 MY1MW50 MY1MW50 Moment (Nm) Moment (Nm) Moment (Nm) MY1MW50 MY1MW50

3 Port Solenoid Valve Series VQ100

Lead wire color VQZ 4 1 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 Black Brown Red Orange Yellow Pink Blue Purple Gray White White Yellow Orange Yellow Pink Blue Purple Gray Orange Red VZ 5 10 16 11 20 17 VS VFN Multi-connector pin arrangement DIN rail mounting bracket Pin no. 1 SOL.

Electric Actuator

LECSB Positioning unit 24 VDC Note 2) Note 4) CN1 QD75D (Manufactured by Mitsubishi Electric) Note 4) 21 DICOM CN1 Failure Note 3) DICOM 20 48 ALM RA1 CLEARCOM 14 DOCOM 46 Zero speed detection 23 ZSP RA2 CLEAR 13 CR 41 Torque limiting RDYCOM 12 25 TLC RA3 Positioning completion READY 11 RD 49 24 INP RA4 PULSE F+ 15 PP 10 PULSE F 16 PG 11 10 m or less NP 35 PULSE R+ 17 S/S NG 36 PULSE R 18

Low Friction Cylinders Series MQ

Refer to front matters 42 and 43 for Safety Instructions and pages 3 to 11 for Actuator and Auto Switch Precautions.

CKZ2N

ACA201M ACA202M ACA203M CKZ-50A001 CKZ-50A002 CKZ-50A003 CKZ-50A007 CKZ-50A008 CKZ-50A009 0.6 (1.32) 0.7 (1.54) 0.9 (1.98) 0.7 (1.54) 0.8 (1.76) 1.0 (2.20) Straight-Machined 25 mm Offset-Machined A A B B 8F7+0.013 +0.028 through C C D D E E F G 8F7+0.013 +0.028 through F G 20 0.03 10 3 20 0.03 30 0.025 30 0.025 10 H 11 through 30 0.025 30 0.025 I 11 through M6 x 1.0 M6 x 1.0 H I 15 0.03 15

End Lock Cylinder Series CBG1

81 11 M6 x 0.75 10 5 1 6.5 15 123 +0.08 0 32 5.5 10 M10 x 1.25 15 35.5 1/8 11 81 11 M8 x 1.0 12 5.5 1 7.5 24 123 +0.08 0 40 6 14 M14 x 1.5 19 44 1/8 11 92 12 M10 x 1.25 14 6 1.25 8.5 24 144 +0.08 0 50 +0.08 0 7 18 M18 x 1.5 19 55 1/4 11 107 13 M12 x 1.25 16 7.5 2 10 24 167 63 7 18 M18 x 1.5 19 69 1/4 11 107 13 M14 x 1.5 18 11.5 3 14.5 24 167 +0.08 0 80 10 22 M22 x 1.5 23 80 3/8 21 130 40

Digital Flow Switches, Series PF2A, Series PF2W

Pin description PF2A7H-(-M) 68 69 1 DC(+) 2 Analog output 3 DC() Accumulated pulse output wiring examples 4 OUT1 4-I thread with depth J 40 Max. 30V 80mA or less OUT1 Black Load H 0V Blue 50msec PF2A7H-(-M) 28 29 B C D E F G H I J A Model Brown PF2A703H PF2A706H PF2A712H 55 160 40 92 67 55 Rc 1, NPT 1, G 1 36 M5 x 0.8 8 OUT1 80mA Load Black 65 180 45 104 79 65 Rc 11/2, NPT 11/2, G 11/2 Rc

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

142 191 211 237.5 248 16 192 241 261 287.5 298 12 152 201 221 250 260.5 15 182 231 251 275 285.5 L1 L2 (L3) (L4) (L5) *SG Type: L2=10n+68 (L3)=L3(Std.)+25 (L4)=L4(Std.)+25 (L5)=L5(Std.)+25 11 Series VQ100 Non Plug-in Unit Manifold VV3Q12 Phillips/ordinary round head screw M1.74 L1 5 L2 3 Manual override 2-3.2 Mounting hole 10.8 3.5 8.9 P E 28.7 11 P E 26.5 33.8 44.8 4-M5 (P,E port) P=10

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

For detailed selection procedures, refer to pages 8-11-12 to 8-11-13. 8-12-7 8 Series MY1W Maximum Allowable Moment/Maximum Load Weight Maximum Allowable Moment: MY1MW MY1MW/M2 MY1MW/M3 MY1MW/M1 200 40 50 20 100 30 10 20 50 40 5 4 30 10 3 MY1MW63 MY1MW63 MY1MW63 MY1MW63 MY1MW63 MY1MW63 20 MY1MW63 MY1MW63 MY1MW63 2 MY1MW50 MY1MW50 MY1MW50 Moment (Nm) Moment (Nm) Moment (Nm) MY1MW50 MY1MW50

air-filter-e

Pressure Control Equipment Industrial Filters Material NBR FKM Symbol N V FQ1010 FQ1011 FQ1012 Specifications FQ1010 Model FQ1011 FQ1012 1 (L 125) 1 (L 250) 2 (L 250 x 2) No.of built-in elements (L : Element length in mm) *BLUE links will lead to purchase pages. Element 1. Fiber element (P.P.) 2. Fiber element (Cotton) 3.

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12

S 8 50, 100, 150, 200, 250, 300 "n" pcs. n 12 50, 100, 150, 200, 250, 300, 350, 400 Auto switch type Adjuster option Nil Without auto switch (Built-in magnet) Nil Rubber stopper B Shock absorber Metal stopper C One side centralized piping, switch rail Only for MXY12 One side centralized piping, with switch rail Nil Without one side centralized piping, without switch rail N The auto switch

Air Preparation Equipment

Pressure Control Equipment Industrial Filters Material NBR FKM Symbol N V FQ1010 FQ1011 FQ1012 Specifications FQ1010 Model FQ1011 FQ1012 1 (L 125) 1 (L 250) 2 (L 250 x 2) No.of built-in elements (L : Element length in mm) *BLUE links will lead to purchase pages. Element 1. Fiber element (P.P.) 2. Fiber element (Cotton) 3.