3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

. 4 stations 4 1 SOL. 5 stations 5 SOL. 6 stations 6 (b) SOL. 7 stations 7 2 SOL. 8 stations 8 SOL. 9 stations 9 Black White SOL. 10 stations 10 SOL. 11 stations 11 SOL. 12 stations 12 SOL. 13 stations 13 SOL. 14 stations 14 SOL. 15 stations 15 SOL. 16 stations 16 SOL. 17 stations 17 SOL. 18 stations 18 COM 19 COM 20 Electrical wiring specifications 18

180° Angular Style Air Gripper Series MHY2/MHW2

Series MHY2/MHW2 180 Angular Style Air Gripper Cam Style / Rack & Pinion Style MHZ MHF MHL MHR MHK MHS MHC MHT MHY MHW -X MRHQ MA D655 180 Angular Style Air Gripper Cam Style Rack & Pinion Style Series MHY2/MHW2 Series MHY2/Cam Style Light and compact size in small bore sizes Over length L (mm) Gripping moment Bore size (mm) Model Mass (g) (Nm) L MHY2-10D 10 0.16 70 71 MHY2-16D 16 150 0.54

Process Pump

SUP = 0.4 MPa SUP = 0.4 MPa 200 SUP = 0.3 MPa SUP = 0.3 MPa 100 SUP = 0.2 MPa SUP = 0.2 MPa 100 50 0 5 0 0 10 0 10 15 20 25 20 30 40 50 Discharge rate (L/min) Discharge rate (L/min) PAF3413 Air Consumption (3 Hz) PAF5413 Air Consumption (2 Hz) 200 Air consumption (L/min [ANR]) Air consumption (L/min [ANR]) 300 150 SUP = 0.5 MPa SUP = 0.5 MPa SUP = 0.4 MPa 200 SUP = 0.4 MPa 100 SUP = 0.3

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

Maximum manufacturable stroke (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit. For a stroke in the standard stroke range, suffix the part number with -XB10.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

Maximum manufacturable stroke (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit. For a stroke in the standard stroke range, suffix the part number with -XB10.

Dedicated Controller

SET-ON 10 Start readiness signal CN2 24V DC + COM 1 COM 11 NO. 0 Indicates operation in progress when ON. ON when program is being executed and when returning to the home position. 2 BUSY 11 Operating signal NO. 1 12 NO. 2 3 <1> When this signal is OFF, an alarm is being generated for the actuator/controller.

Compact Cylinder/Guide Rod Type Series CQM

32 40 50 63 80 100 6 8.5 11.5 14.5 18 24 9 13 11 13 17 21 D-P4DWL type is compatible with bore sizes 40 to 100.

RB/RBL/RBQ

RB J D-X 20Data 10-18-11 11 Shock Absorber: Short Type Series RBQ Series RBQ/Shock Absorber: Short Type Technical Data: Model Selection Symbol 1.

Rotary Actuator

9 15 30 10 20 47 19 28 90 25 38 150 43 203 43 203 3 Series CRB2 Rotary Actuator: Replaceable Shaft A shaft can be replaced with a different shaft type, except for standard shaft type.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Clean Room Series Microspeed Cylinder Series 10/11 -CM2X Series 10/11 -CM2X How to Order Clean room series 10 11 Mounting Relieving type Vacuum type B L F G BZ Basic Type Axial foot type Front flange type Rear flange type Boss-cut basic type C(D)M2X L 40 10 150 C73 With auto switch (with built-in magnet) Boss-cut front flange type FZ Microspeed cylinder Bore size 20 25 32 40 Number of auto

RB/RBL/RBQ

RB J D-X 20Data 10-18-11 11 Shock Absorber: Short Type Series RBQ Series RBQ/Shock Absorber: Short Type Technical Data: Model Selection Symbol 1.

0.4

(packaged together) 50 80 650 F 40 550 G 10 300 H 4 200 J Filter (IN port) Nil Without filter F With filter Note) 100 Note) Flow reduction rate 50 L/min: 5% or less 100 L/min: 5 to 10% 150 L/min: 10 to 15% 80 600 K 40 500 L 10 250 M 4 150 150 Specifications Flow rate (L/min) [at 0.25 MPa] 50 100 150 Power consumption (W) 80 40 10 4 80 40 10 4 80 40 10 4 Type of actuation 2-position 2 port

JXCx-OMT0028CN

No.1 2 =0 39 - 11. 11.1 [IN] Bit/Byte / Address ID No. 0 OUT0 bit 0,1 1 OUT1 bit 0,1 2 OUT2 bit 0,1 3 OUT3 bit 0,1 0 4 OUT4 bit 0,1 5 OUT5 bit 0,1 6 bit 0 7 bit 0 0 BUSY bit 0,1 1 SVRE bit 0,1 2 SETON bit 0,1 3 INP bit 0,1 1 4 AREA bit 0,1 5 WAREA bit 0,1 ID1 6 ESTOP bit 0,1 7 ALARM bit 0,1 2 H 3 4 0.01mm 2147483647 4 5 L 6 H 2 065500 mm/s 7 L 8 H 2 0300 % 9 L 10 H 11 4 0.01mm

LUBRICATOR

CONSTRUCTION / PARTS LIST 10-11 8. SPECIFICATIONS OF BOWL ASSEMBLY 12-17 9. REPLACEMENT PROCEDURE 18-21 10. DISASSEMBLY DRAWING 22-25 11. DIMENSIONS 26 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

SMC Electronic Switch Series Variations

The EDPROM is rated to keep its memory for up to 100,000 hours (approx. 11 years) without having power supplied. Wiring Warning qAvoid close proximity to power or high voltage lines.

Vacuum Equipment

NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber ZP02 ZP04 ZP06 ZP08 ZP10 ZP13 ZP16 ZP20 ZP25 ZP32 ZP40 ZP50 ZP63 ZP80 ZP100 ZP125 5 7 8 2 2 4 4 7 9 11 2 4 5 7 10 4 6 8 10 5 5 10 10 7 9 9 10 13 10 8 13 11 13 11 10 11 16 20 25 32 12 14 9 9 13 15 19 25 33 13 15 20 26 35 14 17 20 24 30 15 18 21 26 33 14 14 13 20 18 12 13 11 17

Rotary Actuator/Vane Style Series CRB2

203 203 30 47 90 150 49 Series CRB2 Rotary Actuator: Replaceable Shaft A shaft can be replaced with a different shaft type except for standard shaft type (W).

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

(Equivalent tightening torque: T) 18.8 13.8 11.8 5.8 2.8 0.5 8.6 11 G1/4 (mm) Part no.

Rotary Table: High Precision Type

Fig.11 Component parts of MSUA1/3 switch unit No.

Lubricator

How to Replace the Components] (P21-30and [11. Disassembly Drawing] (P31-32). Note 1) Assembly of 2 types of bracket and 2 set screws. Note 2) Replacement part Part No. No.