) (12.5) 11(B port) (12.5) Indicator light Indicator light 167 181 59 73 50 90 108 2 4 24.6 38 48 11 (A port) 11 (B port) B A (12.5) (12.5) 14 12 1 5 3 4 2 Manual override 30 45 24.6 A B 25.6 Mounting hole 38 48 B A 14 5 3 1 12 30 45 25.6 Mounting hole Manual override 14.5 27 30.5 32 41.5 91.5 129 G1/2 Electrical entry 79 PE X 41.5 32 30.5 X PE 27 R1 R2 P 15.5 14.5 R1 R2 P 15.5 Rc1/8 External
-7A-X2 ZP 13 C ZPG13C-7A-X2 7 7 7 7 ZP13C ZP 16 C ZPG16C-7A-X2 7 7 7 8 ZP16C ZP 20 C ZPG20C-7A-X2 9 10 10 11 ZP20C ZPT3-7A-X2 ZP 25 C ZPG25C-7A-X2 10 10 10 11 ZP25C ZP 32 C ZPG32C-7A-X2 10 11 11 12 ZP32C ZP 10 B ZPG10B-7A-X2 7 7 7 8 ZP10B ZPT2-7A-X2 ZP 13 B ZPG13B-7A-X2 7 8 8 8 ZP13B ZP 16 B ZPG16B-7A-X2 8 8 8 9 ZP16B ZP 20 B ZPG20B-7A-X2 11 11 11 13 ZP20B ZPT3-7A-X2 ZP 25 B ZPG25B
1 90 314.8 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5 336.3 Specific Product Precautions Semi-standard specifications PC/PA bowl1 Stainless steel bowl2 Metal bowl1 Metal bowl with level gauge1 Element service indicator With barb fitting With drain guide With drain cock With drain guide With drain cock With drain guide Model B B B B B B W AFF20-D/AM20-D/AMD20-D 146.1 142.1 148.6 50.6 AFF30
2 4(A) (B) (A) (B) (A) 2 4 2 4 B (EB)3 5(EA) 1 (P) VF3000 VF5000 = 2(B) (A)4 5 1 3 1 5 3 (EA) (P) (EB) (P) (EA) (EB) (EA)5 1 3(EB) ; B (P) 2-position double Symbol @ = : 2-position single > > : @; VF1000 4(A) (B)2 (A) (B) (B) (A) 4 2 2 4 5(EA) 1 (EB)3 (P) VF3000 VF5000 2(B) (A)4 5 1 3 3 1 5 = (EA) (P) (EB) (EB) (P) (EA) (EA)5 1 3(EB) ; (P) 3-position closed center/exhaust center/pressure
(Refer to Rod boot/Air cushion on page 11.)
Slotted locking type B (tool required) Note) 2 Note 1) Electrical entry: D or DZ only 15A 1 2 15 14 3 20 16 Note 2) Semi-standard 20A 3 4 25 4 25A 1 Nil: Non-locking push type Valve size 5 to 7 32A 22 11 4 5 32 1 B 32F 22 32 28 40 6 28 40 1 4 Flange 11 2 40A Note) Semi-standard 1 2 1 B 40F Electrical entry/With light/surge voltage suppressor Flange E GS G Symbol Electrical entry Valve size
Characters Number of digits 1 2 3 4 5 6 7 8 9 seg 11 seg 7 seg 7 seg 7 seg 7 seg 11 seg 7 seg 7 seg 7 seg : 1st. and 6th. digits are displayed in 11 seg. Others are displayed in 7 seg. Character for 7 segment display Character changes as below by pressing the or button.
B Body B Needle Seat ring Needle guide Lock nut Lock nut U seal U seal Cassette Seal O-ring O-ring O-ring O-ring O-ring Gasket Spacer NBR PBT 13 POM, Stainless steel 2 PBT 14 NBR 3 PBT 15 NBR 4 SUS303 16 NBR 5 SUS303 17 NBR 6 SUS303 18 NBR 7 SUS303 19 NBR 8 SUS303 20 NBR, Stainless steel 9 M5 type only SUS303 21 10 POM Note1) SUS303 11 NBR Note 1) 3/16", 3/8" and 1/2" are SUS303. 12 Stainless
Do not let the gasket get caught. 11) Mount the end plate U and D with the appropriate length of tension bolts for the number of stations required. (Tightening torque: 0.75 Nm.) 12) Mount the connector for all stations to the junction box B. (Refer to Fig.3) (Engage the recess of the connector and the protrusion of the junction box B.
(Equivalent tightening torque: T) B Max. = C D 18.8 13.8 11.8 5.8 2.8 0.5 8.6 Width across flats 14 Tightening torque: Tighten within 10 1 Nm. 11 G1/4 (mm) Part no.
Setting Position (mm) D-C7 D-C8 D-C73C D-C80C D-G39 D-K39 D-A33, A34 D-A44 D-B5 D-B6 D-H7l D-H7C D-G5NTL D-H7lW D-H7lF D-H7BAL D-B59W Bore size (mm) A B A B A B A B A B A B A B 20 56.0 31.5 50.0 25.5 55.0 30.5 51.5 27.0 53.5 29.0 53.0 28.5 49.5 25.0 25 56.0 31.5 50.0 25.5 55.0 30.5 51.5 27.0 53.5 29.0 53.0 28.5 49.5 25.0 32 59.5 36.5 53.5 30.5 58.0 35.5 55.0 32.5 57.0 34.0 56.5 33.5 53.0
For pipe fitting 4B through 6B Applicable fittings For pipe fitting 3/4B through 3B Welding Welding Piping B Reducing tees B 1 1 x 1 x 1 24 or more 11/4 11/2 11/4 x 11/4 x 1 1B socket 11/2 x 11/2 x 1 cut in half 2 x 2 x 1 2 21/2 x 21/2 x 1 21/2 3 x 3 x 1 3 Pipe 4B through 6B Reducing tees B Socket Pipe : JIS B 2301 : JIS B 2302 : JIS B 3452 Without flash 16-12-8 Paddle Style Flow Switch Series
New valve (Blue) Manual override + B A Interface Pilot valve (V111) Adapter plate Existing valve (Orange) Manual override + B A Interface Pilot valve (SY114) Adapter plate 647
ACA201M ACA202M ACA203M CKZ-50A001 CKZ-50A002 CKZ-50A003 CKZ-50A007 CKZ-50A008 CKZ-50A009 0.6 (1.32) 0.7 (1.54) 0.9 (1.98) 0.7 (1.54) 0.8 (1.76) 1.0 (2.20) Straight-Machined 25 mm Offset-Machined A A B B 8F7+0.013 +0.028 through C C D D E E F G 8F7+0.013 +0.028 through F G 20 0.03 10 3 20 0.03 30 0.025 30 0.025 10 H 11 through 30 0.025 30 0.025 I 11 through M6 x 1.0 M6 x 1.0 H I 15 0.03 15
CKZ-50A007 CKZ-50A008 CKZ-50A009 NAAMS code ACA201M ACA202M ACA203M NAAMS code ACA211M ACA212M ACA213M Straight-Machined 25 mm Offset-Machined A A B B C C 8F7 through +0.028 +0.013 D 8F7 through +0.028 +0.013 D E E F G F 200.03 10 G 200.03 10 300.025 300.025 11 through 11 through H 300.025 300.025 250.05 I M61.0 H M61.0 150.03 150.03 I R45 6.5 500.05 6.5 18 30 3 10 10 3 18 R6 R6 R25 R25 19
A B C D E F Part no. B C d H MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M NTJ-015A NT-015A NT-02 NT-03 NT-04 8 9.2 6 15.5 5 9.2 M5 x 0.8 4 10 10 20.5 8 8 9.2 8 16.5 6 11.5 M6 x 1.0 5 16 16 22.5 10 8 9.2 10 18.5 6 15 M8 x 1.25 5 20 20 24.5 13 10 11.5 12 22.5 11 19.6 M10 x 1.25 6 25 25 33.5 17 14 16 16 28.5 12 25.4 M14 x 1.5 8 30, 40 30, 40 40.5 22 Applicable bore size (mm) Part no.
11.5 18.5 23 B 12.5 14.5 13.5 19 B 9 11 10 15.5 B 7 9 8 13.5 A 14 12 19 23.5 B 13 15 14 19.5 A 14.5 12.5 19.5 24 B 13.5 15.5 14.5 20 B 7.5 9.5 8.5 14 B 10.5 12.5 11.5 17 B 7 9 8 13.5 20 25 32 40 Note) When setting an auto switch, be sure to check its operation before adjusting.
Combination examples of modular applicable products Arrangement example AMH250C-B 1 pc. AME250C 1 pc. Y300 1 pc. Arrangement example AMH250C-B 1 pc. AME250C 1 pc. AMF250C-B 1 pc. Y300 2 pcs.
Series 10-, 11CQSX Series10-,11CQ2X How to Order How to Order Clean room series 10 11 Clean room series 10 11 Relieving type Vacuum type Relieving type Vacuum type C(D)QSX B 20 10 30 A90 C(D)Q2XB 40 10 30 A73 D D With auto switch With auto switch (built-in magnet) (built-in magnet) Microspeed cylinder Mounting Microspeed cylinder Bore size 32 40 32mm 40mm Number of auto switches
Auto switch a c b d Proper Mounting Position (mm) D-Z7/Z80 D-Y59/Y7P D-Y69/Y7PV D-Y7W D-Y7WV Auto switch model D-M9 D-M9V D-M9W D-M9WV D-A9 D-A9V Proper Mounting Position (mm) A B A 15 19.5 24.5 B A 14 18.5 23.5 B Bore size 63 80 100 a b 14 18 17 c 20 24 23 d Auto switch model 15 18 22.5 19 23.5 28.5 11 14 18.5 10 13 17.5 D-A9 D-M9 D-M9W 2 6 5 8 12 11 Note) Adjust the auto switch after confirming