Magnet: Built-in, Mounting: Basic Style, Bore Size: 16mm, Stroke: 15mm, Action: Single Acting Spring Extend, Head Cover Port: -, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Made-to-Order: -

Magnet: Built-in, Mounting: Basic Style, Bore Size: 16mm, Stroke: 30mm, Action: Single Acting Spring Return, Head Cover Port: Axial, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Made-to-Order: -

Magnet: Built-in, Mounting: Basic Style, Bore Size: 16mm, Stroke: 30mm, Action: Single Acting Spring Extend, Head Cover Port: -, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Made-to-Order: -

Magnet: Built-in, Mounting: Basic Style, Bore Size: 16mm, Stroke: 45mm, Action: Single Acting Spring Return, Head Cover Port: Axial, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Made-to-Order: -

Magnet: Built-in, Mounting: Basic Style, Bore Size: 16mm, Stroke: 45mm, Action: Single Acting Spring Extend, Head Cover Port: -, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Made-to-Order: -

Magnet: Built-in, Mounting: Basic Style, Bore Size: 16mm, Stroke: 60mm, Action: Single Acting Spring Return, Head Cover Port: Axial, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Made-to-Order: -

Magnet: Built-in, Mounting: Basic Style, Bore Size: 16mm, Stroke: 60mm, Action: Single Acting Spring Extend, Head Cover Port: -, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Made-to-Order: -

Magnet: Built-in, Mounting: Basic Style, Bore Size: 16mm, Stroke: 75mm, Action: Single Acting Spring Return, Head Cover Port: Axial, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Made-to-Order: -

Magnet: Built-in, Mounting: Basic Style, Bore Size: 16mm, Stroke: 75mm, Action: Single Acting Spring Extend, Head Cover Port: -, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Made-to-Order: -

Slider Type Ball Screw Drive/11-LEFS Series

11-LEFS40l-550l 906 955 556 728 10 4 600 11-LEFS40l-600l 956 1005 606 778 10 4 600 11-LEFS40l-650l 1006 1055 656 828 12 5 750 11-LEFS40l-700l 1056 1105 706 878 12 5 750 11-LEFS40l-750l 1106 1155 756 928 12 5 750 11-LEFS40l-800l 1156 1205 806 978 14 6 900 11-LEFS40l-850l 1206 1255 856 1028 14 6 900 11-LEFS40l-900l 1256 1305 906 1078 14 6 900 11-LEFS40l-950l 1306 1355 956 1128 16 7 1050 11

Support Guide/11-LEFG Series

307 478 11-LEFG40-S-350 554 357 528 8 3 450 11-LEFG40-S-400 604 407 578 11-LEFG40-S-450 654 457 628 11-LEFG40-S-500 704 507 678 10 4 600 11-LEFG40-S-550 754 557 728 11-LEFG40-S-600 804 607 778 Model L A B n D E 11-LEFG40-S-650 854 657 828 12 5 750 11-LEFG40-S-700 904 707 878 11-LEFG40-S-750 954 757 928 11-LEFG40-S-800 1004 807 978 14 6 900 11-LEFG40-S-850 1054 857 1028 11-LEFG40-S-900 1104

Swivels

Port 1 Port 2 B Port 2 PS2410202-20-20 4.67" 3.38" 2.63" 2.88" 1 1/4-11 1/2 1 1/4-11 1/2 118.6 mm 85.9 mm 66.7 mm 73.0 mm NPTF NPTF PS2410202-24-24 4.67" 3.38" 2.63" 2.88" 1 1/2-11 1/2 1 1/2-11 1/2 118.6 mm 85.9 mm 66.7 mm 73.0 mm NPTF NPTF Port 1 PS3210202-32-32 4.88" 3.58" 3.06" 3.35" 2-11 1/2 2-11 1/2 123.9 mm 90.8 mm 77.6 mm 85.1 mm NPTF NPTF Dia Wrench Flats Quick Coupling Division 8145

High Vacuum Angle Valve

70 170 69 70 95 87 11 3 100 88 196 96 83 110 114 11 3 117 90 235 131 102 130 134 11 3 154 108 300 112 153 180 190 11 3 200 138 315 Note 1) Dimension E applies when heater option is included.

CRQ2

Refer to page 11-8-9 for details.

Fluoropolymer Piping Equipment

LQ3T11-R1 4 3 4 3.5 10 9 10 9 10 9 4.8 9.5 11 11 11 28.5 27.5 28.5 27.5 28.5 27.5 14 14 14 2 LQ3T11-R5 4 3 LQ3T21-R1 4 6 4 17 16 10 9 17 16 6 12 16 11 16 34.5 33.5 30.5 29.5 34.5 33.5 20 14 20 2.5 LQ3T21-R2 3 6 2 LQ3T21-R5 6 4 17 16 10 9 16 11 34.5 33.5 30.5 29.5 20 14 2.5 LQ3T21-R6 6 3 2 LQ3T31-R1 6 8 10 25 25 6.4 LQ3T31-R2 6 10 17 16 16 38 37 20 4 LQ3T31-R5 10 8 22.5 19.5 21 21 47.5 44.5

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

(mm) Model CXS20-10 S SS ZZ Z 10 92 116 30 20 102 126 40 30 112 136 40 40 122 146 40 21-/2210-/11-/12CXS20-20 CXS20-30 CXS20-40 CXS20-50 21-/2210-/11-/1221-/2210-/11-/1221-/2210-/11-/1250 132 156 60 21-/2210-/11-/12100 182 206 80 CXS20-75 CXS20-100 21-/2210-/11-/1275 157 181 60 21-/2210-/11-/1285 Dual rod cylinder CXSL 1221CXS / 10-/1122Basic style / CXS25, CXSL25 10-/11221221S ZZ 12 12 SS

High Vacuum Angle Valve, XL Series

11 11 11 39 63 68 69 96 95 110 Note 1) Dimension E applies when heater option is included.

XL

11 11 11 39 63 68 69 96 95 110 Note 1) Dimension E applies when heater option is included.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

-11-1 for further information on auto switches.

MHZ

point L (mm) Gripping point L (mm) Internal Grip MHZJ2-10D/11-MHZ2-10D MHZAJ2, MHZJ2, 11-MHZ2 Pressure 0.7 MPa Pressure 0.7 MPa 25 0.6 MPa 0.6 MPa 20 Gripping force (N) 0.5 MPa 0.5 MPa 15 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 10 L 0.2 MPa 0.2 MPa 5 0 10 20 30 40 50 60 Gripping point L (mm) MHZJ2-16D/11-MHZ2-16D Pressure 0.7 MPa Pressure 0.7 MPa 60 0.6 MPa 0.6 MPa 50 Gripping force (N) 0.5 MPa