VP300/500/700

Y: 4.5 to 7 D: 6 to 8 78.3 2(A) 2(A) 63 19 (A port) Rc1/2 Stations L L1 L2 Formula L1 = 41 x n + 33 L2 = 41 x n + 17 9 402 386 10 443 427 2 115 99 3 156 140 4 197 181 5 238 222 6 279 263 7 320 304 8 361 345 : With light/surge voltage suppressor ( ): Dimensions for external pilot 4-8-15

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Model CYP15 CYP32 Series Throttle valve 10-AS2200-01-X214 Elbow type 10-AS1200-M5-X216 Metal body piping type 10-AS2000-01-X209 In-line type 10-AS1000-M5-X214 10-AS2201F-01-04-X214 10-AS1201F-M5-04-X214 Elbow type (throttle valve) 10-AS2201F-01-06-X214 10-AS1201F-M5-06-X214 10-AS2201F-01-06-X214 Operation 10-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Caution

MGP

P.336 P.1785 (/) (/) 19 18-2. 12 16 20 25 32 40 50 63 80 100 1 2 1 2 1 15 2 15 1 15 2 15 1 2 1 2 1 2 1 2 1 2 1 2 1 2 1 2 2 10 15 5 10 5 10 10 5 10 D-A9 D-A9V D-M9V D-M9 10 10 10 10 D-M9W D-M9WV D-M9AVL 15 10 D-M9AL 15 10 5 D-Z7 D-Z80 D-Y59 D-Y7P D-Y69 D-Y7PV D-Y7W D-Y7WV 15 10 10 15 10 5 5 5 10 15 15 10 15 D-Y7BAL 10 20 75 18-3.

MK

5 !6 !7 !8 !

CJP

Application Examples 1.2-8 Pin Cylinder/Single Acting Spring Return Series CJP Weight (g) Theoretical Force (N) Standard Strokes Bore size (mm) Stroke (mm) Operating pressure (MPa) Stroke (mm) Bore size (mm) Operating direction Model 6 5, 10, 15 5 10 15 0.3 0.5 0.7 CJPl6 10 10.6 13.1 15.6 5, 10, 15 OUT 4.56 10.2 15.9 6 CJPl10 15 28 33 38 IN 5, 10, 15 1.42 CJPl15 72 82 92 OUT 17.6 33.3 49.0

Dual Speed Controller with One-touch Fitting Series ASD 1

3 6 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 07, 08, 09, 10, 11 Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) Effective area (mm2) 300 06 1.0 2 4 200 50 100 0.5 1 2 100 0 0 0 0 5 10 0 5 10 0 5 10 Number of needle rotations Number of needle rotations Number of needle rotations ASD530F ASD630F 1500 1000 14 10,11 12 20 Flow rate (l/min (ANR)) Flow rate (l/min (ANR

Large Bore Compact Cylinder Series CQ2

(different sides, same side) 10 (0.4) 5 (0.2) 15 (0.6) 1 pc. 5 (0.2) 5 (0.2) 10 (0.4) Theoretical Output/Double Acting Type OUT IN Unit: N Operating Pressure MPa (psi) Bore size (mm) Operating direction 0.7 (101.5) 0.6 (87) 0.5 (72.5) 0.4 (58) 0.3 (43.5) 0.2 (29) IN 16933 14514 12095 9676 7257 4838 180 OUT 17812 15268 12724 10179 7634 5089 IN 21112 18096 15080 12064 9048 6032 200 OUT 21991

Clamp Cylinder with Lock Series CLK1

6 7 8 9 10 11 12 13 14 15 No.

HRX-OM-W069

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 CH1 abnormal low tank fluid level 1 CH1 low tank fluid level 2 CH2 Abnormal low tank fluid level 3 CH2 low tank fluid level 4 Reservation 5 Fan failure Alarm flag 1 6 Reservation 7 Reservation 8 CH1 abnormal rise of circulating fluid temperature 9

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

, 15, 20 25, 32 40, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 10, 16 20 25, 32 12, 16 20, 25 32, 40 6, 10 15, 20 25, 32 6, 10 16 20, 25 32, 45 6, 10 16 20, 25, 32 40, 50 10, 15 25 12, 16 20, 25 Bore sizes (mm) 5 to 50mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50mm/s Piston speed

MGQ

B 19.5 25 29.5 C 6.5 7 14.5 A 8 8 8 8 10 10 Model MGQ32 MGQ40 MGQ50 MGQ63 MGQ80 MGQ100 Detailed figure of a section Detailed figure of b section a a a b MGQ32 to 50 MGQ63 to 100 8-20-10 11 Compact Guide Cylinder Series MGQ Proper Auto Switch Mounting Position (Detection at stroke end) Minimum Stroke for Auto Switch D-Z7/Z80 D-Y5/Y6/Y7(V) D-Y7W(V) 1 pc. 2 pcs. 5 10 5 5 10 15 Auto switch D-Z7

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

Without adjuster type is not available for the 11-MXP6 series. 11-MXP How to Order MXPJ6 Clean series 11 Vacuum suction type 11 MXPJ6 10 22 MXPJ6 10 11-MXPJ6 Copper, fluorine and silicone-free + Low particle generation Stroke 5 10 5 mm 10 mm 22 Vacuum suction type With auto switch type is not available for the 11-MXPJ6 series.

MHL2

MHL2-10D MHL2-16D MHL2-16D MHL2-10D 2 1 2 1 60 60 25 25 0.6MPa 0.6MPa Holding force (N) Holding force (N) Holding force (N) Holding force (N) 50 50 20 20 0.5MPa 0.6MPa 0.5MPa 0.6MPa 40 40 15 15 0.4MPa 0.5MPa 0.4MPa 0.5MPa 0.4MPa 0.4MPa 30 30 10 10 0.3MPa 20 20 0.3MPa 0.3MPa 0.3MPa 0.2MPa 5 5 10 10 0.2MPa 0.2MPa 0.2MPa 10 20 30 40 50 60 70 20 40 60 80 100 120 20 40 60 80 100 120 0 0 0 10 20

PFxx-OMJ0005CN

OUT2) 11 12 13 14 15 16 10[L/min]100[L/min] 17 18 19 20 21 -43No.PF-OMJ0005CN-I [F99] <> [F99] [ini] ON 5 [F99] -44No.PF-OMJ0005CN-I / ()() 1"Hi" 1 1"Lo" 1 1() 10%F.S (1dight) 1 -45No.PF-OMJ0005CN-I LoC1 <--> 5[UnL] [LoC] 5 [LoC] [UnL] -46No.PF-OMJ0005CN-I < -> 5 [UnL] [LoC] 5 [LoC] [UnL] 1 [UnL] [FAL] 3 [LoC] /30 -47No.PF-OMJ0005CN-I [000]

3-Screen Display High-Precision Digital Pressure Switch Air 1.0 MPa/1.6 MPa ISE70 ISE71

Switch Pressure range 0.1 MPa 0 2 MPa 10 MPa 1 MPa 5 MPa ISE70 For 1 MPa (For air and general fluids) 0 0.105 MPa 1 MPa 1.05 MPa ISE70G 0 0.105 MPa 1.6 MPa For 1.6 MPa (For air) ISE71 1.68 MPa 0 0.105 MPa 2 MPa For 2 MPa (For general fluids) ISE75G 2.1 MPa 0 0.25 MPa 5 MPa For 5 MPa (For general fluids) ISE76G 5.25 MPa 0 0.50 MPa 10 MPa For 10 MPa (For general fluids) ISE77G 10.5 MPa Rated

IDX-OM-O004C

() S O 45 () 45 () O O CAUTION Check that air pressure is zero before servicing. 4 3 5. 5 5.1 3 ON OFF 60cm 1 10% () ( ) 60cm 1 10% 3 5 1 5. ( ) 60cm 1 2 IN OUT INOUT () 5 2 6. 6 6.1 IDF15E1-10 IDF15E1-20 550 MPa 0.151.0 () 240 (85%) 50Hz 2.8 (ANR) 1) 60Hz 3.1 m 3/min 50Hz 2.9 2) 60Hz 3.2 MPa 0.7 35 32 10 () AC100V(50Hz) AC100,110V(60Hz) 3) AC200V(50Hz

Speed Controller with Uni One-touch Fitting AS Series

Flow Rate and Sonic Conductance AS221F-U01 AS231F-U02 AS421F-U04 AS431F-U04 AS221F-U02 AS231F-U02 AS321F AS331F Model 3.2, 4 10, 12 6, 8, 4 Symbol Metric size 8, 10 4 12 6 8 10 6 Tubing O.D. 1 8" 3 16" 1 4" 1 4" 5 16" 5 32" , 5 16" , 3 8" , Inch size 5 32" 3 16" 1 4" 5 16" 3 8" 3 8" " 1 2 Flow Direction Symbols on Body Flow rate (L/min (ANR)) 180 230 460 260 390 660 790 920 1580 1710 Controlled

AR20-B to AR60-B

*10 *10 *10 *10 *10 *7 For pipe thread type: NPT.

RQ

Stroke 25 36.5 5 22.5 10 14 20 10 20 10 (All dimensions but A and CL are identical to those of the basic style.)

CG1

Note) ( ): Long stroke 1.6-8 Standard: Double Acting Single Rod Series CG1 With Mounting Bracket Axial foot (mm) Z ZZ Bore (mm) LT W X B LC LD LH LS LZ M LX Y Without rod boot With rod boot Without rod boot With rod boot 67+l 74+l 75+l 83.5+l 95.5+l 95.5+l 104+l 104+l 20 25 32 40 50 63 80 100 10 10 10 10 15 15 16 4 4 4 4 5 5 6 6 6 6 45 (53) 3 3 3 3 34 20 44 49 58 71 86 3 32 36 44 54 66 82