VCW

R C R C (44) G1/2 E A H 2-P Port size B (S) E G1/2 2-M Thread depth N D A H B 2-P Port size 2-M Thread depth N D L L K K N.O.

ZQ-OM01401

) (7)(8) 5 - No.ZQ-OM01401-B ZQ 05 1U A-K15LO B-VA M W-3 3-N (1) (2) (3) (4) (5) (6) (7)(8) (9) (1) (6) 05 0.5 07 0.7 W (2m) 10 1.0 (7) (V ) (8) (P ) (2) 1U 0 (M5x0.8) 3M 1 3.2 () 0 (M5x0.8) 2 4 () 2 4 () (3) 3 6 () 3 6 () 4 3.2 () 5 4 () B 5 4 () 1) (9) (4) ( [kPa] VA -100 to 100 NPN1 + VB PNP1 + N 1) ZFC (5) 2) M SI (kPa) 2) (99 10 ) ZZQ108A-B S C-A (1) (2

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

MTS12-100 st 100 st 75 st 75 st 0.1 50 st 25 st 50 st 25 st 0 50 100 5 10 Lateral load (N) Lateral load (N) 40 16 0.3 0.3 MTS40-200 st 175 st 150 st 0.2 0.2 125 st 100 st 75 st 75 st MTS16-100 st 50 st 0.1 0.1 50 st 25 st 25 st 0 50 100 150 10 Lateral load (N) Lateral load (N) 20 0.5 Caution on Design MTS20-200 st 175 st 150 st Caution 1.

Digital Gap Checker ( compatible)

Refer to "Pressure measurement value set range". equation 8200 0X2008 0 R measurement 8210 0X2012 0 R Intercept b F32 N value set range".

Digital Flow Switch ( compatible)

(page 75) 8010 0x1F4A 0 R Flow rate PD intercept b F32 N The conversion method from the communication value to the actual measurement value is the same as the method for process data. 8030 0x1F5E 0 R Flow bottom value S16 0 N 8020 0x1F54 0 R Flow peak value S16 0 N -200 to 4200 0 R Accumulated mantissa F32 N 0 to 9 Accumulated PD Accumulated value conversion factor = Current accumulated

ZQ-OM01301

ZQ-OM01301-A 1.How to Order Vacuum Ejector System (without energy saving function) Model of a single unit ZQ 05 1U A-K15L B-EA M G -3 3-N (1) (2) (3) (4)(5) (6) (7) (8)(9)(10)(11)(12) (7) Vacuum pressure switch unit specifications NilNote 3) With unit selection function (1) Nozzle nominal size M Fixed SI unit (kPa) 05 0.5 P Note 3) With unit selection function 07 0.7 (Initial value psi) 10

Multi-channel Digital Sensor Monitor ( compatible)

(page 80) 0x1F4A Process data 0x1F4B 0x1F4C 0x1F4D Conversion formula Intercept b 0 R N F32 (8010) (8011) (8012) (8013) 0 R H_Hi (Peak value) N U16 0x1F54 0x1F55 0x1F56 0x1F57 (8020) (8021) (8022) (8023) Refer to process data on page 76 to 80. 0x1F5E 0 R H_Lo (Bottom value) N U16 0x1F5F 0x1F60 0x1F61 (8030) (8031) (8032) (8033) 1: "R" means Read and "W" means Write. 1: When using IODD, only

Ionizer

Power supply 24 VDC B B B Ground with a ground resistance of 100 or less without connecting the DC1 () lead (Blue) of the power supply cable to the power supply 0 V. Red A A +24 V Black Blue Charged object Charged object 0 V Reduced-wiring Fieldbus System F.G. (mm) Ground with a ground resistance of 100 or less. A B When using the autobalance sensor (body-mounting type) 10 20 20 40 3.

VK3000

S070 VQD VQD-V Plug position B port N. C. A port N. O.

Compact Cylinder

Double clevis: CVQD CT Rod end male thread 4 x N Cap bolt Shaft d9 CD hole H10 L1 Rod end nut CU +0.4 +0.2 CX RR CW L B + Stroke CZ 0.1 0.3 CL + Stroke A + Stroke (mm) Bore size (mm) Stroke range (mm) 32 40 50 63 B CL CD CT CU CW CX CZ L L1 N RR A 70 Note 1) 33 Note 1) 60 10 5 14 20 18 36 7 28.5 M6 x 1 10 5 to 100 68.5 10 6 14 22 18 36 7 28.5 M6 x 1 10 78.5 39.5 5 to 100 90.5 Note 2) 40.5

Refrigerated Thermo-chiller

60% Ethylene Glycol Physical property value Temperature Density Specific heat C [kg/m 3] [g/l] ([kcal/kg C]) [J/(kgK)] 1.10 x 10 3 3.02 x 10 3 (0.72) 10C 1.08 x 10 3 3.15 x 10 3 (0.75) 20C 1.06 x 10 3 3.27 x 10 3 (0.78) 50C 1.04 x 10 3 3.40 x 10 3 (0.81) 80C Water Density : 1 x 10 3 [kg/m 3] [g/l] Specific heat C: 4.2 x 10 3 [J/(kgK)] (1.0 [kcal/kg C]) 79 Thermo-chiller Series HRZ Fluorinated

MTS

(N) 32 12 0.3 0.5 Deflection (mm) Deflection (mm) MTS32-200 st 175 st 150 st 125 st 100 st 75 st 50 st 25 st 0.2 MTS12-100 st 75 st 0.1 50 st 25 st 0 50 100 0 5 10 Lateral load (N) Lateral load (N) 40 16 0.3 0.3 MTS40-200 st 175 st 150 st 125 st 100 st 75 st 50 st 25 st Deflection (mm) Deflection (mm) 0.2 0.2 MTS16-100 st 75 st 50 st 25 st 0.1 0.1 0 50 100 150 0 10 Lateral load (N) Lateral

IIIIIII

A B c D E F G H J K M N 4.37 : 1 1 1 1 3 . 1 5 (80) 1 . 1 0 (2Al 1.22 (31)0.06 (1.5) ',.12 {3) 1.57 (40) 1.06 (271 1.42 (36) 1.26 (321 1.20 30.5' ).2t (6) Millimeters in Parentheses F O,F 7.05 lbs (3 2 kg) T T 90' '75 PSIG (5 Kgflcm2) A B c D E F G H J K ll N A B c D E F G H J K M N o 4.5() 114.31 3.30 83.8) 1.25 t31.8 1.20 (30.5) 0.89 '22.5) 0.06 (1.s) ). 12 (3) 1.57 (40) .42 (36) 1 2 6

Mechanical Valves Series NVM, NVFM, NVZNI

A B c D E F G H J K M N 4.37 : 1 1 1 1 3 . 1 5 (80) 1 . 1 0 (2Al 1.22 (31)0.06 (1.5) ',.12 {3) 1.57 (40) 1.06 (271 1.42 (36) 1.26 (321 1.20 30.5' ).2t (6) Millimeters in Parentheses F O,F 7.05 lbs (3 2 kg) T T 90' '75 PSIG (5 Kgflcm2) A B c D E F G H J K ll N A B c D E F G H J K M N o 4.5() 114.31 3.30 83.8) 1.25 t31.8 1.20 (30.5) 0.89 '22.5) 0.06 (1.s) ). 12 (3) 1.57 (40) .42 (36) 1 2 6

7

Hs Ht A B Hs A B Hs A B Hs Ht B D-P4DW D-M9 D-M9W D-M9A 12 D-A9 Hs D-B54 Note) The above drawing is the switch band mounting example for the D-P4DWS.

VCL

LVC DIN terminal: D Conduit terminal: T Cable 6 to 12 LVA F S Q 27.5 34 F (Q) LVH LVD LVQ LQ R C U 25 LVN C (44) R E R TI/ TIL G1/2 E PA G1/2 A H D (S) B B A H D 2-P Port size 2-P Port size PAX 2-M Thread depth N 2-M Thread depth N PB L L K K N.C.

CNG

CG-020-24A CG-025-24A CG-032-24A CG-040-24A CNG-020-24 CNG-025-24 CNG-032-24 CNG-040-24 +0.036 0 8 8 +0.4 +0.1 41 +0.4 +0.1 48 +0.5 +0.1 48 +0.5 +0.1 56 (29.3) (33.1) (40.4) (49.2) +0.036 0 +0.036 0 +0.043 0 +0.043 0 31 37 38.5 42.5 5.5 5.5 6.6 6.6 10 10 10 10 42 48 53 60 20 25 32 40 25 30 35 40 5.5 5.5 6.6 6.6 10 10 10 10 36 43 50 58 20 25 32 40 +0.036 0 10 10 +0.043 0 12 12 +0.043 0 14

3 Port Solenoid Valve Metal Seal Series VZ200 1

, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Stations n: Stations Formula L1 = 17n + 10 L2 = 17n + 27 2 44 61 3 61 78 4 78 95 5 95 112 6 112 129 7 129 146 8 146 163 9 163 180 10 180 197 VT Symbol L1 L2 VP Common exhaust: VV3Z2-50 (Built-in One-touch fittings manifold) VG (G) (L) (M) (D) With light/surge voltage suppressor VP (Lead

Clamp Cylinder Series CK1

N Speed controller valve Top width across flats 3 45 W 30 17 10 10 45 M16 x 1.5 14 3 45 Hs 30 IA IB 40 35 4 x M6 Thread depth 2 20 38 Width across flats 17 R15 F Shaft: 12 Hole: 12 0.050 d90.093 +0.027 H8 0 97 80 + Stroke 192 + Stroke Unit: mm Clevis width CKG1A: 16.5 CKG1B: 19.5 +0.3 0 +0.4 0 Symbol F IA IB N S W Hs Bore size 40 40 50 63 44 52 47 52 55 5 45.5 55 60 58 49 58 5.5 51 57 69

Compact Cylinder with Air Cushion Series RQ

B + Stroke 4-FD L FT FX FZ A + Stroke Rod end male threads Rear flange type Double clevis type Applicable L1 Double clevis type Rod end nut mm Bore size (mm) Stroke range (mm) Double clevis type/RQD, RDQD A B CL CD CT CU 4-N Cap bolt CT 20 to 100 32 37 64 10 5 14 74 20 to 100 40 44 73 10 6 14 83 CD hole H10 Shaft d9 30 to 100 50 49.5 85.5 14 7 20 99.5 mm Bore size (mm) CW CX CZ L L1 N RR