Vacuum Pad: Ball Joint Type

D 3 5 Y Hexagon width across flats 16 15 D 3 3 F Hexagon width across flats 12 Hexagon width across flats 12 Hexagon width across flats 10 Hexagon width across flats 2 F Hexagon width across flats 3 3 C C 2 2 A A B B Dimensions Dimensions (mm) (mm) A B C D F Y A B C D F Model Model ZPT10F-B5-A8 ZPT20F-B5-A10 10 12 10 12.5 37.5 20 22 1.5 12.5 15.5 48.5 ZPT13F-B5-A8 ZPT25F-B5-A10 13 15 25 28

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

holes for manifold) 7 21.8 (Mounting holes for manifold) (Lead wire length) 39.1 [45.6] About 300 Bracket 23.2 equivalent (Mounting holes) 23.2 equivalent (Mounting holes) 18.5 18.5 28 [34.5] 28 [34.5] 20 20 15.6 18.5 18.5 13.5 13.5 9 9 69 69 98.6 79.4 [82] [ ]for AC Other dimensions are the same as the grommet type. [ ] for AC Other dimensions are the same as the grommet type. 24 Valve

PFxx-OMJ0005CN

V80 mA 1 V NPN(1 )(15 V) PFM7--CNPN(1 )(420 mA) PFM7--DDC(+) OUT1 DC(-) Max.28 V80 mA 1 V C15 V 1 k D420 mA 600 50 NPN(1 ) PFM7--GDC(+) OUT1 DC(-) Max.28 V80 mA 1 V ()30 ms -18No.PF-OMJ0005CN-I PNP(2 ) PFM7--BDC(+) OUT1 OUT2 DC(-) Max.80 mA 1.5 V PNP(1 )(15 V) PFM7--EPNP(1 )(420 mA) PFM7--FDC(+) OUT1 DC(-) Max.80 mA 1.5 V E15 V 1 k F420 mA 600 50 PNP(1 ) PFM7--HDC(+) OUT1 DC

Series 10-MGF ø40, ø63, ø100 Guide Table

D-Z73 D-Y59B D-Y59A Load voltage 24 VDC,100 VAC 24 VDC (10 to 28 VDC) 28 VDC or less Load current range Indicator light Application Relay, PLC 24 VDC Relay, PLC IC circuit, Relay, PLC 5 to 40 mA, 5 to 20 mA 5 to 40 mA 40 mA or less PLC: Programmable Logic Controller Refer to page 889 for the applicable auto switch list.

Thermo-chiller Air-cooled 200 V Type Inverter Type HRSH Series (UL Standards)

Thermo-chiller Air-cooled 200 V Type Inverter Type (UL Standards) RoHS HRSH Series How to Order A 20 HRSH 250 Cooling capacity Option 100 10.5 kW 150 15.7 kW 200 20.5 kW 250 25 kW 300 28 kW Nil None A With caster adjuster-foot B With earth leakage breaker B1 With earth leakage breaker with handle K Note 1) With uid ll port S Note 2) Conforming to CE/UL standards Cooling method A Air-cooled

Series 10-MGF Guide table ø40, ø63, ø100

D-Z73 D-Y59B D-Y59A Load voltage 24 VDC,100 VAC 24 VDC (10 to 28 VDC) 28 VDC or less Load current range Indicator light Application Relay, PLC 24 VDC Relay, PLC IC circuit, Relay, PLC 5 to 40mA, 5 to 20mA 5 to 40mA 40mA or less Air cylinder Rotary actuator Air gripper Directional control valve Fittings & Tubing Pressure switch Clean gas filter Flow control equipment Filter, Pressure control

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

30 20 28 23 28 G 9 12 13 15 20 27 N 4 4 4 4 6 6 HA 20 30 20 28 46 56 KA 82.5 132.5 GA 17 12 33 43 43 83 NA 2 2 2 2 4 4 13-/22-MXS8L-10 13-/22-MXS8L-20 13-/22-MXS8L-30 13-/22-MXS8L-40 13-/22-MXS8L-50 13-/22-MXS8L-75 785 MXS 1322Air Slide Table Dimensions: MXS12 1322Basic 2 x M4 x 0.7 thread depth 5 Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches

MXW Series Long Stroke Slide Table

28 28 28 B 107 127 152 177 202 4 MXW12 W 34 14 14 14 14 V 121 141 166 191 216 A 56.5 31.5 31.5 31.5 31.5 31.5 B 138.5 163.5 188.5 213.5 238.5 263.5 5.5 MXW16 W 42.5 17.5 17.5 17.5 17.5 17.5 V 152.5 177.5 202.5 227.5 252.5 277.5 A 65.5 40.5 40.5 40.5 40.5 40.5 40.5 B 171.5 196.5 221.5 246.5 271.5 296.5 321.5 7 MXW20 W 51.5 26.5 26.5 26.5 26.5 26.5 26.5 V 185.5 210.5 235.5

CG1

3.2 35.8 42 16 28 47.6 Up to 125 8 C95 10 5.5 30 43 33 3.2 39.8 42 20 28 45.5 53 Up to 200 10 10 6.6 35 40 4.5 49.4 48 22 28 54 54.5 67.7 Up to 200 12 C92 10 6.6 40 49 4.5 58.4 56 30 30 65.5 78.7 63.5 Up to 200 14 Consists of pins, flat washer and hexagon socket head cap bolt.

Rubber seal 5 Port Solenoid Valve Series SYJ7000

x 1 36 18.5 Approx. 300 (Lead wire length) 42.6 [49.6] 2-3.2 (For mounting) 2-3.2 127.2 [131.6] 2-3.2 2-3.2 (For mounting) (For mounting) 107.6 [112] (For mounting) 125.4 145.4 147.2 110.6 97.6 65.6 35 35 35 35 21 21 25 21 25 21 Pg7 28 25 28 25 28 Applicable cable O.D. 3.5 to 7 28 Refer to the page 91 for dimentions with connector cable. 53 Series SYJ7000 3 Position Closed Center/Exhaust

CNG

CG-020-24A CG-025-24A CG-032-24A CG-040-24A CNG-020-24 CNG-025-24 CNG-032-24 CNG-040-24 28 28 28 30 42 42 48 56 20 25 32 40 38.3 42.1 53.8 64.6 28 28 28 30 16 20 22 30 42 42 48 56 35.8 39.8 49.4 58.4 18.1 20.7 23.6 27.3 3.2 3.2 4.5 4.5 13 15 17 21 26 28 28 36 50 57 61.4 71.4 47.8 54.8 57.4 65.4 21.2 21.3 25.6 26.3 3.2 3.2 4.5 4.5 13 15 17 21 20 25 32 40 Knuckle Pin Rod End Nut Clevis Pin

4/5 Port Air Operated Valve SYJA3000 Series

) 3 position 0.42 [0.33] 0.16 [0.080] 0.46 0.32 0.11 0.58 [0.32] 22 25 2 position SYJA320-M3 M3 x 0.5 M3 x 0.5 0.9 28 3 position 22 25 2 position SYJA330 M3 x 0.5 Note 1) Value when used on a manifold.

VCW

(mm) Electrical entry P Port size A B C D E F H K L M Model Grommet: G Conduit: C DIN connector: D Conduit terminal: T Q R Q R Q R S Q R S 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 22 45 44 43 58 40.5 46.5 99 43 66 1/8 VCW21 18 36 67 31 8.5 12.5 28 18 12.8 M4 22 46 44 44 58 41.5 46.5 99 44 66 1/4 22 40 80.5 36.5 11 15 32 20 19 M5 24 56.5 46 54.5 60 52 48.5 101 54.5 68 1/4, 3/8 VCW31 30 50 85.5

Pressure Sensor for General Fluids

PSE20 series PSE30 series PSE31 series PSE570PSE573PSE574PSE570--28 PSE573--28 PSE574--28 Pressure sensor No. PSE570PSE573-11No.PS-OMS0005-E Attaching the connector to the lead wire Sensor wire is stripped as shown in the right figure. Do not cut the insulation.

Air Cylinder

Auto switch capable Standard Stroke List (in) Bore Size Standard Stroke 1.5 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24 2, 2.5 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24 3.25, 4 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24, 28, 30 Example: NCDA1B150-0200R+0300H-XC11 will stroke 2 then an additional 3 for a total stroke of 5.

Cylinder with Turntable Series MGT

25.5 32.5 NPT 3/8 NPT 3/8 (mm) 25st 50, 75, 100st Larger than 100st 25st 50, 75, 100st Larger than 100st WA WB Bore size (mm) 63 80 100 X XA XB XC XL YY YL Z 52 52 72 50 54 47 38 42 35 128 128 148 28 28 48 24 28 11 88 92 85 8 10 10 6 7 7 5 6 6 80 100 124 4 5 5 20 24 28 M10 x 1.5 M12 x 1.75 M14 x 2.0 D-X (mm) MGTM (Slide bearing) MGTL (Ball bushing bearing) (mm) AA A E BD Bore size (mm) 63

IDX-OM-W094

745 605 161 405 681 94 71 46 12.5 330 704 355 126 IDFA70 R1-1/2 342 890 825 176 480 905 68 365 849 390 81 20 IDFA80 R2 438 957 863 169 480 958 219 78 100 11.0 463 916 485 170 IDFA90 13 IDFA80 IDFA90 mm IDFA60 745 957 () () 704 916 () () 355 330 485 463 IDFA70 890 () 849 () 390 365 IDFA60/70/80/90 Series 7-3 IDX-OM-W094 7.4 CM IDFA60/70 OLR AC 230V(50Hz) FM MC PRS PRS2 ILS THR C01

ZP

(26) 30 (25) (23) 28 (26) 30 (25) (16) 28 (26) 30 (25) (23) 30 (29) 32 (27) (25) 30 (28) 32 (26) (20) ZPT40 30 (29) 32 (27) (25) 32 (30) 34 (29) (27) P . 13-11-65 to 13-11-68 ZPT50 ( ): Figures for female thread connections Model Applicable pad form Connection/Thread dia.

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

6 E 5 2-M4 x 0.7 Piping port F QL 6 13.5 Prepared hole diameter 3.3 2-M3 x 0.5 (Plug: M-3P) 6 (fitting seat surface dimension) 170.05 M3 x 0.5 Vacuum suction port Stroke: S M 1 Mounting base side B D Piping port 2-M3 x 0.5 A 5 5.5 A 3.2 J 2.4 Z Section AA 3.5 Depth 2 2.5 +0.030 0 7 +0.030 0 Depth 2 2.5 Q QL 11-/22-MXPJ6-10 4M3 x 0.5 depth 3 F (mm) E F H J M Q QL S Z Model 23 25 38 27 37 28

CNG

CG-020-24A CG-025-24A CG-032-24A CG-040-24A CNG-020-24 CNG-025-24 CNG-032-24 CNG-040-24 38.3 42.1 53.8 64.6 28 28 28 30 16 20 22 30 42 42 48 56 35.8 39.8 49.4 58.4 18.1 20.7 23.6 27.3 3.2 3.2 4.5 4.5 13 15 17 21 20 25 32 40 50 57 61.4 71.4 28 28 28 30 26 28 28 36 42 42 48 56 47.8 54.8 57.4 65.4 21.2 21.3 25.6 26.3 3.2 3.2 4.5 4.5 13 15 17 21 20 25 32 40 Knuckle Pin Rod End Nut Clevis Pin