18G1/2 1 2:20 dm3/(s bar) (100mm2) 2 3:22 dm3/(s bar) (110mm2)G1/2 0.26G1/2 1 2 5.32 3 5.85.0 MPa0.5 to 5.0 MPa?5 to 80C?

18G1/2 1 2:20 dm3/(s bar) (100mm2) 2 3:22 dm3/(s bar) (110mm2)G1/2 0.26G1/2 1 2 5.32 3 5.85.0 MPa0.5 to 5.0 MPa?5 to 80C?

18G1/2 1 2:20 dm3/(s bar) (100mm2) 2 3:22 dm3/(s bar) (110mm2)G1/2 0.26G1/2 1 2 5.32 3 5.85.0 MPa0.5 to 5.0 MPa?5 to 80C?

PF2D5.eng

Lead wire Lead wire to supply power and transmit output signals. (3 m) 1: Refer to the PF2D3 or PF2D2 operation manual for details of the flow monitors. 2: Load indicates analogue input equipment such as a voltmeter.

HAA

8 B 3 8 B 1 2 Thermometer for outlet air temp.

Series

solenoid 2 position double solenoid 3 position closed center 3 position exhaust center 3 position pressure center -+ For AC voltage valves, there is no "S" option.

Switching from real-time flow rate to accumulated flow is possible.Digital flow switch for high temperature fluids , Integrated display type , Temperature range: 0 to 90C , Flow rate range: 0.5-4(l/min) ~ 5-40(l/min) , PNP/NPN open collector 2 outputs , Port sizes: 3/8, 1/2, 3/4, DIGITAL FLOW SW, INTEG SENSOR, INSTRUMENTATION, IFW/PFW FLOW SWITCH, GA, IFW/PFW 3/4INCH PT VERSION, 1.75767

Switching from real-time flow rate to accumulated flow is possible.Digital flow switch for high temperature fluids , Integrated display type , Temperature range: 0 to 90C , Flow rate range: 0.5-4(l/min) ~ 5-40(l/min) , PNP/NPN open collector 2 outputs , Port sizes: 3/8, 1/2, 3/4, DIGITAL FLOW SW, INTEG SENSOR, INSTRUMENTATION, IFW/PFW FLOW SWITCH, GA, IFW/PFW 3/4INCH PT VERSION, 1.76396

Switching from real-time flow rate to accumulated flow is possible.Digital flow switch for high temperature fluids , Integrated display type , Temperature range: 0 to 90C , Flow rate range: 0.5-4(l/min) ~ 5-40(l/min) , PNP/NPN open collector 2 outputs , Port sizes: 3/8, 1/2, 3/4, DIGITAL FLOW SW, INTEG SENSOR, INSTRUMENTATION, IFW/PFW FLOW SWITCH, GA, IFW/PFW 3/4INCH PT VERSION, 1.85818

Switching from real-time flow rate to accumulated flow is possible.Digital flow switch for high temperature fluids , Integrated display type , Temperature range: 0 to 90C , Flow rate range: 0.5-4(l/min) ~ 5-40(l/min) , PNP/NPN open collector 2 outputs , Port sizes: 3/8, 1/2, 3/4, DIGITAL FLOW SW, INTEG SENSOR, INSTRUMENTATION, IFW/PFW FLOW SWITCH, GX, IFW/PFW 3/4INCH ALL OTHERS, 1.25663

Switching from real-time flow rate to accumulated flow is possible.Digital flow switch for high temperature fluids , Integrated display type , Temperature range: 0 to 90C , Flow rate range: 0.5-4(l/min) ~ 5-40(l/min) , PNP/NPN open collector 2 outputs , Port sizes: 3/8, 1/2, 3/4, DIGITAL FLOW SW, INTEG SENSOR, INSTRUMENTATION, IFW/PFW FLOW SWITCH, GB, IFW/PFW 3/4INCH NPT VERSION, 1.88967

Switching from real-time flow rate to accumulated flow is possible.Digital flow switch for high temperature fluids , Integrated display type , Temperature range: 0 to 90C , Flow rate range: 0.5-4(l/min) ~ 5-40(l/min) , PNP/NPN open collector 2 outputs , Port sizes: 3/8, 1/2, 3/4, DIGITAL FLOW SW, INTEG SENSOR, INSTRUMENTATION, IFW/PFW FLOW SWITCH, GB, IFW/PFW 3/4INCH NPT VERSION, 1.45505

Switching from real-time flow rate to accumulated flow is possible.Digital flow switch for high temperature fluids , Integrated display type , Temperature range: 0 to 90C , Flow rate range: 0.5-4(l/min) ~ 5-40(l/min) , PNP/NPN open collector 2 outputs , Port sizes: 3/8, 1/2, 3/4, DIGITAL FLOW SW, INTEG SENSOR, INSTRUMENTATION, IFW/PFW FLOW SWITCH, GB, IFW/PFW 3/4INCH NPT VERSION, 1.61671

E/P Pressure Regulator

Station 3 Station 4 Station 5 Station 6 Station 7 Station 8 Station 2 3 1/4 (1000, 2000) 3/8 (2000, 3000) 1 3 5 0.1 MPa 0.5 MPa 0.9 MPa Thread Type Nil N F Rc(PT) NPT NPTF Protocol SEN SMB Ethernet I/P Modbus TCP Porting ETHERNET ITV ETHERNET ITV Supply: 1/2 Out: 1/4 or 3/8 (per order) PWR NS MS PWR NS MS E/P REGULATOR E/P REGULATOR Thread Type: Rc, NPT or NPTF (per order) Dimensions H Length

Auto Switch Installation Example

Confirmation of fingers in reset position 2. Confirmation of workpiece held 3. Confirmation of workpiece released 1. Confirmation of fingers in reset position 2. Confirmation of workpiece held 3.

Doc. no.MX*-OMG0114

Specifications 2. Operating air and piping 3. How to mount and adjust 4. Construction and parts list 5. Maintenance Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

Auto Switch Installation Example

Confirmation of fingers in reset position 2. Confirmation of workpiece held 3. Confirmation of workpiece released 1. Confirmation of fingers in reset position 2. Confirmation of workpiece held 3.

5 Port Solenoid Valve Series SQ1000/2000

Exhaust center: SQ A31 Pressure center: SQ B31 5 (R1) 3 (R2) 1 (P) For applications which demand high speed, high frequency, long life and a precise response time. 1 2 (A) 4 (B) 2 1 2 1 2 SQ B31 N.O. valve N.O. valve 5 (R1) 3 (R2) A side B side 1 (P) A (A) 4 (B) 2 1 2 B SQ C31 N.C. valve N.O. valve 5 (R1) 3 (R2) 1 (P) R P

Clean Room Regulator/Fluoro Resin Type Series SRF30

2 w !2 Parts list !3 No.

AS_FS Inline

10 10 12 12 01 1/8" 03 5/32" 07 1/4" 09 5/16" 11 3/8" 13 1/2" -X214 Restrictor (Without check valve) With One-touch ttings Example) AS2002FS-04-X214 With indicator 10Clean Series 1 For selecting applicable tubing O.D., refer to the Model shown above. 2 Use 1/8" tubing.