Manually Operated Integral Fitting Type/Threaded Type Series LVH

Port size Symbol 01 02 02 03 03 04 Body class Port size 1/8 1/4 1/4 3/8 3/8 1/2 Pilot port thread type 2 Symbol Nil N Thread type Rc NPT 3 4 Integral fitting type/Variations Model LVH20 LVH30 LVH40 Orifice diameter 4 8 10 Tubing O.D. Metric 3, 4, 6 6, 8, 10 10, 12 Valve type Inch 1/8, 3/16, 1/4 1/4, 3/8 3/8, 1/2 Symbol Type Basic type N.C.

IDX-OM-M051

4 Checks and inspection 4 1 Daily check . 4 1 4 2 Parts requiring regular maintenance . 4 1 4 2 1 Maintenance of the water-cooled condenser . 4 1 4 2 2 Maintenance of auto drain . 4 5 4 2 3 Maintenance of timer type solenoid valve with auto drain (Option V) . 4 8 4 2 4 Maintenance of operating time accumulator . 4 8 Chapter 5 Troubleshooting 5 1 Troubleshooting . 5 1 5 2 Reset of protective

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

Rc 1/8, NPT 1/8, NPT 1/4 URJ 1/4, TSJ 1/4 Port size ISG Variation Leakage 1 x 105Pam3/s 1 x 1010Pam3/s ZSM 1 to 5 V voltage output Analog output 4 to 20 mA current output For URJ1/4, TSJ1/4, refer to Glossary of Terms and Technical Information on pages 878 to 879.

Dual Rod Cylinder Series CXSJ/CXS

4 !3 y e !2 q r o !6 @0 !4 !8 @2 !5 r u !1 q !6 i t y e @2 @6 @5 @4 @8 @7 @5 @6 @3 @4 Close-up of A Close-up of A Component Parts: CXSM Component Parts: CXSL Note Material No. Description Note Material No.

JXCx-OMY0008

A B-1 Brown 2 A A-1 Red 1 Cable length (L) B B-2 Orange 6 B A-2 Yellow 5 1 1.5m COM-A/COM B-3 Green 3 3 3m COM-B/ A-3 Blue 4 (3) 5 5m Shield Cable color Terminal No. Vcc B-4 Brown 12 GND A-4 Black 13 A B-5 Red 7 Actuator cable type A A-5 Black 6 B B-6 Orange 9 Nil Robotic type cable B A-6 Black 8 (4) 3 S Standard cable Signal name Terminal No.

JXCx-OMT0061CN

G No (2) (1) LCD (2) (1) (3) (4) (4) (5) (3) (6) (5) () (6) (7) 3m (8) (7) (8) CN4 69 - 15.7 5 4 3 2 1 LEC-CMJCC-Link MJ S T T 5 4 3 2 1 5 4 3 2 1 1 DA CC-Link A 2 DB CC-Link B 3 DG CC-Link 4 SLD CC-Link T 5 FG 70 - 16

Pin Cylinders Series CJP2/CJP

Without hose nipple Nil H4 H6 4, 6, 10, 15 Cylinder standard stroke (mm) For 4/2.5 tubing For 6/4 tubing 5, 10, 15 Refer to caution on piping on page 38.

70pvpump

N03 T03 NPTF 1/4 Threads Rc 1/4 Threads G 1/4 Threads NPT 1/4 Threads P11 P11F Compact, lightweight (Without foot) P11N P11T PAP331 (Assembled in clean room) NPTF 1/4 Threads Rc 1/4 Threads G 1/4 Threads NPT 1/4 Threads P13 P13F 140 mm 120 mm P13N P13T NPTF 1/4 Threads 110 mm Option Reset button Weight: 2.1 kg Air operated type is also standardized.

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4 ( ) 4 (+) () 4-pin type Light/surge voltage suppressor (WZ/VZ) Light/surge voltage suppressor (WZ/VZ) (Ground) 3 ( ) 3 () (+) Varistor Coil NL 1 2 Varistor Coil 3 4 5 4 ( ) 4 (+) () 5-pin type Back page 4 Series SGH Specific Product Precautions 3 Be sure to read before handling.

reduces flow setting time

1/4 V V V V V V V AS3ll1FSl-l03 3/8 V V V V V V V AS-FP AS4ll1FSl-l04 1/2 V V VNote 4) V V 10 AS2ll1FSl-G01 1/8 V V V V VNote 4) AS-FM AS2ll1FSl-G02 1/4 VNote 4) V V V V AS-D AS3ll1FSl-G02 1/4 V V V V G Face seal AS3ll1FSl-G03 3/8 V V V V AS-T AS4ll1FSl-G04 1/2 V V VNote 4) Note 1) Without sealant type can be selected as a standard option.

Mist Separator

Note 3) "Z" in Part No. (4) indicates semi-standard specifications. The pressure unit: psi. The temperature unit: oF. Note 4) Refer to the section [4.

Auto Switch Guide

Pin arrangement 1 2 Solid state switch Standard part no. 3 4 4 3 3 For the applicable auto switch model, refer to the table below.

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

/Y7PV D-Y7WV 10 + 30 n = 2, 4, 6, 8 (n 2) 2 100 + 30 n = 4, 8, 12, 16 (n 4) (n 4) (n 4) 2 90 + 30 n = 4, 8, 12, 16 2 95 + 30 n = 4, 8, 12, 16 n 2 2 (Different sides, Same side), 1 115 130 20 120 125 n D-Y7BAL 20 + 45 n = 2, 4, 6, 8 (n 2) 2 (n 4) (n 4) (n 4) (n 4) 2 115 + 45 n = 4, 8, 12, 16 120 + 45 n = 4, 8, 12, 16 125 + 45 n = 4, 8, 12, 16 130 + 45 n = 4, 8, 12, 16 2 2 2 6-9-8

HRX-OM-Y120

A signal type for contact output signal 4 to 6 can be selected by the customer. Refer to Table 2.4-3 Signal type for contact output signals 4 to 6. (1) (2) (3) Setting of contact output signal 4 to 6 Selection of signal type Table 2.4-2 Setting of contact output signal 4 to 6 No.

A_HEC-OM-K001

3.2.8 Communication Function. 3-4 3.2.9 Remote ON/OFF function. 3-5 3.2.10 Output cutoff Alarm Function . 3-6 Chapter 4 Installation . 4-1 4.1 Installation, Transport and Transfer . 4-1 4.1.1 Transport and Transfer . 4-1 4.1.2 Environment . 4-1 4.1.3 Set-up in Clean Room . 4-2 4.1.4 Installation . 4-2 4.2 Piping . 4-3 4.2.1 Preparation of Facility Water . 4-4 4.2.2 Preparation of Recirculating

JXCx-OMU0026

JXC-OMU0026 4.

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

encoder installation . 24 1 - 4.

CXS

CXSJ6-10 10 15 19 42 52 CXSJ6-20 20 25 29 52 62 CXSJ6-30 30 35 39 62 72 CXSJ6-40 40 45 49 72 82 CXSJ6-50 50 55 59 82 92 5 Series CXSJ Dimensions: 10 Standard Piping 16 12 + ST 4-M3 x 0.5 with depth 4.5 3.5 8 7.5 2-M5 x 0.8 with depth 4 (Piping port) 28.5 8 ST 56 + ST 15 44.5 + ST 8 3.5 13 1 M5 x 0.8 x 4 (Hexagon socket head set screw) 4 16 8 + ST 4.5 4.5 M8 x 1.25 x 7.5 (Bolt holder) 1 40

MHF2

5.9 11 11 14 19 E M3 x 0.5 Finger opening port M3 x 0.5 0 -0.1 2-2.6 through (Mounting hole) 17 12 12 Finger closing port 2-4.5 0.8 0.8 E-E +0.1 0 Close: 0 Open: 81 Use the attached hexagon socket head screws for mounting holes. 4-M3 x 0.5 thread depth 4 14 Mounting thread 4-M2.5 x 0.45 thread depth 3 Attachment mounting thread Groove for auto switch mounting M2.5 x 0.45 4 1.3 12 26 4 15

AC Servo Motor Driver (CC-Link Type)

pulley (Pulley ratio 4/7) ratio) Parameter *1,*2 Para.