Series CA2 10-/11- 21-/22- Air cylinder ø40, ø50, ø63 Air cylinder 40, 50, 63 10-/1121-/22Series CA2 How to Order Clean series 10 11 Relief type Vacuum suction type Mounting style Basic style Axial foot style Rod side flange style Head side flange style B L F G Bore size (mm) Port thread type Rc NPT G Nil TN TF 10 C D A 2 B 40 150 Y59B 21 C D A 2 B 40 150 Y59B Nil Built-in magnet Number of auto switches No 2 pcs. 1 pc. "n" pcs.
Fittings & Tubing Air Cylinders Rotary Actuators How to Order Type Rubber bumper, 20 to 100 Air cushion, 40 to 63 N A Nil Built-in magnet Clean series 10 11 Relief type Vacuum suction type No D With auto switch (Built-in magnet) Bore size (mm) 10 C D G 1 B N 40 150 Z M9BW 21 C D G 1 B N 40 150 Z M9BW Mounting Cylinder stroke (mm) B Auto switch Number of auto switches Basic Axial foot Rod
10-/1121-/22Series CJ2 Air cylinder / 6, 10, 16 How to Order Cushion Clean Series 10 11 Relief type Vacuum suction type Rubber bumper (Standard) Air cushion (except 6) Nil A 10 D L 16 60 A R C J 2 H7B 21 D L 16 60 C J 2 H7B R Mounting style Head cover port location Basic style Axial foot style Rod side flange style Symbol Bore size (mm) B L F 6 10,16 Perpendicular to the cylinder axis Nil
Fittings & Tubing Air Cylinders Rotary Actuators How to Order Clean series 10 11 Relief type Vacuum suction type Nil Built-in magnet No D With auto switch (Built-in magnet) 10 C D M 2 L 40 150 A F Z M9BW 21 C D M 2 L 40 150 A Z M9BW Mounting Basic (Double-side bossed) Axial foot Rod flange Head flange Boss-cut, Basic Boss-cut, Rod flange B L F G BZ FZ Solid state Auto switch M9B, M9BW Reed
Series MHL2 112210, 16, 20, 25, 32, 40 Parallel Type Wide Opening Air Gripper How to Order 11 Vacuum suction type Clean series 11MHL 2 16 D 1 M9N 22MHL 2 16 D 1 M9N Wide opening Number of auto switches 2 pcs. 1 pc. n pcs.
Fittings & Tubing Air Cylinders Rotary Actuators How to Order 11 Vacuum suction type Clean series 11 M D HR 2 10 R M9B S 22 M D HR 2 10 R M9B S Number of fingers Copper, fluorine and silicone-free + Low particle generation Number of auto switches 2 2 fingers 2 pcs. 1 pc.
Series MHZ2 112210, 16, 20, 25 Air Gripper How to Order 11 Vacuum suction type Clean series 11 MHZ2 16 D M9N 22 MHZ2 16 D M9N Copper, fluorine and silicone-free + Low particle generation Bore size 10 16 10 mm 16 mm 22 Vacuum suction type 20 mm 20 25 mm 25 Action Number of auto switches Double acting D Nil 2 pcs. S 1 pc.
Option Manifold Plug-in unit 1 Option None Symbol Nil Stations 10 Clean series 2 B Note 2) D D0 D Note 5) K Note 3) N R Note 4) 200/220 VAC models (F/L kit only) With back pressure check valve DIN rail mounting With DIN rail bracket (Without DIN rail) With ejector unit Special wiring spec.
Accessory Dimensions 25.7 64 16 54 0.2 5 70 0.2 5 PWR (V) 40 BUS PWR 80 OUTPUT INPUT Cover view 2 x M4 Mounting hole OUTPUT INPUT COM D 60 COM C COM B COM A 1702
Option Manifold Plug-in unit 1 Option None Symbol Nil Stations 10 Clean series 2 B Note 2) D D0 D Note 5) K Note 3) N R Note 4) 200/220 VAC models (F/L kit only) With back pressure check valve DIN rail mounting With DIN rail bracket (Without DIN rail) With ejector unit Special wiring spec.
Panel mount adapter ZS-46-B Panel mount adapter + Front protection cover ZS-46-D Lead wire with connector ZS-46-3L 3-core, 2 m, Non-waterproof (Without waterproof cover) Front protection cover ZS-27-01 D Panel mount adapter + Front protection cover ZS-46-D R1/8 Piping adapter ZS-46-N1 NPT1/8 Piping adapter ZS-46-N2 9
9 pin) and Contact input/output (D-sub 25 pin) Dimensions Note 9) W15 in (380mm) x D26.2 in (665mm) x H33.9 in (860 mm) Weight Note 10) Approx. 220 lbs (100 kg) Approx. 198 lbs (90 kg) Safety standards UL, CE marking, SEMI (S2-0703, S8-1103, F47-0200), SEMATECH (S2-93, S8-95) Note 1) It should have no condensation.
How to Order 6N 1 1 D B 25 50 LEY X5 R o Made to Order: Dust-tight/ Water-jet-proof q w e r t y u i !0 !1 !2 !
D-A9V/M9V/M9WV/M9A(V) types cannot be mounted. Caution Since there are other applicable auto switches than listed, refer to page 406 for details. For details about auto switches with pre-wired connector, refer to pages 1784 and 1785. D-A9/M9/M9W auto switches are shipped together (not assembled). (Only switch mounting brackets are assembled at the time of shipment.)
Bore sizes 32 to 63 are available for the D-P3DWA. Since there are other applicable auto switches than listed, refer to page 515 for details. For details about auto switches with pre-wired connector, refer to pages 1192 and 1193.
MHC D M9B 6 2 6 2 A D MHC Short body (Auto switch not attachable) Made to Order Refer to page 623 for details.
+ , C8D , ) ( ) ( : C%=D C&=D , 9 ! &' = 2 + ! , E , ! !
Normally closed (NC = b contact) solid state auto switches (D-Y7G/Y7H types) are also available. Refer to page 961 for details. Auto switches are shipped together (not assembled).
Action D Double acting Mounting Cylinder stroke B L F G D Note) Through hole & Double end tapped (Standard) Foot type Rod side flange type Head side flange type Double clevis type Bore size (mm) Standard stroke (mm) 10 10, 20, 30, 40 16 10, 20, 30, 40, 50, 60 20 10, 20, 30, 40, 50, 60 Note) Available with the MQQL only. 25 10, 20, 30, 40, 50, 75, 100 Mounting brackets are included when shipped
Fittings & Tubing Air Cylinders Rotary Actuators How to Order 11 Vacuum suction type Clean series 11 M D H R 3 10 R M9B S 22 M D H R 3 10 R M9B S Copper, fluorine and silicone-free + Low particle generation Number of auto switches 2 pcs. 1 pc.