Metering Valve with Silencer Series ASN2

ASD330F CM2 VZ500 TU0604 1 m AN11001 25 Cylinder size 32 Values at 0.5 MPa and 20C. Cylinder extension speed: 100 mm/s Meter-out needle fully open 100 mm/s Return speed Solenoid valve (Reference) Recommended circuit for high return speed When low extension speed and high return speed are desired, the following circuit using 3-port is recommended.

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Clean Room Specification 11-LEFS Series LEFS16, 25, 32, 40

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Clean Room Specication Applicable to the LEC series 11-LEFS Series LEFS16, 25, 32, 40 Refer to page 38 for model selection and page 510 for particle generation characteristics. Refer to page 603-5 for the communication protocols EtherCAT, EtherNet/IP, PROFINET, and DeviceNet.

AP500

psig (0.0028 MPa) rise in delivery pressure per 20 psig (0.14 MPa) source pressure drop Option Other Parameters AP510 HF Cv Supply pressure effect Wetted Parts Material Flow Characteristics AP500 100 psig (0.69 MPa) Inlet pressure: 30 psig (0.21 MPa) Wetted Parts Body Surface finish Poppet Diaphragm Nozzle Seat S SH 316L SS secondary remelt Electropolish + Passivation 35 0.24 Hastelloy C-

Bag Filter FGF Series

FGC Bag filter Option Material FGF FGF Option Applicable model FGF3 FGF5 FGF1 None Companion flange Foundation bolt (3 pcs) Vessel material Applicable model FGF3 FGF5 FGF1 Seal material Stainless steel Carbon steel Stainless steel Carbon steel Symbol Symbol FGH Nil F L S C L R NBR FQ1 FKM In the case of multiple options, indicate symbols in alphabetical order.

Material: Super PFA High Purity Fluoropolymer Tubing TL/TIL Series

Fluoropolymer Fittings LQ series 0.5 0.19 0.09 0.04 2.0 400 290 0.7 0.26 0.12 0.05 2.8 220 160 1.0 0.43 0.20 0.08 4.6 95 60 1.0 0.62 0.28 0.12 6.7 60 30 1.0 0.73 0.34 0.14 7.9 35 20 20C 100C 200C 260C 1.0 0.62 0.28 0.12 6.7 25 20 1.0 0.92 0.42 0.17 9.9 10 6 1.0 0.59 0.27 0.11 6.4 20 12 0.6 0.24 0.11 0.05 2.6 220 160 0.7 0.27 0.12 0.05 2.9 130 110 0.9 0.33 0.15 0.06 3.6 100 65 1.0 0.43 0.20

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12

MXY MTS Theoretical Output (N) Operating pressure (MPa) Cylinder bore (mm) 6 8 12 Piston area (mm2) 0.2 6 10 23 0.55 15 28 62 Magnetic Holding Force (N) 0.5 14 25 57 0.4 11 20 45 0.3 8 15 34 28 50 113 Made to Order Specifications (Refer to pages 1955 to 2021 for details.)

AC Servo Motor Electric Actuator/Slider Type Ball Screw Drive LEFS Series LEFS25, 32, 40

1 V7 LEFS 32 200 R H B B 3 M2 S r Motor type e Motor mounting position w Size q Accuracy Nil Basic type H High precision type 25 32 40 Nil In-line R Right side parallel L Left side parallel Symbol Type Output [W] Size Compatible driver V6 AC servo motor (Absolute encoder) 100 25 LECYM2-V5/LECYU2-V5 V7 200 32 LECYM2-V7/LECYU2-V7 V8 400 40 LECYM2-V8/LECYU2-V8 u Motor option t Lead [mm] i Cable

Step Motor (Servo/24 VDC) Electric Actuator Miniature Rod Type LEPY Series LEPY6, 10

0 e Lead screw type [mm] r Stroke [mm] w Motor size q Size 6 10 Symbol Motor size Applicable size Nil Basic 6, 10 L Compact 10 Symbol Screw lead LEPY6 LEPY10 K 4 5 J 8 10 Symbol Stroke 25 25 50 50 75 75 y Actuator cable type1 t Motor cable mounting direction Nil Without cable S Standard cable R Robotic cable (Flexible cable)2 Top entry Entry on the left side Nil L 1 The standard cable should

® Electric Slide Table/Compact Type LES8, 16, 25 Series LES Step Motor (Servo/24 VDC) Servo Motor (24 VDC)

Electric Slide Table/Compact Type Step Motor (Servo/24 VDC) Servo Motor (24 VDC) LES8, 16, 25 Series LES RoHS How to Order S 1 1 R J 6N LES 8 30 q w e r t y u i o !0 !1 !2 !

MRHQ

Nil S Gripper Applicable Auto Switch Parallel type: 2 fingers Q Lead wire length (m) 0.5 (Nil) Indicator light Auto switch symbol Load voltage Wiring (output) Applicable load Auto switch model Type Electrical entry Electrical entry 5 (Z) 3 (L) DC Gripper bore In-line 10 16 20 25 10 mm 16 mm 20 mm 25 mm Solid state switches D-M9N-746 M9N M9P M9B 3-wire (NPN) 5V 12V IC circuit Relay PLC D-M9P

, Ambient and fluid temperature: -10 to 50 C, VALVE, SOL, CLEAN RM *LQA, VALVE, VQ1000/VQ20/VQ30 VALVE, 25, VQ1000 NO SIZE RATING, .17600 lb

, Ambient and fluid temperature: -10 to 50 C, VALVE, SOL, CLEAN RM *LQA, VALVE, VQ1000/VQ20/VQ30 VALVE, 25, VQ1000 NO SIZE RATING, .17636 lb

Fluid: air/inert gas, Operating pressure range: 0.1MPa - 0.7MPa (high pressure style 0.8MPa), Effective area mm 2 (Cv): metal seal 3.6 (0.2); rubber seal 5.4 (0.3), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, H 1.5W: 2 position metal seal 12 or less; 2 position rubber seal 15 or less 3 position metal seal 20 or less; 3 position rubber seal 25 or less

Size: 25, Motor Mounting Position: Top Side Parallel, Motor Type: H (Battery-less Absolute, Step Motor 24 VDC), Lead, mm: C (Size 16: 2.5; Size 25: 3; Size 32: 4), Stroke: 250mm, Motor Option: B (with Lock), Rod End Thread: M (Rod End Male Thread, 1 Rod End Nut Included), Mounting: Ends Tapped, Body Bottom Tapped, Controller Position: B (Integrated Controller), Parallel Input: 6 (PNP)

Size: 25, Bearing Type: L (Ball Bushing Bearing), Motor Mounting Position: Top Mounting, Lead: B (Size 16: 5mm, Size 25: 6mm, Size 32/40: 8mm), Stroke: 100mm, Motor Option: C (w/Motor Cover)

Size: 25, Bearing Type: M (Sliding Bearing), Motor Mounting: D (In-line Type), Motor Type: Step Motor (Servo/24VDC), Lead: C (Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm), Stroke: 150mm, Motor Option: w/o Option, Guide Option: F (with Grease Holding Function), Actuator Cable Type: S (Standard Cable), Actuator Cable Length: 1 (1.5m), Controller Type for (LEC, JXC): C91 (JXC91, EtherNet/IPâ

Accuracy: Basic Type, Size: 25, Motor Mounting Position: L (Left Side Parallel), Motor Type: NZ (Mounting Type Z), Lead Screw: C [LEY25, 3mm; LEY32, 4mm, (5); LEY63, 5mm], Stroke: 30mm, Dust/Drip Proof: Size 25, 32: w/o Enclosure; Size 63: IP5x, Dust Proof Specification, Rod End Thread: M (Rod End Male Thread, 1 Rod End Nut Included), Mounting: G (Head Flange)

Parallel I/O Type: 6 (PNP), Mounting: 8 (DIN Rail), Cable Connector: 1 (1.5), Actuator: LEY, Type: Rod Type, Body Size: 25, Bearing Type: None, Motor Mounting: Top Mounting Type, Lead: C (16: 2.5mm; 25: 3mm; 32, 40: 4mm), Stroke: 30mm

Rated Flow Range: 25 (0.3 to 25 L/min), Flow Adjustment Valve: W (With Flow Adjustment Valve, Rear Ported), Port Size: N7 (1/4), Output Specification: C (Out 1: NPN; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: V (Panel Mount Adapter, w/Flow Adjustment Valve)

Rated Flow Range: 25 (0.3 to 25 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: C6 (ø6), Output Specification: C (Out 1: NPN; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: M (SI Unit Only), Bracket/Panel Mount Adapter: V (Panel Mount Adapter, w/Flow Adjustment Valve), Calibration