This is a legacy product. Please contact us for the latest version.sales@ocaire.com, CYL, COMPACT W/LOCK, AUTO-SW, ACTUATOR, CLQ COMPACT LOCK CYLINDER, SE, 100MM CLQ DBL ACTING, AUTO-SW, .00000 lb
This is a legacy product. Please contact us for the latest version.sales@ocaire.com, CYL, COMPACT W/LOCK, AUTO-SW, ACTUATOR, CLQ COMPACT LOCK CYLINDER, SE, 100MM CLQ DBL ACTING, AUTO-SW, 15.23394 lb
This is a legacy product. Please contact us for the latest version.sales@ocaire.com, CYL, COMPACT W/LOCK, AUTO-SW, ACTUATOR, CLQ COMPACT LOCK CYLINDER, LE, 32MM CLQ DBL ACTING, AUTO-SW, 2.19888 lb
Plate cylinder with lock series MLU is ideal for maintaining supply pressure to prevent dropping of the load when residual pressure is released. Drop prevention is possible at any point of stroke. Lock positions can be changed to accommodate the position of the external stopper and the thickness of the clamped work piece. Release-plate cylinder with lock, Bore sizes: 25, 32, 40, 50, Slim
Plate cylinder with lock series MLU is ideal for maintaining supply pressure to prevent dropping of the load when residual pressure is released. Drop prevention is possible at any point of stroke. Lock positions can be changed to accommodate the position of the external stopper and the thickness of the clamped work piece. Release-plate cylinder with lock, Bore sizes: 25, 32, 40, 50, Slim
Slit Valve 1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.
XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric
(Example: CNA2-100D-UAL) 158
XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric
CHQWB40 5D (M) 15D (M) 10D (M) 20D (M) 15D (M) 25D (M) 20D (M) 30D (M) 25D (M) 35D (M) 30D (M) 13.5 10 40D (M) 35D (M) 45D (M) 40D (M) 50D (M) 45D (M) 75D (M) 50D (M) 100D (M) 75D (M) 100D (M) CH QWB50 10D (M) 15D (M) 20D (M) 25D (M) 30D (M) 35D (M) 12 40D (M) 45D (M) 50D (M) 75D (M) 100D (M) 38 Series CHQWB Construction CHQWB20 Rod end male thread CHQWB32 to CHQWB100 Rod end male thread
(Example) CHDQB50-100D Applicable Auto Switches/Refer to pages 431 to 490 for further details on each auto switch.
XLA XL XLQ XLQ y Body surface treatment/Seal material and its changed part Bodysurfacetreatment Part numbers indicating changed seal material and leakage XM XY Surface treatment External: Hard anodized Internal: Raw material External: Hard anodized Internal: Oxalic acid anodized Symbol Nil A Note 2) Leakage Pam3/s or less Note 1) Changed part None w, e w e Symbol External 1.3 x 10-10 (FKM
MHSH(J)3-32DA,B M30.5 0.6 6 40DA,B M50.8 2.8 10 50DA,B M61 4.8 12 63DA,B M81.25 12 16 80DA,B M101.5 24 20 A J/ / 8 MHS2 Nm mm MHS2-16D M40.7 2.1 8 20D M40.7 2.1 8 25D M40.7 2.1 8 32D M50.8 4.3 10 40D M61 7.3 12 50D M61 7.3 12 63D M61 7.3 12 MHS3 Nm mm MHS3-16D M30.5 0.66 4.5 20D M30.5 0.88 6 25D M40.7 1.6 6 32D M40.7 1.6 6 40D M50.8 3.2 7.5 50D M50.8 4.3 10 63D M61 5.4 9 80D M61 7.3 12 100D
(M) M10 x 100l x 105l x 110l x 115l x 120l x 125l x 130l x 135l x 140l x 165l x 190l CHQB80 10D (M) 10D (M) 15D (M) 15D (M) 20D (M) 20D (M) 25D (M) 25D (M) 30D (M) 30D (M) 7 35D (M) 35D (M) 14.5 40D (M) 40D (M) 45D (M) 45D (M) 50D (M) 50D (M) 75D (M) 75D (M) x 165l 100D (M) 100D (M) M5 x 75l x 80l x 85l CHQB100 10D (M) M10 x 105l x 110l x 115l x 120l x 125l x 130l x 135l x 140l x 145l x
flange surface Right flange surface Left flange surface Right flange surface Flange side Flange side Left flange surface Rear flange surface Right flange surface Left flange surface Rear flange surface Right flange surface Nil Left flange surface A F J K M With indicator With indicator Without indicator Without indicator Flange side Flange side t Auto switch type r Temperature specifications XLA
0) XLA Pilot port S (for initial exhaust valve) Magnet (Option) XL Pilot port M (for main exhaust valve) Bellows holder (Material: Stainless steel 304) !
-100D -100D M10 x 125l x 130l x 135l x 140l x 145l x 150l x 155l x 160l x 165l x 190l x 215l -10D CDLQB40-10D CDLQB63-10D CDLQB100-10D -15D -15D -15D -15D -20D -20D -20D -20D -25D -25D -25D -25D 8.5 -30D -30D -30D -30D -35D -35D -35D -35D 16.5 15.5 8.5 -40D -40D -40D -40D -45D -45D -45D -45D -50D -50D -50D -50D -75D -75D -75D -100D -100D -100D 4 Series CLQ Construction/20 to 32 A B A' B
Stainless Steel High Vacuum Angle/In-line Valve XM, XY Series Angle type/ XM Series XY Series In-line type XY Series XM Series XLA XL XLQ Body material: SCS13 (conforms to Stainless steel 304) A precision casting, unified composition prevents accumulation of gas. The XM series is interchangeable with the XL series, aluminum high vacuum angle valve.
4 6 P NC 21 25 TB 16 20 UA M8 x 1.25 UB 16 20 8H9 10H9 VA Model MHSL3-100D MHSL3-125D Rc 1/4 (G 1/4, NPT 1/4) Rc 3/8 (G 3/8, NPT 3/8) +0.036 0 +0.036 0 0 -0.043 0 -0.052 +0.036 0 +0.036 0 8H9 18h9 10H9 22h9 M10 x 1.5 M10 x 1.5 XA XB 6 8 VB 6 8 WA WB 4 6 Model MHSL3-100D MHSL3-125D +0.036 0 +0.036 0 +0.087 0 +0.100 0 8H9 102H9 10H9 130H9 594 Series MHSL3 Parallel Style Air Gripper/3-Finger