Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

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1/4 G 3/8 G 3/S A.

CJ5-S

RS Q G RS H A Relation of Liquid Entry and Sliding Distance Amount of liquid entry (g) x 15 RZQ 10 Standard cylinder MI W S Stainless steel cylinder 5 CEP1 0 50 100 150 200 Sliding distance (km) 250 300 CE1 Conditions Working fluid Air Pressure 0.5 MPa Liquid Water-soluble coolant Piston speed 200 mm/sec (60 cpm) CE2 ML2B Special scraper C J G5-S Exterior configuration reduces residual

VK3000

Note Bracket VK300-43-2A With screw Body ported VK3120 1 G M5 VK3140 1 G 01 Base mounted Thread type Nil F N T Rc G Valve option Port size NPT Nil Standard For low wattage (2 W DC) 01 Rc (With sub-plate) Nil Without sub-plate 1 8 NPTF Y Option Light/Surge voltage suppressor Nil None S With surge voltage suppressor Z With light/surge voltage suppressor (Type D only) Since the indicator

VK3000

Note Bracket VK300-43-2A With screw Body ported VK3120 1 G M5 VK3140 1 G 01 Base mounted CE-compliant Valve option CE-compliant Nil Nil Standard For low wattage (2 W DC) Q Y Note) Applicable only for DIN terminal type Applicable voltage: 12 and 24 VDC Thread type Nil F N T Rc Light/Surge voltage suppressor Nil None With surge voltage suppressor With light/surge voltage suppressor (Type

3

A G i 2 x P Port size G A 2 x P Port size b B Conduit DIN terminal D F Q S Cable 6 to 12 G1/2 F Q 280 D G1/2 45 (42) (44) 31.5 Built-in full-wave rectifier type R C C R E J J E 2 x M depth 5 H 2 x M depth 5 B B1 H G A G A B B1 2 x P Port size 2 x P Port size Bracket mounting hole a1 (VXS23, 25) a a1 (VXS24, 26) 6.5 10.5 Dimensions (mm) Model Port size P A B B1 C D E F G H J M Bracket mounting

CJ5-S

RS Q G RS H A Relation of Liquid Entry and Sliding Distance Amount of liquid entry (g) x 15 RZQ 10 Standard cylinder MI W S Stainless steel cylinder 5 CEP1 0 50 100 150 200 Sliding distance (km) 250 300 CE1 Conditions Working fluid Air Pressure 0.5 MPa Liquid Water-soluble coolant Piston speed 200 mm/sec (60 cpm) CE2 ML2B Special scraper C J G5-S Exterior configuration reduces residual

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

x (L + B) x 103 Yaw moment M3 = m x g x (L + A) x 103 Roll moment M2 = m x g x (L + B) x 103 (mm) Model CYP15 CYP32 A 16.5 27.0 B 25.5 48.0 L B L B L A M1, 2, 3 : Moment [Nm] m : Load mass [kg] L : Distance to load center of gravity [mm] A, B : Distance to guide shaft [mm] g : Gravitational acceleration [9.8 m/s2] M2 M1 M3 m x g m x g Guide shaft mounting surface Guide central axis m x

O

Press key f or 3 seconds or m ore. i s di spl ayed f or approx. 2 seconds and ( current ) pressure i s di spl ayed af t erw ards Lock keys ( ref er t o P11) 9 Rel at i on bet w een set t i ng of gai n and response t i m e Response t i m e Q ui ck Sl ow Set t i ng of gai n G L. 9 G L. 8 G L. 7 G L. 6 G L. 5 G L. 4 G L. 3 G L. 2 G L. 1 G L. 0 Rel at i on bet w een set t i ng and sensi t

O

Press key f or 3 seconds or m ore. i s di spl ayed f or approx. 2 seconds and ( current ) pressure i s di spl ayed af t erw ards Lock keys ( ref er t o P11) 9 Rel at i on bet w een set t i ng of gai n and response t i m e Response t i m e Q ui ck Sl ow Set t i ng of gai n G L. 9 G L. 8 G L. 7 G L. 6 G L. 5 G L. 4 G L. 3 G L. 2 G L. 1 G L. 0 Rel at i on bet w een set t i ng and sensi t

Floating Joint

M M U U D Width across flats F 60 B E H G P A R Dimensions (mm) DMaximum operating tensile and compressive force (N) Center of sphere R Maximum screw-in depth P Allowable eccentricity U Applicable bore size Model M A B D E F G H Weight (kg) Nominal size Pitch -X 180 JA180-40-150-X530 40 1.5 191 61 96 16 36 28 70 118 49 3 71000 5.3 Technical Data 200 JA200-45-150-X530 45 1.5 191 61 96 16

Floating Joint

Series 20 50 g 22 g 32 70 g 38 g 40 160 g 98 g Weight Screw size is the same as the screw size for standard JA series.

Series KV2 Fittings

(g) Bag/Box Quantity Hex M D2 L1 L2 L3 A* 1/4 3/8** 1/2** 1/4** 3/8** 1/2** 3/8-18 3/8-18 3/8-18 3/8-18 3/8-18 3/8-18 3/8-18 3/8-18 3/8-18 Male Hex. Male Hex. Male Hex.

MHZ

Note 3) The overall length is the same as the MHQ(G) flat finger type.

MHZ

Note 3) The overall length is the same as the MHQ(G) flat finger type.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

Inch-size One-touch fittings and NPT/NPTF/G threads are available.

MXW Series Long Stroke Slide Table

2.5 (mm) J 12 Scale: 30% 6.5 5H9 +0.03 depth 4.5 0 Width across flats 8 6-M4 x 0.7 thread depth 6 (Helisert) 6 27 58 46 Y 29 26 103 26 Y L 5H9 +0.03depth 4.5 0 10 15 15 K A 35 20 26.5 A Z Bottom through hole 4.2 N-M5 x 0.8 thread depth 10 (N-1) x H G M5 x 0.8 thread depth 10 GG H 6 depth 4.5 5H9 +0.03 Bottom through hole 4.2 0 F E 5H9 +0.03depth 4.5 0 G F E Model J H GG Z N L K 82.5 123

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

NUZ322GOHOO-lt5 DIN connctor (D)/ NIf4|220-ODOO5 ftft E g !

ITV-E

Press key f or 3 seconds or m ore. i s di spl ayed f or approx. 2 seconds and ( current ) pressure i s di spl ayed af t erw ards Lock keys ( ref er t o P11) 9 Rel at i on bet w een set t i ng of gai n and response t i m e Response t i m e Q ui ck Sl ow Set t i ng of gai n G L. 9 G L. 8 G L. 7 G L. 6 G L. 5 G L. 4 G L. 3 G L. 2 G L. 1 G L. 0 Rel at i on bet w een set t i ng and sensi t

Soft Start-up Valve AV2000/3000/4000/5000 1

bore 1/8 R 4-R 4-R 36.8 E 36.8 E R P VEX P D D AMR + + MADE IN JAPAN ITV MADE IN JAPAN SMC SMC IC VBA Model Port size A B C D E G H I VE K L M N P Q R AV2000-02-G AV2000-02-GS AV2000-02-D AV2000-02-DZ AV2000-02-Y AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000