PF2D Series Digital Flow Switch For Deionized Water and Chemical Liquids

For Deionized Water and Chemical Liquids Digital Flow Switch PF2D Series RoHS How to Order Remote Type Sensor Unit PF2D5 13 20 1 C Flow rate range Option (Refer to page 391.) 04 20 40 None e-con connector x 1 pc. Nil C 0.4 to 4 L/min 1.8 to 20 L/min 4 to 40 L/min The cable and connector are shipped unassembled.

Heatless Air Dryer ID Series

Indicator set Note) Adsorbent and adsorption tube filter for one air dryer (two adsorption tubes), set of O-rings How to Order ID400 ID 20 02 0 Semi-standard (option) ID200 Basic size Description Bracket Symbol Nil B Z 20 30 40 60 Adsorbent for low dew point Symbol Port size Symbol Size Applicable standard size Power supply voltage 20 30 40 60 Thread type Symbol Description 1 4 1 2 3 4 02 04

Air Operated Type Integral Fitting Type (Hyper Fittings) Series LVC How to Order Valves (Single Type) LVC LVA LVC 2 0 06 S LVH Option Body class Nil None LVD 1 With flow rate adjustment Body class Orifice dia. Symbol 2 With bypass ø4 2 2 Valve type LQ2

Symbol Symbol Nil 2 3 4 6 5 Application Ports A & B same size N PPS PFA Ammonium hydroxide compatible Metric sizes 03 04 06 08 10 12 19 25 3 4 6 8 10 12 19 25 Pilot port thread type Refer to the applicable tubing table to the left. Different diameter tubings can be selected within the same body class.

Integral Fitting Type (Hyper Fittings) Series LVD How to Order LVC LVA LVD 1 0 03 S LVH Body class Option LVD Orifice dia. Body class Nil None Symbol 1 Valve type 1 1 ø2 With flow rate adjustment LVQ 2 2 2 ø4 With bypass 0 N.C. 3 3 With flow rate adjus

LVN Material Body Diaphragm Note Actuator section End plate Symbol TL/TIL Applicable tubing size PFA PPS PTFE Nil Body class LQ3 Connecting tubing outside diameter Symbol Ammonium hydroxide compatible 2 1 3 4 5 PFA PPS PTFE N Metric sizes 03 04 06 08 10 12 19 3 4 6 8 10 12 19 Pilot port thread type Symbol Body class 1 2, 3, 4, 5 1, 2, 3, 4, 5 Thread type 4 One-touch fitting 6 One-touch fitting

Series KJ One-touch Mini

How to Order KJ H M3 02 Model Male connector Straight union Different diameter straight Port size H M3 M5 00 23 04 M3 M5 Same diameter tubing 3.2 4 S L W Hexagon socket head male connector Male elbow Extended male elbow Male branch tee Union tee Male run tee Union "Y" Different diameter union "Y" Plug-in reducer Bulkhead union Note 1) Note 1) Note 1) Different diameter tubing O.D.

S Couplers Series KK130

/O.D. mm Symbol 01 02 03 04 N01 N02 N03 N04 Symbol 07 09 11 13 Applicable tube O.D. mm 6 8 10 12 1/4" 5/16" 3/8" 1/2" Symbol 50 60 65 80 85 110 5/8 6/9 6.5/10 8/12 8.5/12.5 11/16 Metric size The figures in ( ) indicate the internal diameter of the applicable hose. Inch size 1

S Couplers KKA Series Stainless steel type

Port size IDK Thread size R, Rc 1/8 R, Rc 1/4 R, Rc 3/8 R, Rc 1/2 R, Rc 3/4 R, Rc 1 R, Rc 1 1/4 R, Rc 1 1/2 Symbol 01 02 03 04 06 10 12 14 Connection type Type Male thread (with sealant) Female thread Symbol M F Availability Plug Yes No No Yes Socket Yes Yes No No Built-in check valve Note) A plug with check valve should be used in combination with a socket with check valve.

IR1000/2000/3000

5 to 100C) For low temp. environments (30 to 60C) T Note 4) Semi-standard Type of setting L Note 5), 6) 0 1 Note 1) Basic type (Knob) Air operated type Suffix 2 Set pressure range Nil For IR1000/2000 series Port size Bracket, Name plate, Mounting on the opposite side R Note 7) 0 1 2 0.005 to 0.2 MPa 0.01 to 0.4 MPa 0.01 to 0.8 MPa Application Size Symbol IR1000 IR2000 IR3000 01 02 03 04

IR1000-A/2000-A/3000-A

AR425 to 935 ARX q Body size 1 2 3 Symbol Description AMR w Set pressure range 0 0.005 to 0.2 MPa V V 0.01 to 0.2 MPa V 1 0.01 to 0.4 MPa V V V 2 0.01 to 0.8 MPa V V V + ARM ARP IR-A IR-A e Exhaust direction 0 Bottom exhaust V V V 1 Front exhaust V 2 Rear exhaust V + IR IRV r Pipe thread type Nil Rc V V V N NPT V V V F G V V V + VEX 01 1/8 V 02 1/4 V V 03 3/8 V 04 1/2 V + SRH

IR1200-A/2200-A/3200-A

AR425 to 935 ARX q Body size 1 2 3 Symbol Description AMR w Set pressure range 0 0.02 to 0.2 MPa V V V 1 0.02 to 0.4 MPa V V V 2 0.02 to 0.8 MPa V V V + ARM ARP e Exhaust direction 0 Bottom exhaust V V V 1 Front exhaust V 2 Rear exhaust V + IR-A IR-A IR r Pipe thread type Nil Rc V V V N NPT V V V F G V V V + IRV VEX 01 1/8 V 02 1/4 V V 03 3/8 V 04 1/2 V + SRH t Port size SRP a

Membrane Air Dryer/Single Unit Type Series IDG < A IDG < A Series Reduced purge

JIS Symbol G Port size Symbol Port size Size 30 1/4 50 $ 60 75 100 02 03 04 $ Bracket Assembly (Accessory) Part No. $ $ $ $ $ 3/8 Part no. Applicable model BM64 BM65 $ $ $ 1/2 IDG30

Series IDK Moisture Control Tube

Moisture control tube effective length Symbol 02 04 06 O.D. 2 mm 4 mm 6 mm Effective length 100 mm 200 mm Symbol 100 200 Dimensions Unit: mm Model Full length L Nominal effective length X L O.D. x I.D.

Diaphragm Style Flow Switch Series IFW5 For details about certified products conforming to international standards, visit us at www.smcworld.com.

ZSM Thread type Terminal box Nil Rc PF2 0 Without terminal box (Contact: 1ab) N NPT 1 With terminal box (Contact: 1ab) F G IF 2 With terminal box (Contact: 1b) Note) 5 With terminal box (24 VDC, + COM, Contact: 1b) Port size Data Note) 6 With terminal box (24 VDC, + COM, Contact: 1a) 04 03 3/8 Note) 7 With terminal box (24 VDC, COM, Contact: 1b) 1/2 Note) With terminal box (24 VDC, COM,

Series PPA PPA100/101/102 Compact Manometer 4

Note 2) Fixed unit For vacuum/compound pressure: kPa For positive pressure: MPa One-touch fitting type Applicable tubing size Symbol One-touch fitting None Applicable tubing material None None Nil Nylon Soft nylon Polyurethane 04 4 (mm size) KJH04-M5 06 6 (mm size) KJH06-M5 Specifications Model PPA101 for vacuum PPA102 for low press.

5 Port Solenoid Valve Series SZ3000 Plug-in Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

Specified layout (Up to 22 solenoids possible) 20 20 20 stations 20 stations PG: Flat ribbon cable connector (20 pins) PH: Flat ribbon cable connector (10 pins) Connector entry direction Note Symbol 02 Note Symbol 02 Stations Stations 1: Perpendicular connector 2: Lateral connector 2 stations 2 stations Double wiring specifications Double wiring specifications LOCK FREE LOCK FREE 08 02 04

How to Order 90-SV Series Single Valve/Sub-plate Type IP67 Compliant

Single Valve/Sub-plate Type IP67 Compliant How to Order 90-SV Series 90 SV W1 00 1 2 5 U D Series compatible with secondary batteries Thread type Nil F N T Rc G NPT NPTF 90 Material restriction Series 2 4 90-SV2000 90-SV4000 Port size Type of actuation Port size Without sub-plate Symbol Nil 02 03 04 Applicable series 2 position single (A) 4 (B) 2 90-SV2000 90-SV4000 90-SV4000 1/4 3/8 1/2

VH

Body size (Base size) 2 3 4 6 1/4 base 3/8 base 1/2 base 1 base Port size (Nominal size) 02 03 04 06 10 1/4 3/8 1/2 3/4 1 Piping/Mounting Piping Note) Mounting method Body Panel mounting Body Panel mounting Symbol 0 1 2 3 Side Side Bottom Bottom Thread type Nil N F Note) Only side piping is available for VH200 and VH600 and R port is located on the bottom.

Clean Regulator SRH Series

Port size SRP SRH3000 URJF 1/4 SRH4000 URJF 3/8 Piping port size Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 With metal gasket seal fitting With metal gasket seal fitting Symbol 01 02 03 04 A2 A3 X210 EPDM seals SRF With relief port fittings (Applicable tube O.D.: 4) X211 X216 ITV Machined relief port M5 thread Knob operation product with reduced torque X233 IC X234 Aluminum body ITVH Note) The pressure

VEX5

With light/surge voltage suppressor (Except grommet) Operationtype 0 Air operated External pilot solenoid Electricalentry(Onlywithsolenoid) 1 G H E T D Grommet, Lead wire length 300 mm Grommet, Lead wire length 600 mm Grommet terminal Conduit terminal DIN terminal Portsize Bodysize Port size port 3(R) port 1(P), 2(A) Body size Ratedvoltage(Onlywithsolenoid) 1 2 3 4 1 2 100 VAC 50/60 Hz 04

Series VER2000/4000 5 Port Electro-Pneumatic Proportional Valve How to Order Port size Nil Without sub-plate 1 4 02 3 8 03 ARJ 02 VER2000 Series VER2000 AR425 to 935 AMR 03 0 VER400 Series VER4000 ARM Thread type Pilot type ARP 0 Internal pilot Rc Nil Por

Series VER2000/4000 5 Port Electro-Pneumatic Proportional Valve How to Order Port size Nil Without sub-plate 02 03 1 4 3 8 ARJ VER2000 02 Series VER2000 AR425 to 935 AMR 03 0 VER400 Series VER4000 ARM Thread type Pilot type Internal pilot External pilot ARP 0 1 Nil Rc Port size F N G NPT T IR Nil Without sub-plate 03 04 06 3 8 1 2 3 4 NPTF IRV VEX1 SRH Note) To order valve with interface