Rated Flow Range: 06 (60 to 6000 l/min), Thread Type: F [G (ISO 1179-1 Compliant)], Port Size: 14 (1 1/2), Output Specification: L4 [Out: IO-Link, Switch Output (N/P); Func: Analog Current Output <-> External Input; Monitor Unit Model: PFG310 Series]
Rated Flow Range: 12 (120 to 12000 l/min), Thread Type: Rc, Port Size: 20 (2), Output Specification: L [Out: IO-Link, Switch Output (N/P); Func: None; Monitor Unit Model: None], Lead Wire: Q (Lead Wire and M12-M12 Connector, 3m)
Rated Flow Range: 501 (5 to 500 L/min), Thread Type: Rc, Port Size: 04 (1/2), Output Specifications: L [Out: IO-Link, Switch Output (N/P); Func: None; Monitor Unit Model: None]
Rated Flow Range: 501 (5 to 500 L/min), Thread Type: Rc, Port Size: 04 (1/2), Output Specifications: L3 [Out: IO-Link, Switch Output (N/P); Func: Analog Voltage Output <-> External Input; Monitor Unit Model: PFG300 Series]
Rated Flow Range: 501 (5 to 500 L/min), Thread Type: Rc, Port Size: 04 (1/2), Output Specifications: L4 [Out: IO-Link, Switch Output (N/P); Func: Analog Current Output <-> External Input; Monitor Unit Model: PFG310 Series]
Rated Flow Range: 202 (20 to 2000 L/min), Thread Type: Rc, Port Size: 06 (3/4), Output Specifications: L [Out: IO-Link, Switch Output (N/P); Func: None; Monitor Unit Model: None], Option 1: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m)
Rated Flow Range: 102 (10 to 1000 L/min), Thread Type: F (G), Port Size: 04 (1/2), Output Specifications: L [Out: IO-Link, Switch Output (N/P); Func: None; Monitor Unit Model: None], Option 1: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m)
Rated Flow Range: 202 (20 to 2000 L/min), Thread Type: F (G), Port Size: 06 (3/4), Output Specifications: L3 [Out: IO-Link, Switch Output (N/P); Func: Analog Voltage Output <-> External Input; Monitor Unit Model: PFG300 Series], Option 1: w/Lead Wire and M8 Connector, 3m, Unit Specification: Unit Selection Function, Option 2: R (w/Bracket)
Rated Flow Range: 501 (5 to 500 L/min), Thread Type: F (G), Port Size: 04 (1/2), Output Specifications: L [Out: IO-Link, Switch Output (N/P); Func: None; Monitor Unit Model: None]
Rated Flow Range: 501 (5 to 500 L/min), Thread Type: F (G), Port Size: 04 (1/2), Output Specifications: L4 [Out: IO-Link, Switch Output (N/P); Func: Analog Current Output <-> External Input; Monitor Unit Model: PFG310 Series]
Rated Flow Range: 501 (5 to 500 L/min), Thread Type: F (G), Port Size: 04 (1/2), Output Specifications: L [Out: IO-Link, Switch Output (N/P); Func: None; Monitor Unit Model: None], Option 1: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m)
Rated Flow Range: 102 (10 to 1000 L/min), Thread Type: Rc, Port Size: 04 (1/2), Output Specifications: L [Out: IO-Link, Switch Output (N/P); Func: None; Monitor Unit Model: None], Option 1: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Unit Specification: M (SI Unit Only)
Rated Flow Range: 501 (5 to 500 L/min), Thread Type: Rc, Port Size: 04 (1/2), Output Specifications: L [Out: IO-Link, Switch Output (N/P); Func: None; Monitor Unit Model: None], Option 1: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Unit Specification: M (SI Unit Only)
Rated Flow Range: 202 (20 to 2000 L/min), Thread Type: Rc, Port Size: 06 (3/4), Output Specifications: L [Out: IO-Link, Switch Output (N/P); Func: None; Monitor Unit Model: None], Option 1: w/Lead Wire and M8 Connector, 3m, Unit Specification: Unit Selection Function, Option 2: No Bracket, Calibration Certificate: A (Yes)
Rated Flow Range: 202 (20 to 2000 L/min), Thread Type: Rc, Port Size: 06 (3/4), Output Specifications: L [Out: IO-Link, Switch Output (N/P); Func: None; Monitor Unit Model: None], Option 1: w/Lead Wire and M8 Connector, 3m, Unit Specification: Unit Selection Function, Option 2: R (w/Bracket), Calibration Certificate: A (Yes)
Rated Flow Range: 501 (5 to 500 L/min), Thread Type: Rc, Port Size: 04 (1/2), Output Specifications: L4 [Out: IO-Link, Switch Output (N/P); Func: Analog Current Output <-> External Input; Monitor Unit Model: PFG310 Series], Option 1: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Unit Specification: Unit Selection Function, Option 2: R (w/Bracket)
Type: P (Parallel Seal Slit Valve), Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 2 (Cassette Type Standard), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 1 (FKM), Auto Switch & Connector: F (2 pcs D-A93 w/D-sub Connector), End Lock: N (None)
Type: P (Parallel Seal Slit Valve), Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 3 (Cassette Type Half MESC), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 1 (FKM), Auto Switch & Connector: None, End Lock: N (None)
Model: 10S (Side Ported), SI Unit Specification: EA (EtherNet/IPâ„¢, 32 Outputs, M12 Connector), SI Unit Output Polarity: N (Negative Common), Valve Stations: 10 Stations, P, E Port Location: B (Both Sides, 2 to 10 Stations), SUP/EXH Block: Internal Pilot, A, B Port Size: C4 (ø4 One-touch Fitting)
Model: 10S (Side Ported), SI Unit Specification: EA (EtherNet/IPâ„¢, 32 Outputs, M12 Connector), SI Unit Output Polarity: N (Negative Common), Valve Stations: 10 Stations, P, E Port Location: B (Both Sides, 2 to 10 Stations), SUP/EXH Block: Internal Pilot, A, B Port Size: C6 (ø6 One-touch Fitting)