70pvpump

N03 T03 NPTF 1/4 Threads Rc 1/4 Threads G 1/4 Threads NPT 1/4 Threads P11 P11F Compact, lightweight (Without foot) P11N P11T PAP331 (Assembled in clean room) NPTF 1/4 Threads Rc 1/4 Threads G 1/4 Threads NPT 1/4 Threads P13 P13F 140 mm 120 mm P13N P13T NPTF 1/4 Threads 110 mm Option Reset button Weight: 2.1 kg Air operated type is also standardized.

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4 ( ) 4 (+) () 4-pin type Light/surge voltage suppressor (WZ/VZ) Light/surge voltage suppressor (WZ/VZ) (Ground) 3 ( ) 3 () (+) Varistor Coil NL 1 2 Varistor Coil 3 4 5 4 ( ) 4 (+) () 5-pin type Back page 4 Series SGH Specific Product Precautions 3 Be sure to read before handling.

reduces flow setting time

1/4 V V V V V V V AS3ll1FSl-l03 3/8 V V V V V V V AS-FP AS4ll1FSl-l04 1/2 V V VNote 4) V V 10 AS2ll1FSl-G01 1/8 V V V V VNote 4) AS-FM AS2ll1FSl-G02 1/4 VNote 4) V V V V AS-D AS3ll1FSl-G02 1/4 V V V V G Face seal AS3ll1FSl-G03 3/8 V V V V AS-T AS4ll1FSl-G04 1/2 V V VNote 4) Note 1) Without sealant type can be selected as a standard option.

Mist Separator

Note 3) "Z" in Part No. (4) indicates semi-standard specifications. The pressure unit: psi. The temperature unit: oF. Note 4) Refer to the section [4.

Auto Switch Guide

Pin arrangement 1 2 Solid state switch Standard part no. 3 4 4 3 3 For the applicable auto switch model, refer to the table below.

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

/Y7PV D-Y7WV 10 + 30 n = 2, 4, 6, 8 (n 2) 2 100 + 30 n = 4, 8, 12, 16 (n 4) (n 4) (n 4) 2 90 + 30 n = 4, 8, 12, 16 2 95 + 30 n = 4, 8, 12, 16 n 2 2 (Different sides, Same side), 1 115 130 20 120 125 n D-Y7BAL 20 + 45 n = 2, 4, 6, 8 (n 2) 2 (n 4) (n 4) (n 4) (n 4) 2 115 + 45 n = 4, 8, 12, 16 120 + 45 n = 4, 8, 12, 16 125 + 45 n = 4, 8, 12, 16 130 + 45 n = 4, 8, 12, 16 2 2 2 6-9-8

HRX-OM-Y120

A signal type for contact output signal 4 to 6 can be selected by the customer. Refer to Table 2.4-3 Signal type for contact output signals 4 to 6. (1) (2) (3) Setting of contact output signal 4 to 6 Selection of signal type Table 2.4-2 Setting of contact output signal 4 to 6 No.

A_HEC-OM-K001

3.2.8 Communication Function. 3-4 3.2.9 Remote ON/OFF function. 3-5 3.2.10 Output cutoff Alarm Function . 3-6 Chapter 4 Installation . 4-1 4.1 Installation, Transport and Transfer . 4-1 4.1.1 Transport and Transfer . 4-1 4.1.2 Environment . 4-1 4.1.3 Set-up in Clean Room . 4-2 4.1.4 Installation . 4-2 4.2 Piping . 4-3 4.2.1 Preparation of Facility Water . 4-4 4.2.2 Preparation of Recirculating

JXCx-OMU0026

JXC-OMU0026 4.

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

encoder installation . 24 1 - 4.

CXS

CXSJ6-10 10 15 19 42 52 CXSJ6-20 20 25 29 52 62 CXSJ6-30 30 35 39 62 72 CXSJ6-40 40 45 49 72 82 CXSJ6-50 50 55 59 82 92 5 Series CXSJ Dimensions: 10 Standard Piping 16 12 + ST 4-M3 x 0.5 with depth 4.5 3.5 8 7.5 2-M5 x 0.8 with depth 4 (Piping port) 28.5 8 ST 56 + ST 15 44.5 + ST 8 3.5 13 1 M5 x 0.8 x 4 (Hexagon socket head set screw) 4 16 8 + ST 4.5 4.5 M8 x 1.25 x 7.5 (Bolt holder) 1 40

MHF2

5.9 11 11 14 19 E M3 x 0.5 Finger opening port M3 x 0.5 0 -0.1 2-2.6 through (Mounting hole) 17 12 12 Finger closing port 2-4.5 0.8 0.8 E-E +0.1 0 Close: 0 Open: 81 Use the attached hexagon socket head screws for mounting holes. 4-M3 x 0.5 thread depth 4 14 Mounting thread 4-M2.5 x 0.45 thread depth 3 Attachment mounting thread Groove for auto switch mounting M2.5 x 0.45 4 1.3 12 26 4 15

AC Servo Motor Driver (CC-Link Type)

pulley (Pulley ratio 4/7) ratio) Parameter *1,*2 Para.

Micro Mist Separator

Note 3) "Z" in Part No. (4) indicates semi-standard specifications. The pressure unit: psi. The temperature unit: oF. Note 4) Refer to the section [4.

Rubber seal 5 Port Solenoid Valve Series SYJ7000

0.32 0.24 0.57 0.37 0.45 0.55 0.36 0.50 0.51 0.50 0.38 0.46 2.3 2.0 2.1 2.3 2.1 2.1 2.5 2.2 2.2 2.2 0.26 0.25 0.25 0.26 0.24 0.20 0.23 0.30 0.23 0.26 0.55 0.49 0.51 0.54 0.50 0.50 0.59 0.55 0.52 0.53 1/8 1/8 1/8 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/8 C6 C8 1/8 C6 C8 1/8 1/8 C6 C8 Type SS5YJ7-20 Body ported SYJ72 for internal pilot Type SS5YJ7-21 Type SS5YJ7-40 Base mounted Type SS5YJ7-41 SYJ74

3 Port Solenoid Valve Metal Seal Series VZ200 1

4 !

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

13 M6 x 1 6 M10 x 1.25 10 28.9 16 94 4 4 7 26 190 47 32.5 15 4 48 8 40 Up to 1000 24 35 16 G 1/4 14 M6 x 1 6.5 M12 x 1.25 13 32.6 16 105 4 5 8.9 30 213 54 38 17 4 54 8 50 Up to 1000 32 40 20 G 1/4 14 M8 x 1.25 8 M16 x 1.5 17 32 16 106 4 6 5.1 37 244 66 46.5 24 5 69 63 Up to 1000 32 45 20 G 3/8 16 M8 x 1.25 8 M16 x 1.5 17 38.6 16 121 4 9 6.3 37 259 77 56.5 24 5 69 80 Up to 1000 40 45 25

Thermo-chiller

Circulating uid outlet, Circulating uid return port Rc3/4 NPT3/4 or G3/4 Overow port Rc1 NPT1 or G1 Automatic uid ll port Rc1/2 NPT1/2 or G1/2 Facility water inlet, Facility water outlet Rc3/4 NPT3/4 or G3/4 (for HRS-EP029 or HRS-EP030) (It is not necessary to purchase this when pipe thread type F or N is selected in How to Order since it is included in the product.) Part no.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

4 !5 !

PFxx-OMA1007

X2 (Port4 input) X4 (Port 4 input) 19 Reserved (Port 3) 20 to 35 Port 4 IO-Link process data -85No.PF-OMA1007-B Output mapping AMS Base Bit Byte 7 6 5 4 3 2 1 0 Isolation input signal for NO system Isolation input signal for NC system 0 Reserved F-Standby Standby 1 Reserved Port 4 Digital Output Reserved 2 Port 4 IO-Link process data : 17 18 Wireless Remote 1 : : : Wireless Remote 10 Byte