Air/Manually Operated High Purity Chemical Valve Series LV

A B A B Non-locking Locking Threaded Type LVH20 4 LVH30 8 LVH40 12 Model Orifice diameter Material SUS316 PPS PFA 1/4 3/8 3/8 3/8 SUS316 PPS PFA 3/8 1/2 1/2 1/2 SUS316 PPS PFA Port size 1/8 1/4 1/4 1/4 Symbol Type Basic type Valve type N.C. A B A B Non-locking Locking Manifold (5 stations max.)

Table of Contents

Actuation Plug Plug (A) 4 (B) (2) Number of solenoids (A) (4) (B) 2 Single 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) Plug Plug (A) (4) (B) 2 (A) 4 (B) (2) Manual Override Operation Double Warning 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) Light/Surge Voltage Suppressor Handle carefully, as connected equipment can be actuated through manual override operation.

Series HAW Water Cooled Aftercooler 1

Rc 1/2 Rc 11/2 Rc 2 3B flange Rc 11/4 Rc 1 32 67 78 Rc 1/2 Rc 1/2 Rc 3/4 Rc 3/4 Rc 1 Rc 3/4 Weight (kg) Coating color Drain valve (1 pc.) 9.7 11.5 59 95 High efficiency drain Drainage is efficiently removed by built-in drain separator. Visible outlet air temperature Outlet air temperature is easily checked by thermometer, resulting in easy maintenance.

Series SYJA300 3 Port Air Operated Valve

(Value in the initial stage) Series SYJA700 JIS symbol How to Order Manifold Base 2 4 SYJA52 SYJA72 2 4 SYJA51 SYJA71 2 4 2 4 Uses the same manifold valve as the SYJ500, 700 series. (A) 2 (A) 2 SS3YJA5 Specify the same manifold part number as SS3YJ5. (SYJA500) SS3YJA7 Specify the same manifold part number as SS3YJ7.

EX600-AX_AY_AM_eng

Status display LED 1 3 4 6 Description Function 2 4 5 Displays the status of the unit.

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

Selection of air quality by purpose For these cases, degree of quality is 15 4 +3 5 specified as 1, 4, and 2 respectively. 40 5 +7 25 Refer to Guide (1). Refer to Guide (2). Refer to Guide (3). Refer to below piping system chart. Refer to Guide (4) page 14-14-4.

2/3 Port Solenoid Valve for Chemicals

3 Sleeve 7 Iron Spacer 8 PBT r Return spring 9 Stainless steel w Board assembly 10 e Casing 11 PBT q Plug 12 NBR O-ring 13 NBR 3 Diaphragm Type Direct Acting 2/3 Port Solenoid Valve for Chemicals Series LVM10/100 Construction/Base Mounted Type LVM13R LVM14R LVM16R !2 !0 !2 !0 !2 !0 !1 !1 !1 y y y t t t u u i i u i o o !3 !3 o !3 r r r e e w w e w q !4 !4 q q !4 LVM115 Description No.

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

side: Same) 7 5 8 8.5 35 8 2 x M3 x 0.5 thread depth 5 4 (20) (Z) 2 x M4 x 0.7 thread depth 7 6 Note) 11-, 22-: Vacuum suction port Vacuum air from 2 ports on both sides. 10-/12-, 21-: Relief port Exhaust air from a port on one side.

Multistage Ejector Series ZL112/212 1

2 With valve Valve plate !3 With valve Needle !4 SYJ514 With valve Supply valve (N.C.) !5 SYJ514 With valve Release valve (N.C.) !

IR10-OM00007

No. o S o1 T P2 U Q3 V R4 W Z12 -6- (1) Nm 1/8 (2) (3) (4) -7- (1) (2) (3) (4) (1) (2) (3) (1) (2) 3 (3) 1 3 1 (4) P.5 0 (5) 0 (6) 0.6Nm -8- (1) (2) (3) 12.5Nm (4) ()ON-OFF (5) 79Nm (6) (7) (1) AF AM AFM (2) (1) ( (2) 1.52 (1) -9- 6 (1) 1 1.5 (2) , (3) (4) [][] -10- 8 2 6 3 2 () 5 2 2 (80-) (80-) 2 2 9 EXH 2 2 ON-OFF 1 1 7 2

Safety Instructions

Keep the Class 2 Pressure Vessel Certificate in a safe place. Large refrigerated air dryers (lDF190D and larger) and large AFF, AMD, (AFF220A, AMD901/900/1000) and air tanks comply with Class 2 Pressure Vessel requirements. Make sure to keep in a safe place the certificate which will be sent to you 2 to 4 weeks after the product.

Digital Pressure Switch

Hysteresis mode Variable (0 digits or more) Hystere sis 4-2 Window comparator mode Fixed (3 digits) Analog output 2-3 Voltage output: 1 to 5 V5 Output impedance: Approx. 1 k Display method 3 1/2 digits LCD (character height 5 mm) Indicator light 3-4 Light when ON OUT1: Green OUT2: Red Self-diagnosis function Detection of overcurrent, overpressure, data error and pressure during zero clear

High Purity Fluoropolymer Needle Valve Series LVN 1

2 1 P0.01MPa P0.01MPa P0.01MPa 2 1 0.5 0 2 4 6 8 10 0 0 0 2 4 6 8 10 0 0 2 4 6 8 10 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Number of needle rotations Number of needle rotations Number of needle rotations Construction t r w e With reducer q i A y u y u Part

High Speed 2 Port Valve

Doc. no.SX10-OMR0002-A PRODUCT NAME High Speed 2 Port Valve MODEL / Series / Product Number SX10 Series Contents Safety Instructions 2,3 Design 4 Selection 4 Mounting 4 Wiring 4 Lubrication 5 Air Supply 5 Operating Environment 5 Maintenance 5 Precautions 6 Continuous Energization 6 Energizing Time and Non-Energizing Time 6 Others 6 Lead Wire Connection 6 Symbol 6 Wiring 6 Control

AXTS-OMY0007

Port size Flow characteristics Internal pilot type External pilot type 1(P)4(A) 3(R2)2(B) Body port [dm3/(sbar)] B Cv C C [dm3/(sbar)] B Cv 1/2 12 0.14 2.9 14 0.18 3.4 This is the flow rate when the main valve is fully open. 3. How to order Switching type -5 - 4.

Space Saving Vacuum Ejector Vacuum Pump System

(Figure 3) 2. Replace the sound absorbing Fig. 3 material (ZZQ-SAE) in the silencer block. (Figure 4) Hexagon socket head cap screw 3. Tighten the silencer blocks with hexagon socket head cap screws. (Tightening torque: 0.28+/-0.03Nm) Fig. 4 25 - Doc. no. ZQ-OM00801-D Silencer How to replace the suction filter ZZQ-SAE A 1. Loosen the tension bolt and remove the filter case.

Electrostatic Sensor Monitor

IZE110 NPN open collector output: 2 outputs Max. 30 V, 80 mA Residual voltage 1 V or less Analog output: 1 to 5 V Output impedance: Approx. 1 k IZE111 NPN open collector output: 2 outputs Max. 30 V, 80 mA Residual voltage 1 V or less Analog output: 4 to 20 mA Max. load impedance: 600 (at 24 VDC) Min. load impedance: 50 IZE112 PNP open collector output: 2 outputs Max. 80 mA Residual voltage

EXxx-OMC0002

Communication cable Type Specifications Vinyl cord VCTF JISC3306 2-core nominal area: 0.75 mm2 (signal cable x 2) Conductor resistance (20 oC): 25.1 /km VCTF cable (commercially available cable) Nominal area: 0.75 mm2 x 4 (signal cable x 2, power cable x 2) Ambient temperature: 60 oC or less Special flat cable Type SCA1-4F10 (length 100 m) Power supply wiring The SI unit is a multi power

EX600-SEN_eng

ON ON ON ON ON ON ON Settings3 Settings3 Settings1 Settings3 Communication speed full duplex/half duplex setting 6 1 3 ON/OFF ON/OFF Configuration 3 4 1 2 OFF OFF OFF ON ON ON 8 4 5 5 : : BUS IN ON/OFF OFF OFF OFF OFF Settings3 ON ON ON OFF OFF 2 4 ON ON ON 7 8 Setting3 Setting1 Holds the output. Output is off.

1

When more than 3 types of nozzle are needed, A and B channels are available for selection; thus 2 outputs x 2 channels = 4 outputs are available. 50 ISA2 IS 0 0 Time AUTO-SHIFT terminal ZSM Set value of OUT2 (CH.B) Set value of OUT1 (CH.B) Set value of OUT2 (CH.A) Set value of OUT1 (CH.A) 10 [ms] Nozzle 1 Nozzle 2 Nozzle 3 Nozzle 4 50 GND PF2 P3 P4 P1 P3 P4 P1 After 10 [ms] is passed, display