Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order. q Symbol Description Body size 20 30 40 50 60 25 Nil K Note 1) Without backflow function With backflow function With backflow function w + Nil N F Thread type e Rc NPT G + 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 Port size r + Nil B Note 3) H Note 2) a Without mounting option With bracket

Series 10-V100 Rubber seal 3 port direct operated solenoid valve

Indicate part numbers of valve and option beneath the manifold part no. 643 A Manifold specifications 10-V100 Common SUP / Common EXH S41 type How to Order Applicable solenoid valve Note) VV100 S41 05 10 M5 10-V11410-V114A10-V12410-V124AApplicable blanking plate assembly V100-77-1A Stations 2 stations 2 port size M5 M5 x 0.8 Clean series 02 2 1 20 20 stations 3 2 Port 1 M5 x 0.8 Port 3

Series 10-, 21- AW-B Filter Regulator

Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order. q Symbol Description Body size 20 40 60 30 Nil K Note 1) Without backflow function With backflow function With backflow function w + Nil N Note 2) F Note 3) Thread type Rc NPT G e + 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 Port size r + Nil B Note 5) H Note 4) a Without mounting option

Auto Drain Valve Longer life & Higher resistance to foreign matter

Example) AD402-N04D-2VZ-A Thread type Semi-standard specifications Symbol Type Nil Rc F G N NPT Symbol Description 3 Bowl Nil Polycarbonate bowl 2 Metal bowl 6 Nylon bowl Semi-standard Valve Nil None4 Port size V With bleed valve Symbol Port size 02 1/4 03 3/8 04 1/2 Nil Name plate and caution plate for bowl in SI units Pressure unit Z5 Name plate and caution plate for bowl in imperial units

Series AP3100

type: 20.7 MPa and 9 MPa Designed for bulk specialty gas (BSGS) delivery LOTO standard with AP3157, optional AP3125 How to Order (Inlet) (Outlet) AP31 00 2PW MV8 MV8 S Model Ports Code Maximum operating pressure Knob Cv 0.7 1.3 1.0 1.0 1.0 Option (AP3150 only) Ports 2 ports Code 3000 psig (20.7 MPa) 1) 1300 psig (9.0 MPa) 3000 psig (20.7 MPa) 1) 1300 psig (9.0 MPa) 1300 psig (9.0 MPa) 00 02

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Example) 10-ARP30K-03BE-1RY Clean room compliant, copperfree, fluorine-free, silicon-free Clean room compliant Copper-free, fluorine-free Symbol 20 30 40 Body size Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without

Speed Controller with

Metric Size Applicable tubing 23 04 06 08 10 12 3.2 4 6 8 10 12 AS1002Fm TMH-23J TMH-04J TMH-06J AS2002Fm AS2052Fm TMH-06 TMH-08 AS3002Fm TMH-07 TMH-10 TMH-12 AS4002Fm TMH-13 Tubing size Applicable model The applicable TMH for the AS1002Fm-02 is not available.

Body Size: 30, Thread: Rc, Port Size: 02 (1/4), Mounting: B (w/Bracket), Float Type Auto Drain: D (N.O.

Body Size: 40, Back Flow: w/o Backflow, Thread: N (NPT), Port Size: 02 (1/4), Mounting Option: B (With Bracket), Float Type Auto Drain Option: C (N.C.

Body Size: 40, Back Flow: w/o Backflow, Thread: F (G), Port Size: 02 (1/4), Mounting Option: Without Mounting, Float Type Auto Drain Option: C (N.C.

Body Size: 40, Back Flow: w/o Backflow, Thread: F (G), Port Size: 02 (1/4), Mounting Option: B (With Bracket), Float Type Auto Drain Option: C (N.C.

Body Size: 40, Back Flow: w/o Backflow, Thread: F (G), Port Size: 02 (1/4), Mounting Option: Without Mounting, Float Type Auto Drain Option: C (N.C.

Rated Vacuum Range: -101 to 0 kPa, Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: M (SI Unit Only), Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

Function: 5 (3 Position Pressure Center), Body Style: 30 (Body Ported/Common Pilot EXH), Body Option: Body Ported Type, Pilot: Internal Pilot, Voltage: 5 (24VDC), Lead Wire: D (DIN Connector), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style (Flush), Piping: Side, Port Size: 02 (Sub-plate Plug-in 1/4, Non Plug-in 1/4, Direct Ported P,A,B Ports 1)

Function: 4 (3 Position Exhaust Center), Body Option: 20 (Body Ported/Individual Pilot EXH), Pilot: Internal Pilot, Voltage: 3 (110~120VAC 50/60HZ), Lead Wire: D (DIN Connector), Surge Suppressor: None, Manual Override: B (Locking Slotted Style), Piping: Side, Port Size: 02 (Base Mounted w/Sub-plate 1/4, Body Ported 1/4)

Body Size: 20, Back Flow: w/o Backflow, Thread: N (NPT), Port Size: 02 (1/4), Options: BG (B+G), Set Pressure: 0.05 to 0.85 MPa Setting, Bowl: Polycarbonate Bowl, Bowl Guard: C (w/Bowl Guard), Drain Port: w/Drain Cock, Exhaust Mechanism: Relieving Type, Flow Direction: R (Flow Direction: Right to Left), Drain Cock w/Barb Fitting: None, Pressure Units: Z [Product: psi, °C; Pressure Gauge:

Size: 20, Standard Dew Point: -20°C, Type: Standard, Thread: N (NPT), Port Size: 02 (1/4), Accessory: B (Bracket), Option: P (Fitting for Purge Air Exhaust)

Body Size: 40, Model Type: A (Filter Regulator + Lubricator), Thread: N (NPT), Port Size: 02 (1/4), Float Type Auto Drain: C [N.C.

Model: 32, Orifice: 2 (2.2mm), Style: 4 (COM, Single Unit), Option: C37, Seals: NBR, Class B, Suffix: Z (Oil-free), Port Size: 02 (1/4), Thread: N (NPT), Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal), Surge Suppressor: Z (w/Light and Surge Voltage Suppressor), Rectifier: None (for DC or AC Class H Coil), Bracket: B (Bracket)

Body Size: 40, Back Flow: w/o Backflow, Thread: F (G), Port Size: 02 (1/4), Mounting Option: B (With Bracket), Float Type Auto Drain Option: C (N.C.