0.4

VQ2000 Caution Applicable tubing 3.2 Applicable tubing 4 Applicable tubing 6 Applicable tubing 8 M5 Applicable tubing 1/8" Applicable tubing 5/32" Applicable tubing 1/4" Applicable tubing 5/16" VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 A B A B VVQ1000-50A-M5 VVQ1000-50A-N1 VVQ1000-50A-N3 VVQ1000-50A-N7 A B B A VVQ1000-51A-N3 VVQ1000-51A-N7 VVQ1000

Table of Contents

VQ1000 VQ5 VVQ1000-50A-C3 Applicable tubing 3.2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VVQ1000-50A-C4 Applicable tubing 4 VQZ VVQ1000-50A-C6 Applicable tubing 6 Purchasing order is available in units of 10 pieces. Caution VQD 1.

Compact Manifold Regulator Series ARM5

L dimension 31 398 32 410.5 33 423 34 435.5 35 448 36 460.5 37 473 38 485.5 39 498 40 510.5 One-touch Fittings for Centralized Supply Block One-touch Fittings for Regulator Block VVQ1000 50A C4 VVQ1000 51A C6 One-touch fittings for centralized supply block Fitting type One-touch fittings for regulator block Nil L1 Fitting type Straight Nil L1 Straight Elbow Elbow Fitting size Fitting size

Compact Manifold Regulator

SMC 62 Through hole for M3 3.2 SMC K P U C S O H L 7 26 (Max. 28) 12 7 IN OUT 12 Panel cutout dimensions 28 ARM10F1-06GPC 08GPC 4 x R1 or less 28 to 28.5 IN OUT 38 58 34 23 20 Plate thickness: Max. 2.1 30 15 6 OPEN 34 14 0.6 0.4 0.2 0.8 1 0 MPa 62 SMC P K U C S O H L 7 26 (Max. 28) 7 IN OUT 12 744 Regulator/Single Unit Type Options Pressure Gauge One-touch Fittings for Regulator VVQ1000-50A

Metal Seal/Rubber Seal Series VQ Body Ported

VVQ1000-50A-C3 Applicable tubing 3.2 VVQ1000-50A-C4 Applicable tubing 4 VVQ1000-50A-C6 Applicable tubing 6 Purchasing order is available in units of 10 pieces. Caution 1. Protect O-rings from scratches and dust to prevent air leakage. 2. The tightening torque for inserting fittings to the M5 thread assy should be 0.8 to 1.4 Nm.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Metric size Inch size 3 SY3000 5 SY5000 7 SY7000 9 SY9000 Rc Nil 5 32" F G One-touch fitting for 4 VVQ1000-50A-C4 VVQ1000-50A-N3 One-touch fitting for SY3000 SY3000 1 4" N VVQ1000-50A-N7 One-touch fitting for 6 VVQ1000-50A-C6 NPT One-touch fitting for 5 32" NPTF T One-touch fitting for 4 VVQ1000-51A-C4 VVQ1000-51A-N3 One-touch fitting for A, B port size SJ Except for M5 1 4" One-touch

CE2

Bore size (mm) 80 NLP-80A PDU-25Z PSD-33 x 25 P75 DSM-30 CA80-1609 CA80-1604 P5 Description Material No. 40 NLP-40A PDU-16Z PSD-22 x 16 P44 DSM-20 CA40-1606 CA40-1601 P3 50 NLP-50A PDU-20Z PSD-27 x 20 P50 DSM-25 CA63-1608 CA50-1602 P3 63 NLP-63A PDU-20Z PSD-27 x 20 P60 DSM-25 CA63-1608 CA63-1603 P3 100 NLP-100A PDU-30Z PSD-38 x 30 P90 DSM-35 CA100-1610 CA100-1605 P5 Piston seal Rod seal A

CE2

Description Material 40 NLP-40A PDU-16Z PSD-22 x 16 P44 DSM-20 CA40-1606 CA40-1601 P3 50 NLP-50A PDU-20Z PSD-27 x 20 P50 DSM-25 CA63-1608 CA50-1602 P3 63 NLP-63A PDU-20Z PSD-27 x 20 P60 DSM-25 CA63-1608 CA63-1603 P3 100 NLP-100A PDU-30Z PSD-38 x 30 P90 DSM-35 CA100-1610 CA100-1605 P5 Piston seal Rod seal A Rod seal B Brake piston seal Cushion seal Piston gasket Tube gasket Cushion valve seal

HEC-OM-R008

. (+/10%), 50/60Hz Current consumption Max.5A(100V) Max.9A(100V) Max.4A(240V) Max.10A(100V) Max.4A(240V) Max.8A (200V) Max.2.5A(240V) Inrush current 50A or less Over current protection 10A 14A Do not modify or reconstruct the unit.

ARM10/11

L 31 398 32 410.5 33 423 34 435.5 35 448 36 460.5 37 473 38 485.5 39 498 40 510.5 IC VBA One-touch Fittings for Regulator Block One-touch Fittings for Common Supply Block VE VVQ1000 50A C4 VVQ2000 51A C6 VY1 G Fitting type Fitting type One-touch fittings for regulator One-touch fittings for regulator block Nil L1 Straight Nil L1 Straight PPA Elbow Elbow AL Fitting size Fitting size C4 C6

ARM10/11

L 31 398 32 410.5 33 423 34 435.5 35 448 36 460.5 37 473 38 485.5 39 498 40 510.5 IC VBA One-touch Fittings for Regulator Block One-touch Fittings for Common Supply Block VE VVQ1000 50A C4 VVQ2000 51A C6 VY1 G Fitting type Fitting type One-touch fittings for regulator One-touch fittings for regulator block Nil L1 Straight Nil L1 Straight PPA Elbow Elbow AL Fitting size Fitting size C4 C6

Air-hydro Unit

Threaded type from 6A to 50A is standardized. Operation from 0 MPa is possible.

Angle Seat Valve /

/N.O. 1/4 to 50A 10 to 12 N.C.

Angle Seat Valve

/N.O. 1/4 to 50A 10 to 12 N.C./N.O. 1/4 to 1 10 to 12 10, 15, 20, 25 Fluid/Orifice Diameter Applicable fluid Orifice diameter [mm] Series Air Air Medium vacuum Medium vacuum Oil Oil Water Water Steam Steam 1 5 10 20 50 High temperature oil High temperature oil Heated water Heated water Can be used with heated water. Can be used with heated water.

HEC-OM-U015

Inrush current 50A or less 1000 1000 Over current protection 14A circuit protector Facility water temp. 20deg.C Do not peel off or rub alert warning and caution labels.

5 Port Solenoid Valve Series SV1000/2000/3000/4000

SV2000 SV1000 Port size One-touch fitting for 3.2 VVQ1000-50A-C3 One-touch fitting for 4 VVQ1000-51A-C4 VVQ1000-50A-C4 One-touch fitting for 6 VVQ1000-51A-C6 VVQ1000-50A-C6 P B B B B A, B Port P, E Port One-touch fitting for 8 VVQ1000-51A-C8 Fitting assembly One-touch fitting for 1/8" VVQ1000-50A-N1 One-touch fitting for 5/32" VVQ1000-51A-N3 VVQ1000-50A-N3 One-touch fitting for 1/4" VVQ1000

VQZ1000/2000/3000

(The standard valve has an individual exhaust for the pilot valve.) 2-7-27 28 28 Series VQZ Replacement Parts Body Ported One-touch Fitting Assembly (For cylinder port) C3 C4 C6 C8 C10 Fitting size Model VQZ1000/2000 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VQZ3000 VVQ1000-51A-C6 VVQ1000-51A-C8 VVQ1000-51A-C10 Note) Purchasing order is available in units of 10 pieces.

5-Port Solenoid Valve

One-touch fittings Port size SY3000 SY5000 SY7000 VVQ1000-50A-C2 3.2 VVQ1000-50A-C3 4 VVQ1000-50A-C4 VVQ1000-51A-C4 6 VVQ1000-50A-C6 VVQ1000-51A-C6 VVQ2000-51A-C6 8 VVQ1000-51A-C8 VVQ2000-51A-C8 10 VVQ2000-51A-C10 12 KQ2H12-17-X224 2 Metric size Straight type A, B port VVQ1000-50A-N1 5/32" VVQ1000-50A-N3 VVQ1000-51A-N3 1/4" VVQ1000-50A-N7 VVQ1000-51A-N7 VVQ2000-51A-N7 5/16"

Series VQ Base Mounted Metal Seal/Rubber Seal

Applicable tube O.D VQ0 VQ1000 VVQ1000-51A-C3 VVQ1000-51A-C4 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 Applicable tube 3.2 Applicable tube 4 Applicable tube 6 M5 female thread Push-locking lever style Refer to Options on p.1.10-190 to 1.10-193 for other types of fittings.

HEC_W-E

Recirculating fluid IN/OUT : 3/4 Radiating water IN/OUT : 1/2 Recirculating fluid drain : 1/4 (with a plug) Radiating water side:SUS303, SUS304 Recirculating fluid side: SUS303, SUS304, EPDM, Ceramic, PPS glass 30%, Wetted materials SiC, Polyethylene, Polyurethane Power supply voltage Single phase AC200 to 220V, 50/60Hz Current consumption MAX 10A Max. sound pressure 64dB Inrush current 50A