SMC Corporation of America
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Ambient and fluid temperature (C) Response time (ms) (1) (at the pressure of 0.5 MPa) 0 (No freezing) to 60 OFF AC 30 or less ON AC 30 or less DC 30 or less DC 40 or less Max. operating frequency (Hz) 3 Lubrication (2) Required (Equivalent to turbine oil Class1 ISO VG32) Manual override Yes (Non-locking) Mounting orientation Unrestricted 150/50 Impact/Vibration resistance (m/s2) (3) Note

Lead wire length (m) Auto switch model Load voltage Indicator light Type Electrical entry Wiring (Output) Pre-wire connector Applicable load Special function Applicable bore size (mm) 0.5 (Nil) 3 (L) 5 (Z) None (N) AC DC 80, 100 20 to 63 3-wire (NPN equivalent) IC circuit 5 V C76 Reed switch Solid state switch Grommet B54 C73 C73C 100 V, 200 V 100 V Yes Yes 12 V Relay, PLC 2-wire 24 V

For 10, 16, 20 Lead wire length (m) Auto switch model Pre-wire connector Applicable load Perpendicular In-line Load voltage Indicator light Electrical entry Special function Wiring (Output) Type 0.5 (Nil) 3 (L) 5 (Z) DC AC A96 A93 M9N M9P M9B F9NW F9PW F9BW A96V A93V M9NV M9PV M9BV F9NWV F9PWV F9BWV 3-wire (NPN equivalent) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP)

Sensor Monitor PF2D3 PF2D5 Lead wire 4 8 Switch output 1 Black Output for PF2D3 Main circuit 3 7 PF2D5 Main circuit Brown DC(+) + 2 6 12 to 24 VDC Blue DC(-) 1 5 Thank you for purchasing an SMC PF2D5 Series Flow Sensor. Please read this manual carefully before operating the product and make sure you understand its capabilities and limitations.

If anything such as a part drops through to the bottom in the Mesh is static elimination area, remove the mesh and take it away. removable -5- 1.3 Wiring of the DC plug If the AC adapter is not selected as an option, wire the attached DC plug with the procedure below. (1) Remove the cover from the DC plug body. (2) Strip the end of the lead wires by 3 to 4 mm, and insert the lead wires into

If anything such as a part drops through to the bottom in the static elimination area, remove the mesh and take it away. -5- 1.3 Wiring of the DC plug If the AC adapter is not selected as an option, wire the attached DC plug with the procedure below. (1) Remove the cover from the DC plug body. (2) Strip the end of the lead wires by 3 to 4 mm, and insert the lead wires into the cover, then

Max. load current Model Applicable load Load voltage Right Left and load current handed Perpendicular In-line handed range D-90 90 Relay 5, 12, 24 V AC/DC 50mA D-90A 90A PLC 5, 12, 24 V AC/DC 50mA IC circuit 100V AC/DC 20mA D-9 D-97 97 5, 12, 24 V AC/DC 50mA Relay D-93A 93A 24 VDC 5 to 40mA PLC 100 VAC 5 to 20mA D-R731 D-R732 R73 Relay 24 VDC 5 to 40mA PLC 100 VAC 5 to 20mA D-R73 D-R731C

For type W, DC voltage For connector cable of M8 connector, is only available. refer to page 13 and 14. Note 1) Enter the cable length symbols in CE-compliant: For DC only.

) IS1000E-4002 1/4 3/8 1/2 3/4 Operating voltage: AC, DC 100V or less 32 80.5 62.5 37 12.5 AC40 AR40, AW40 AWM40, AWD40 IS1000E-4003 Note 2) 12V to 24V AC, DC: 50mA 48V AC, DC: 40mA 100V AC, DC: 20mA IS1000E-4004 Max. operating current IS1000E-4006 Note 1) in the model numbers indicates a thread type.

Note) DC Option Note) At rated voltage Option Energy-saving type: VG342---Y If low power consumption is required for electronic control, VY307Y (2 W DC) is recommended. Mounting Screw Tightening Torques M4: 1.4 Nm Specifications different from standard are as follows.

A Note) Single type: No polarity COM () Black C Single solenoid (DC) Latching solenoid (DC) (+) White Reset B Simultaneous energization protection circuit A () set A () (+) Latching C (+) COM SOL. SOL.

(42 mA), 0.5 W DC (21 mA) (4) 24 VDC Power consumption (Current) 1 W DC (83 mA), 0.5 W DC (42 mA) (4) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 12 VDC Metal seal Rubber seal Note 1) Use dry air to prevent condensation when operating at low temperatures.

Brown DC (+) Brown DC (+) Load Main circuit Black OUT1 Black OUT1 Output (OUT2) display (Red) Load 12 VDC 12 VDC Load + + White OUT2 White OUT2 24 VDC to to button (SET) 24 VDC Load FUNC Blue DC () FUNC Blue DC () LED display Max. 80 mA Residual voltage: 2 V or less Max. 28 V, 80 mA Residual voltage: 2 V or less button (UP) button (DOWN) The FUNC terminal is connected when using the copy

Main Circuit Main Circuit 12 to 24V DC 12 to 24V DC 2 2 ISl IN 1 to 5V IN 4 to 20mA 4 3 ZSM PFl How to select channel When CH.SELECT terminal is open, channel A is selected. When it is connected to GND , channel B is selected.

(White) Load With analog output With analog output 1kW Main circuit Main circuit 1kW Load OUT1 (Black) OUT2 (White) 12 to 24VDC 12 to 24VDC Load Load DC () (Blue) DC () (Blue) ZSE40 (F) ISE40-m-30 (L)-(M) ZSE40 (F) ISE40-m-70 (L)-(M) DC (+) (Brown) Auto shift input (Gray) OUT1 (Black) OUT2 (White) DC (+) (Brown) Auto shift input (Gray) 1.2kW 1.2kW Load With auto shift input With auto shift

Further, use DC power with sufficient capacity and a low ripple.

0.02 to 0.2 mA DC 1 to 5 VDC 0 to 10 VDC 4 to 20 mA DC 0 to 20 mA DC 0.6 0.6 0.4 0.4 Note) Other body sizes add the dispersion on the above data when the main valve activates. 0.2 0.2 VY170-5 VY190-5 0 1 2 3 4 5 0 1 2 3 4 5 V V VY170-6 VY190-6 1 1 0 2.5 5 7.5 10 0 2.5 5 7.5 10 V V VY170-7 VY190-7 2 2 4 0 8 12 16 20 mA 4 0 8 12 16 20 mA VY170-8 0 5 10 15 20 VY190-8 0 5 10 15 20 3 3 mA mA

Wire core color For PSE200 (ZS-26-E) Brown (DC (+)) Black (OUT: 1 to 5 V) Blue (DC (-)) Not connected Connector no. 1 2 3 4 PF2 For PSE300 (ZS-28-C) Brown (DC (+)) Not connected Blue (DC (-)) Black (OUT: 1 to 5 V) IF Controller Data Handling Confirm that the numbers on the connector match the colors of the wires and that the wires are inserted to the bottom.

Connection example with a PLC at common terminal Lead wire 0.2 to 0.33 mm2 Max. coating O.D. 1.7 mm Switch DC ( + ) Brown Lever DC polarity indicator Connector Socket Hook OUT Black + O PLC Input terminal DC () Blue High vacuum Pin Slot Housing COM 12 to 24 VDC + Supply pressure Steady adsorption Filter case Set point Unsteady adsorption Caution 2.

circuit 1 k 1 k Load OUT1 (Black) OUT2 (White) 12 to 24 VDC 12 to 24 VDC Load Load DC () (Blue) DC () (Blue) ZSE40(F) ISE40--30(L)-(M) With auto shift input ZSE40(F) ISE40--70(L)-(M) With auto shift input DC (+) (Brown) Auto shift input (Gray) OUT1 (Black) OUT2 (White) DC (+) (Brown) Auto shift input (Gray) 1.2 k 1.2 k Load 6.8 k 6.8 k Main circuit Main circuit Load OUT1 (Black) OUT2 (White