Stations: 9 Stations, Piping: 3 (P Common, R Individual, A Side), Thread: N (NPT)

Stations: 5 Stations, Piping: 3 (P Common, R Individual, A Side), Thread: N (NPT)

Stations: 20 Stations, Piping: 1 (P Common, R Common, A Side), Thread: N (NPT)

Stations: 6 Stations, Piping: 1 (P Common, R Common, A Side), Thread: N (NPT)

Stations: 3 Stations, Piping: 1 (P Common, R Common, A Side), Thread: N (NPT)

Stations: 14 Stations, Piping: 1 (P Common, R Common, A Side), Thread: N (NPT)

Stations: 11 Stations, Piping: 1 (P Common, R Common, A Side), Thread: N (NPT)

Model: 12 (Top Ported), Connector Type: P (Flat Ribbon Cable, 26 Pins), Connector Entry Direction: 2 (Lateral), Valve Stations: 12 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: Internal Pilot, P,E Port Size: N (ø3/8" One-touch Fitting, Inch)

Body Size: 60, Backflow: K (w/Backflow Function), Thread: N (NPT), Port Size: 10 (1), Options: BE (B+E), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: N (Non-relieving Type), Flow Direction: Left to Right, Knob: Downward, Pressure Units: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)

Body Size: 50, Backflow: K (w/Backflow Function), Thread: N (NPT), Port Size: 10 (1), Options: B (w/Bracket), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: N (Non-relieving Type), Flow Direction: Left to Right, Knob: Downward, Pressure Units: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)

Body Size: 50, Backflow: K (w/Backflow Function), Thread: N (NPT), Port Size: 10 (1), Options: BG (B+G), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: N (Non-relieving Type), Flow Direction: Left to Right, Knob: Downward, Pressure Units: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)

Body Size: 40, Thread: N (NPT), Port Size: 04 (1/2), Option: G (for Sizes 20, 25, 30, 40 Round Type Pressure Gauge w/Limit Indicator; for Size10: Round Type Pressure Gauge w/o Limit Indicator), Attachment: KST (K + S + T), Semi-Standard 1: Standard, Semi-Standard 2: NRZ (N + R + Z)

Valve; Stop Valve: None), Return Port Size: 03 (3/8), Flow Switch Output Specifications: L2T [Out 1: IO-Link/Switch Output (N/P); Out 2: Flow Rate/Temp.: Switch Output (N/P); Temperature Sensor: Yes], Lead Wire: N (w/o Lead Wire and M8 Connector)

Valve; Stop Valve: None), Return Port Size: 06 (3/4), Flow Switch Output Specifications: L2T [Out 1: IO-Link/Switch Output (N/P); Out 2: Flow Rate/Temp.: Switch Output (N/P); Temperature Sensor: Yes], Lead Wire: N (w/o Lead Wire and M8 Connector)

Valve; Stop Valve: None), Return Port Size: 03 (3/8), Flow Switch Output Specifications: L2T [Out 1: IO-Link/Switch Output (N/P); Out 2: Flow Rate/Temp.: Switch Output (N/P); Temperature Sensor: Yes], Lead Wire: N (w/o Lead Wire and M8 Connector)

Vacuum Regulator Series IRV

side) SET (pad side) SMC P K Note 1) The maximum flow rate is the flow rate when initial settings are VAC. pressure 755mmHg, SET. pressure 600mmHg and flow rate 0l/min (ANR).

Model: 12S6 (Top-Ported, Serial Interface, EX600), SI Unit Specification: N (PROFIBUS DP), SI Unit Common, End Plate: 2 (Positive Common, M12 Connector), I/O Unit Stations: None, Valve Stations: 8 Stations, P,E Port, SUP/EXH Assembly: B (Port Location Both Sides, Internal Pilot), P,E Port Size: N (ø3/8" One-touch Fitting)

Model: 12S (Top-Ported, Serial Interface), SI Unit Specification: EA (EtherNet/IPâ„¢ - 32 Outputs - M12 Connector), SI Unit Output Polarity: N (Negative Common), Valve Stations: 16 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: Internal Pilot, P, E Port Size: N (ø5/16"), Mounting: D (DIN Rail Mounting, w/DIN Rail)

Model: 12S (Top-Ported, Serial Interface), SI Unit Specification: EA (EtherNet/IPâ„¢ - 32 Outputs - M12 Connector), SI Unit Output Polarity: N (Negative Common), Valve Stations: 8 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: Internal Pilot, P, E Port Size: N (ø5/16"), Mounting: D0 (DIN Rail Mounting w/o DIN Rail)

Model: 12S (Top-Ported, Serial Interface), SI Unit Specification: EB (EtherNet/IPâ„¢ - 16 Outputs - M12 Connector), SI Unit Output Polarity: N (Negative Common), Valve Stations: 8 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: Internal Pilot, P, E Port Size: N (ø5/16"), Mounting: D0 (DIN Rail Mounting w/o DIN Rail)