Air Cylinder Series CM2

75 30 14 10 32 32 52 36 108 116 118 40 25 40 55 20 21 Up to 300 Up to 400 6.8 3.2 102 131 133 142 to 400 Up to 300 Up to 300 4 4 8 7 9 9 41 111 19 10 9 40 37 60 75 30 14 10 40 40 60 40 112 120 122 47 28 40 55 20 25 6.8 3.2 102 135 Up to 300 Up to 450 137 146 to 450 Up to 300 Up to 300 4 4 8 7 9 9 41 113 19 10 9 40 37 60 75 30 14 10 40 40 60 40 114 122 124 47 28 40 55 20 25 6.8 3.2 104

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

20 204 162 41 35 45 115 70 48 17 18.5 39 111 3/4 1 Up to 1200 M20 x 1.5 M45 x 1.5 63 60 20 226 46 182 35 50 115 74 48 17 18.5 39 111 Lube Non-lube Up to 1200 M24 x 1.5 M56 x 2 71 67 277 25 56 225 60 41.5 140 86 60 20 23 49 141 Up to 1200 M30 x 1.5 M64 x 2 80 76 330 30 65 270 51.5 70 140 96 60 20 23 1 49 146 With Auto Switch: 125 to 200 Only Without rod boot l With rod boot S Without rod

CL

MLGC Front flange CNA Bore (mm) B BZ FT FD FX FZ FY CB 20 25 32 40 57.5 69 69 76 5.5 5.5 6.6 6.6 6 7 7 8 52 60 60 66 38 45 45 52 65 75 75 82 25 30 30 36 Rear flange/CLG1GN Front flange/CLG1FN CV/MVG CXW Refer to p.3.1-30 for long stroke dimensions.

Table of Contents

D 4 4 6 6 E 60 90 90 90 F 30 60 60 60 G (50) (50) 100 100 Model LXFH5BC-25 LXFH5BC-50 LXFH5BC-75 LXFH5BC-100 Positioning Time Guide (for Horizontal Mount) For transfer load of 2kg For transfer load of 0kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 100 100 50 50 10 10 1 1 10 10 10.1 10.1 5.1 5.1 1.1 1.1 0.2 0.2 Speed (mm/s) Speed (mm/s

Combination Cylinder

CNA Front flange CNG Bore (mm) B BZ FT FD FX FZ FY MNB 20 25 32 40 25 30 30 36 65 75 75 82 38 45 45 52 57.5 69 69 76 5.5 5.5 6.6 6.6 6 7 7 8 52 60 60 66 Rear flange/CLG1GN Front flange/CLG1FN CNS CLS Refer to p.3.1-30 for long stroke dimensions.

Step Motor Controller

Hz) Three phase 200 to 230 VAC (50/60 Hz) Single phase 200 to 230 VAC (50/60 Hz) Power voltage [V] Main power supply Three phase 170 to 253 VAC Single phase 170 to 253 VAC Allowable voltage fluctuation [V] Single phase 85 to 132 VAC Rated current [A] 0.9 3.0 5.0 1.5 2.6 Single phase 100 to 120 VAC (50/60 Hz) Single phase 200 to 230 VAC (50/60 Hz) Control power supply voltage [V] Control

Modular Design with Uniform Body Style

-D IS10L-40-m02-D IS10L-40-m03-D IS10L-40-m04-D IS10L-60-m04-D IS10L-60-m06-D IS10L-60-m10-D Pressure switch with L-shaped piping adapter*5, *6 IS10L-20-m01-D IS10L-20-m02-D IS10L-50-m04-D IS10L-50-m06-D p. 56 IS10E-40-m02-D IS10E-40-m03-D IS10E-40-m04-D IS10E-40-m06-D IS10E-60-m06-D IS10E-60-m10-D IS10E-60-m12-D IS10E-60-m14-D IS10E-20-m01-D IS10E-20-m02-D IS10E-20-m03-D IS10E-30-m02-D IS10E

Air Cylinder Series CA2

TY 4 x TT TD TH TF TS 4 x TR TA TL TU TU TY TC (mm) TD-H10 (Hole) Bore size (mm) TA TL TU TC TX TE TO TR TT TS TH TF TY Z Part no. 40 +0.070 0 80 60 10 102 85 119 17 9 17 12 45 60 62 93 15 CA2-S04 50 +0.070 0 80 60 10 112 95 129 17 9 17 12 45 60 74 103 15 CA2-S06 63 +0.070 0 100 70 15 130 110 150 20 11 22 14 55 73 90 107 18 80 +0.084 0 120 90 15 166 140 192 26 13.5 24 17 75 100 110 129 25

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

(When using 10-SS5Y-60-D, block disk is assembled on D side.) sheet. (When using 10-SS5Y-60-D, block disk is assembled on D side.)

Metal Seal/Rubber Seal Series VQ Body Ported

Note) 2 position single 1 2 Note) 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC G: Grommet C kit single only.

Air Cylinder Series CS1

204 162 45 115 70 48 17 18.5 20 41 35 39 111 M18 x 1.5 M40 x 1.5 to 1200 63 60 226 182 50 115 74 48 17 18.5 20 46 35 39 111 M20 x 1.5 M45 x 1.5 Lube Non-lube to 1200 1 71 67 277 225 60 140 86 60 20 23 25 56 M56 x 2 49 141 M24 x 1.5 41.5 to 1200 1 80 76 330 270 70 140 96 60 20 23 30 65 M64 x 2 49 146 M30 x 1.5 51.5 With Auto Switch: 125 to 200 Only (mm) (mm) With rod boot Without rod boot

Thermo-chiller

) Cooling capacity 50/60 Hz Note 3) kW 9.0/9.5 13.0/14.5 Heating capacity 50/60 Hz Note 4) kW 1.7/2.2 2.5/3.0 Temperature stability Note 5) 1.8 (1.0) Circulating uid system Rated ow 50/60 Hz (Outlet) Note 6) 11/14.8 gal/min (42/56 L/min) Maximum ow rate 50/60 Hz 14.5 to 17.9 gal/min (55/68 L/min) Maximum pump head 164 ft (50 m) Minimum operating ow rate 50/60 Hz Note 7) 7.4 to 11.0 gal/min

SYJ300/500/700

It is already built-in to the rectifier circuit. 50 60 100 VAC Hz 1 2 200 VAC Hz 50 60 50 60 110 VAC Hz [115 VAC Hz] 3 Electrical entry 50 60 50 60 50 60 DIN terminal D With connector 4 220 VAC Hz [230 VAC Hz] DO Without connector DC specifications of type "D" and "DO" is only available with 12 and 24 V DC. Power saving circuit is not available in the case of "D", "DO" type.

HRS100/150

Note 1) C 5 to 35 Cooling capacity 50/60 Hz Note 3) kW 9.0/9.5 13.0/14.5 Heating capacity 50/60 Hz Note 4) kW 1.7/2.2 2.5/3.0 Temperature stability Note 5) C 1.0 Circulating fluid system Rated flow 50/60 Hz (Outlet) Note 6) L/min 42/56 Maximum flow rate 50/60 Hz L/min 55/68 Maximum pump head m 50 Minimum operating flow rate 50/60 Hz Note 7) L/min 28/42 Tank capacity L 18 Circulating fluid

Vacuum Ejector Series ZM

80 120 80 Vacuum pressure Air consumption 70 105 70 Suction flow rate l/min (ANR) Air consumption l/min (ANR) Vacuum pressure kPa Vacuum pressure kPa 60 90 60 50 75 50 Suction flow rate 40 60 40 30 30 45 20 20 30 10 10 15 0 0 0 0.0 0.6 0.5 0.4 0.3 0.2 0.1 0 70 50 60 30 40 20 10 Flow rate l/min (ANR) Supply pressure MPa Exhaust Characteristics/Flow Characteristics, Standard

Air Cylinder Series MB

Z B TA TL TU TC TX TE TO TT TR TS TH TF TDH10 MB-S03 32 40 50 63 80 100 125 32 40 50 63 80 100 125 +0.070 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 +0.084 0 +0.084 0 47 60 60 80 80 100 115 46 52 65 75 95 114 136 45 60 60 70 70 90 105 8.5 10 10 15 15 15 18.5 62 80 92 110 130 158 186 50 63 75 90 110 132 160 74 97 109 130 150 184 212 12 17 17 20 20 26 26 13 17 17 22 22 24 24 10 12 12 14 14 17 25

7ND9071en

C -40 to +75 C -40 to +85 C ND9_E2/I02 -40 to +60 C -40 to +75 C -40 to +85 C ND9_E2/I09 -25 to +60 C -25 to +75 C -25 to +85 C ND9_E2/I32 -25 to +60 C -25 to +70 C -25 to +70 C ND9_E2/D33 -40 to +60 C -40 to +75 C -40 to +82 C ND9_E2/D44 -40 to +60 C -40 to +75 C -40 to +82 C ND9_E2/I45 -25 to +60 C -25 to +75 C -25 to +85 C ND9_E2/K05 -40 to +60 C -40 to +75 C -40 to +85 C ND9_E2/IK06

Modular F.R.L. Unit

Description Symbol Description Applicable model Model combination AC20 to 60 AC20 to 60 AC20 to 60 AC20 to 60 AC25 to 60 AC20 AC25 to 60 AC20 to 60 AC20 to 60 1 Note 8) 0.02 to 0.2MPa setting Combination 2 3 6 8 C J Note 9) Metal bowl Symbol Filter Regulator Mist Separator Regulator Air filter Lubricator Lubricator with drain cock Nil A B C D w q e Nylon bowl (including sight dome) w q

Proposals for Energy Saving

DC 99 100 60 40 40 60 80 60 -10 Note 2) 60 40 1 AC DC AC, DC Note) Surge voltage suppressor is attached to the lead wire. Maximum Minimum -10 -5 Note 3) Note 1) D.E.N.P., etc., inside ( ) indicate option codes. Note 2) Dew point is -10C or below.

Table of Contents

YES Hysteresis mode OFF n_1 n_2 Large pressure and vacuum pressure [n] H (Fix hysteresis) = 3 digits H H ON Window comparator mode NO OFF n_1 n_2 Large pressure and vacuum pressure 16-2-30 7 Series ZSE50F/ISE50 High Precision, Digital Pressure Switch for General Fluids Example of Internal Circuit and Wiring ZSE F/ISE --22(L)-(M) 50 60 50 60 ZSE F/ISE --30(L)-(M) 50 60 50 60 With analog