Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Elbow/Universal Type Flow rate and effective area AS221FM-02 AS221FM-01 Model AS121FM-M5 AS231FM-02 AS231FM-01 AS131FM-M5 3.2, 4, 6 6, 8 Metric sizes 3.2, 4 8, 10 4 6 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" Inch sizes 1/8", 5/32" 5/32" 3/16" l/min (ANR) {Nl/min} 38 7 Flow rate 12 Controlled flow Effective area mm 0.6 0.2 0.1 l/min (ANR) {Nl/min} 230 Flow rate

Digital Flow Switches, Series PF2A, Series PF2W

How to Order Integrated Display Type PF2A7 10 01 27 Flow rate range Thread type Unit specification 1 to 10l/min 5 to 50l/min 10 to 100l/min 20 to 200l/min 50 to 500l/min 10 50 11 21 51 Nil M Wiring specification With unit switching function Fixed SI unit Note) Nil N F Rc NPT G 3m lead wire with connector Without lead wire Nil N Note) Fixed units: Real-time flow rate: l/min Accumulated flow

Digital Flow Switches Series PF2A

How to Order Integrated Display Type M PF2A7 10 01 27 Flow rate range 1 to 10 l/min 5 to 50 l/min 10 to 100 l/min 20 to 200 l/min 50 to 500 l/min 10 50 11 21 51 Thread type Unit specification Nil M With unit switching function Fixed SI unit Note) Nil N F Lead wire (Refer to page 35.)

Digital Flow Switch Series PFA For Air Series PFW For Water

Fluid velocity detection element Application examples Flow control of cooling water for welding gun Flow control of high frequency electric power supply cooling water, for wafer temperature regulation Flow control of N2 gas to prevent detection camera shimmering and lead frame oxidation Features 2 For Air For Air Digital Flow Switch Series PFA How to order Integrated display type PFA7 10 01

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

Class 3 Class 2 Symbol 01 02 03 04 06 1 2 3 4 36 100VAC 200VAC 110VAC 220VAC 230VAC Orifice size Class 3 Class 4 Class 2 Orifice diameter 2mm 3mm 4mm 5mm 7mm 10mm Symbol 2 3 4 5 7 10 Electrical entry CConduit GGrommet Refer to the table below for orifice and port size combinations.

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

OUT port size Material Symbol 01 02 Port size 1/8 (6A) 1/4 (8A) Stations Symbol Nil S Material Brass Stainless steel D side U side 1 2 3 4 5 n 02 : 10 2 stations : 10 stations All IN ports are 3/8. Refer to the L dimension table on page 7 regarding the maximum number of stations.

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

OUT port size Material D side U side 1 2 3 4 5 n Symbol 01 02 Port size 1/8 (6A) 1/4 (8A) Stations Body material C37 Symbol Nil H Seal material FKM FKM 02 : 10 2 stations : 10 stations Stainless steel All IN ports are 3/8. Refer to the "L" dimensions on page 6 regarding the maximum number of stations.

/4" 5/8" to 3/4" Weight, lbs (kg) 46.3 (21) 49.6 (22.5) 81.6 (37) Dimensions, LxWxH, in (mm) 18.2x6.1x9.1 (463x157x230) 18.2x6.1x9.1 (463x157x230) 22.4x8.1x11.4 (569x206x289) Pump with Explosion Proof Motor, 115V/208-230V, 60 Hz, 1 Phase, cUL Listed. 3046E-01 3086E-01 3166E-01

(mm)Connection threadsModel Elbow typeUniversal type Meter-outMeter-inMeter-outMeter-in4R 1/8AS2201FG-01-04AS2211FG-01-04AS2301FG-01-04AS2311FG-01-04

(mm)Connection threadsModel Elbow typeUniversal type Meter-outMeter-inMeter-outMeter-in4R 1/8AS2201FG-01-04AS2211FG-01-04AS2301FG-01-04AS2311FG-01-04

(mm)Connection threadsModel Elbow typeUniversal type Meter-outMeter-inMeter-outMeter-in6R 1/8AS2201FG-01-06AS2211FG-01-06AS2301FG-01-06AS2311FG-01-06

(mm)Connection threadsModel Elbow typeUniversal type Meter-outMeter-inMeter-outMeter-in6R 1/8AS2201FG-01-06AS2211FG-01-06AS2301FG-01-06AS2311FG-01-06

GD40-2-01

ID Main Parts Material Accessory Case Internal part Window Scale plate Zinc die-casted Brass, Phosphor bronze Polyester Stainless steel Nylon tube Male connector Male elbow T0425 (0.5 m) H04-01 (1 pc.) DL04-01 (1 pc.) IDG AMG Specific Product Precautions AFF AM Be sure to read before handling.

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output

Micro-Mist Separator with Prefilter Series AMH

:l 3/86 female thread Maintenance l--I space ~ Drain H I I Dimensions with mounting bracket Model Port size A B C D E F G I J 1 K 1 L 1 MI N I 01 P I 01 RI s B AMH850 11 /2 , 2 460.5 42 348 220 57.5 220 10 463.51 180 I 30 I 15 I 24 I 13 1120 1184 1 220 1110 1 18 I 6 6 SeriesAMH Made to Order Specifications ICD With Differential Pressure Gauge (GD40-2-01) I@ With IN-OUT Flange For ease of

MR Unit (Regulator with Mist Separator) AMR3000 to 6000 Series

G36-10-01) indicates thread. Specify no symbol for Rc, and N for NPT. Please consult with SMC if NPT gauge is required. Note 6) Use caution not to tighten excessively when mounting a pressure gauge, otherwise it may result in a breakdown. Use a sealant tape for sealing. Note 7) Piping adapter, O-ring, Hexagon socket bolt, Hexagon socket bolt assembly.

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Optional Parts ARP20(K) ARP30(K) ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G36-4-01 G46-4-02 Round type Note 2) 0.4 MPa Square embedded type Note 3) GC3-4AS [GC3P-010AS (Pressure gauge cover only)] G36-2-01 G46-2-02 Round type Note 2) 0.2 MPa Square embedded type Note 3) GC3-2AS [GC3P-010AS (Pressure gauge cover

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Optional Parts ARP20(K) ARP30(K) ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G36-4-01 G46-4-02 Round type Note 2) 0.4 MPa Square embedded type Note 3) GC3-4AS [GC3P-010AS (Pressure gauge cover only)] G36-2-01 G46-2-02 Round type Note 2) 0.2 MPa Square embedded type Note 3) GC3-2AS [GC3P-010AS (Pressure gauge cover

AR Series Modular Type Regulator

Nq Body size 10 20 25 30 40 Symbol Description Nw Pipe thread type Nil Metric thread (M5) V Rc V V V V N NPT V V V V F G V V V V + M5 M5 V 01 1/8 V 02 1/4 V V V V 03 3/8 V V V 04 1/2 V 06 3/4 V + Ne Port size a Mounting Nil Without mounting option V V V V V B Note 2) With bracket V V V V V H With set nut (for panel mount) Note 3) V V V V V + Option Note 1) Nr Nil Without pressure gauge

AZ1000

2PW Delivery pressure Bonnet option Code Delivery pressure 100 mm Hg absolute to 10 psig (-88 kPa to 0.07 MPa) Code Bonnet Standard Panel installation 4) No code P BP 01 Bonnet port (NPT 1/8 inch) 4) Panel mounting hole: dia. 1.56 inch (39.6 mm).