Mounting: B (Through-hole/Both Ends Tapped Common, Basic), Bore Size: Ø32 mm, Port Thread: M thread: ø12 to ø25, Rc: 32 to 63, Clamp Stroke: 10 mm, Rotary Direction: R (Clockwise), Body Option: N (w/Arm), Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: SDPC (0.5m Cord Length, M12-4 Pin Connector)

Size: 1/2, Reverse Flow: Regulator w/Backflow Mechanism, Thread: M Thread, Rc(PT), Port Size: 3/4, Accessory: None, Option 1: None, Option 2: R+Y

Size: 1/8, Reverse Flow: Regulator w/Backflow Mechanism, Thread: M Thread, Rc(PT), Port Size: 1/4, Accessory: None, Option 1: 0.02~0.2MPa Setting, Option 2: R+Y

Size: 1/8, Reverse Flow: Regulator w/Backflow Mechanism, Thread: M Thread, Rc(PT), Port Size: 1/4, Accessory: Bracket, Option 1: 0.02~0.2MPa Setting, Option 2: R+Y

Size: 1/8, Reverse Flow: Regulator w/Backflow Mechanism, Thread: M Thread, Rc(PT), Port Size: 1/4, Accessory: B+G, Option 1: 0.02~0.2MPa Setting, Option 2: R+Y

Series: CKZ3N, Bore Size: 50mm, Cylinder Port: TF (G), Arm Opening Angle: 105 (105°), Arm Position: D (Both Sides), Proximity Switch: W (None), Metal Switch Cassette Cover: C (w/Metal Switch Cassette Cover), Front Mounting: F (Yes), Top Cover: M (Metal Cover), Option: X2568 (w/Manually Operated Handle), Handle Mounting Position: R (Right Side Mounting)

I

nder With rMMI hqnge NOtes m handle are not exch6nb(e to OCPOslte DOSlllOn. er toFICi.1 ror shape a caY19Cter on nancie. ,/%-' /,V/ /",://' -'ij,' . >,;--7r-',, ( \ /%,' \/' ,'\_ \ ' ---' Ar. 1 IIMCCoipiiajlcir . "'I

Water Strainer

Description Material Part number 100 mesh 70 mesh 50 mesh 25 mesh 3 Element Stainless steel 11366 11366-1-1 11366-2-1 11366-3-1 Safety Instructions Be sure to read the Handling Precautions for SMC Products (M-E03-3) and Operation Manual before use.

Water Regulator

Description Material Part number 4 Valve Stainless steel/NBR 1349173-5 Rc (NPT)1/8, 1/4 Gauge port size Safety Instructions Be sure to read the Handling Precautions for SMC Products (M-E03-3) and Operation Manual before use.

Slit Valve

0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

Compact and

Safety Instructions Be sure to read the Handling Precautions for SMC Products (M-E03-3) and Operation Manual before use.

Type of Actuation: 3 (3 Position Closed Center), Manifold Type: 40 (Base Mounted), Pilot: R (External Pilot), Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: MO (M Plug w/o Connector), Lead Wire Length: None, Surge Suppressor: U (Surge Suppressor w/Light Non-polar)

Body Size: 30, Back Flow: w/o Backflow, Thread: N (NPT), Port Size: 03 (3/8), Options: DM (D+M), Set Pressure: 0.05 to 0.85 MPa Setting, Bowl: 6 (Nylon Bowl), Bowl Guard: None, Drain Port: w/Drain Cock, Exhaust Mechanism: Relieving Type, Flow Direction: R (Flow Direction: Right to Left), Drain Cock w/Barb Fitting: None, Pressure Units: Z [Product: psi, °C; Pressure Gauge: psi (and MPa)]

IN20267

M Ethernet/IP PC Personal Computer. P PLC Abbreviation for Programmable Logic Controller. A digital computer/controller used for automation of electromechanical processes. R Reboot Unless otherwise noted, the term reboot in this document means that the MPC must be power cycled. The specified position which the MPC has been directed to maintain.

Exhaust Cleaner for Vacuum Pump AMV Series

Size (Applicable vacuum pump) 100 (4B) JIS 10K FF flange Symbol Max. exhaust speed (L/min) 3 6 15 37 75 160 360 650 1,500 3,700 7,500 16,000 Specifications Oil mist removal Filtration Maximum operating temperature 99.5% or more 0.3 m (Trapping efficiency: 95%) 80C Model Model Connection R Max. air flow (L/min [ANR]) Applicable vacuum pump Max. exhaust speed (L/min) Weight (kg) Oil accumulation

Manifold Regulator ARM1000/2000 Series

52 66 P 9 11.5 Q 11.5 16.5 R 4.8 4.8 A 4.5 4.5 B 25 34.5 ARM1000 ARM2000 IC ITVH Dimensions by the Number of Stations Manifold stations (n) ITVX Model Symbol 1 36 27 48 39 2 55 46 76 67 3 74 65 104 95 4 93 84 132 123 5 112 103 160 151 6 131 122 188 179 7 150 141 216 207 8 169 160 244 235 9 188 179 272 263 10 207 198 300 291 L1 L2 L1 L2 ARM1000 PVQ ARM2000 VY1 VBA VBAT AP100 753

Manifold Regulator Modular Type ARM2500/3000 Series

Bonnet Common IN Individual IN Common IN Individual IN Polyacetal 2 Regulator Regulator ARM2500-A-02 ARM2500-B-02 ARM3000-A-03 ARM3000-B-03 9 1 Replacement Parts End plate R 10 1 Description Material Part no. End plate L 11 1 No.

Rated Vacuum Range: -101 to 0 kPa, Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: C4L (ø4 One-touch Fitting, Elbow Type), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 01 (R 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: None, Operation Manual: Y (w/o Operation Manual, w/o Calibration

Rated Vacuum Range: -101 to 0 kPa, Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: C6L (ø6 One-touch Fitting, Elbow Type), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: B (Panel Mount Adapter)