End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

1 Lube with single end lock CBA1-63A-PS CBA1-50A-PS CBA1-40A-PS CBA1-80A-PS CBA1-100A-PS Cushion valve 2 Rolled steel Electroless nickel plated !2 MXP Non-lube with single end lock Quenching, Hard chrome plated CBA1N63A-PS CBA1N50A-PS CBA1N40A-PS CBA1N80A-PS CBA1N100A-PS Lock piston 1 Carbon steel !

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

1 Lube with single end lock CBA1-63A-PS CBA1-50A-PS CBA1-40A-PS CBA1-80A-PS CBA1-100A-PS MGG 2 Cushion valve Rolled steel Electroless nickel plated !2 Non-lube with single end lock Quenching, Hard chrome plated CBA1N63A-PS CBA1N50A-PS CBA1N40A-PS CBA1N80A-PS CBA1N100A-PS 1 Lock piston Carbon steel !

0.4

VQ2000 Caution Applicable tubing 3.2 Applicable tubing 4 Applicable tubing 6 Applicable tubing 8 M5 Applicable tubing 1/8" VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 A B A B A B VVQ1000-50A-M5 VVQ1000-50A-N1 VVQ1000-50A-N3 VVQ1000-50A-N7 B A Applicable tubing 5/32" VVQ1000-51A-N3 VVQ1000-51A-N7 VVQ1000-51A-N9 Applicable tubing 1/4" Applicable

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

SY3000 VVQ1000-50A-C4 SY5000 VVQ1000-51A-C4 Port size Series 4 One-touch fitting 6 One-touch fitting VVQ1000-50A-C6 VVQ1000-51A-C6 8 One-touch fitting VVQ1000-51A-C8 Note 1) Fitting assemblies for P and R ports cannot be changed.

5 Port Solenoid Valve Series VQZ1000/2000/3000

Entry is the same as standard products. 933 Series VQZ Replacement Parts Body Ported One-touch Fitting Assembly (for Cylinder port) Fitting size C3 C4 C6 C8 C10 Model VQZ1000/2000 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VQZ3000 VVQ1000-51A-C6 VVQ1000-51A-C8 VVQ1000-51A-C10 Note) Purchasing order is available in units of 10 pieces.

Base Mounted Metal Seal/Rubber Seal Series VQ

VQ1000 Bore 3.2 VVQ1000-51A-C3 VVQ1000-51A-C4 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 Applicable tubing 3.2 Applicable tubing 4 Applicable tubing 6 M5 Locking type (Manual) VQ0 Refer to Option on pages 2-4-208 to 2-4-211 for other types of fittings.

IDX-OM-X011

Earth leakage breaker specification IDF190/ 240D-3-R Breaker capacity: 50A Sensitivity current 30mA [IDF190/ 240D-9] does not have option R. It is necessary for customer to purchase the earth leakage breaker applicable for the primary side voltage.

VZ3000

Note C4: A, B port with One-touch fitting for 4 C6: A, B port with One-touch fitting for 6 SUP/EXH block assembly Description Manifold block assembly D side C4 C6 VZ3000-50A-2q P/R port with One-touch fitting for 8 For D side For U side VZ3000-51A-2 VZ3000-52A-2D w e End block assembly End block assembly DIN rail VZ3000-52A-2U r How to Increase Manifold Base Station expansion is possible

0.4

VQC1000 VQC2000 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 VVQ1000-51A-N3 VVQ1000-51A-N7 VVQ1000-51A-N9 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 VVQ1000-50A-N1 VVQ1000-50A-N3 VVQ1000-50A-N7 3.2 4 6 8 M5 1/8" 5/32" 1/4" 5/16" Light Surge absorbing diode Light Note 1) A-side energized: Light (orange) ON B-side energized: Light (green) ON With miswiring prevention

0.4

VQ2000 Caution Applicable tubing 3.2 Applicable tubing 4 Applicable tubing 6 Applicable tubing 8 M5 Applicable tubing 1/8" Applicable tubing 5/32" Applicable tubing 1/4" Applicable tubing 5/16" VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 A B A B VVQ1000-50A-M5 VVQ1000-50A-N1 VVQ1000-50A-N3 VVQ1000-50A-N7 A B B A VVQ1000-51A-N3 VVQ1000-51A-N7 VVQ1000

Table of Contents

VQ1000 VQ5 VVQ1000-50A-C3 Applicable tubing 3.2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VVQ1000-50A-C4 Applicable tubing 4 VQZ VVQ1000-50A-C6 Applicable tubing 6 Purchasing order is available in units of 10 pieces. Caution VQD 1.

Compact Manifold Regulator Series ARM5

L dimension 31 398 32 410.5 33 423 34 435.5 35 448 36 460.5 37 473 38 485.5 39 498 40 510.5 One-touch Fittings for Centralized Supply Block One-touch Fittings for Regulator Block VVQ1000 50A C4 VVQ1000 51A C6 One-touch fittings for centralized supply block Fitting type One-touch fittings for regulator block Nil L1 Fitting type Straight Nil L1 Straight Elbow Elbow Fitting size Fitting size

Compact Manifold Regulator

SMC 62 Through hole for M3 3.2 SMC K P U C S O H L 7 26 (Max. 28) 12 7 IN OUT 12 Panel cutout dimensions 28 ARM10F1-06GPC 08GPC 4 x R1 or less 28 to 28.5 IN OUT 38 58 34 23 20 Plate thickness: Max. 2.1 30 15 6 OPEN 34 14 0.6 0.4 0.2 0.8 1 0 MPa 62 SMC P K U C S O H L 7 26 (Max. 28) 7 IN OUT 12 744 Regulator/Single Unit Type Options Pressure Gauge One-touch Fittings for Regulator VVQ1000-50A

Metal Seal/Rubber Seal Series VQ Body Ported

VVQ1000-50A-C3 Applicable tubing 3.2 VVQ1000-50A-C4 Applicable tubing 4 VVQ1000-50A-C6 Applicable tubing 6 Purchasing order is available in units of 10 pieces. Caution 1. Protect O-rings from scratches and dust to prevent air leakage. 2. The tightening torque for inserting fittings to the M5 thread assy should be 0.8 to 1.4 Nm.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Metric size Inch size 3 SY3000 5 SY5000 7 SY7000 9 SY9000 Rc Nil 5 32" F G One-touch fitting for 4 VVQ1000-50A-C4 VVQ1000-50A-N3 One-touch fitting for SY3000 SY3000 1 4" N VVQ1000-50A-N7 One-touch fitting for 6 VVQ1000-50A-C6 NPT One-touch fitting for 5 32" NPTF T One-touch fitting for 4 VVQ1000-51A-C4 VVQ1000-51A-N3 One-touch fitting for A, B port size SJ Except for M5 1 4" One-touch

CE2

Bore size (mm) 80 NLP-80A PDU-25Z PSD-33 x 25 P75 DSM-30 CA80-1609 CA80-1604 P5 Description Material No. 40 NLP-40A PDU-16Z PSD-22 x 16 P44 DSM-20 CA40-1606 CA40-1601 P3 50 NLP-50A PDU-20Z PSD-27 x 20 P50 DSM-25 CA63-1608 CA50-1602 P3 63 NLP-63A PDU-20Z PSD-27 x 20 P60 DSM-25 CA63-1608 CA63-1603 P3 100 NLP-100A PDU-30Z PSD-38 x 30 P90 DSM-35 CA100-1610 CA100-1605 P5 Piston seal Rod seal A

CE2

Description Material 40 NLP-40A PDU-16Z PSD-22 x 16 P44 DSM-20 CA40-1606 CA40-1601 P3 50 NLP-50A PDU-20Z PSD-27 x 20 P50 DSM-25 CA63-1608 CA50-1602 P3 63 NLP-63A PDU-20Z PSD-27 x 20 P60 DSM-25 CA63-1608 CA63-1603 P3 100 NLP-100A PDU-30Z PSD-38 x 30 P90 DSM-35 CA100-1610 CA100-1605 P5 Piston seal Rod seal A Rod seal B Brake piston seal Cushion seal Piston gasket Tube gasket Cushion valve seal

HEC-OM-R008

. (+/10%), 50/60Hz Current consumption Max.5A(100V) Max.9A(100V) Max.4A(240V) Max.10A(100V) Max.4A(240V) Max.8A (200V) Max.2.5A(240V) Inrush current 50A or less Over current protection 10A 14A Do not modify or reconstruct the unit.

ARM10/11

L 31 398 32 410.5 33 423 34 435.5 35 448 36 460.5 37 473 38 485.5 39 498 40 510.5 IC VBA One-touch Fittings for Regulator Block One-touch Fittings for Common Supply Block VE VVQ1000 50A C4 VVQ2000 51A C6 VY1 G Fitting type Fitting type One-touch fittings for regulator One-touch fittings for regulator block Nil L1 Straight Nil L1 Straight PPA Elbow Elbow AL Fitting size Fitting size C4 C6

ARM10/11

L 31 398 32 410.5 33 423 34 435.5 35 448 36 460.5 37 473 38 485.5 39 498 40 510.5 IC VBA One-touch Fittings for Regulator Block One-touch Fittings for Common Supply Block VE VVQ1000 50A C4 VVQ2000 51A C6 VY1 G Fitting type Fitting type One-touch fittings for regulator One-touch fittings for regulator block Nil L1 Straight Nil L1 Straight PPA Elbow Elbow AL Fitting size Fitting size C4 C6