. / N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: H (Digital Pressure Switch for Vacuum / -100 to 100 kPa / PNP 2 Outputs), Connector: C [Common Wiring (plug-in) - w/o Lead Wire with Connector - w/ Lead Wire with Connector for Pressure Switch/sensor], Vacuum, V Port: 07 [ø1/4 One-touch Fitting (Inch)], Bracket: w/o Option, Individual Release Pressure Supply: w/o Option, Vacuum Break Flow

Stations: 07 (Stations), Wiring: L (Individual Wiring or None), Manifold Options: B (with DIN Rail Mounting Bracket), Exhaust: C (Complex Exhaust), Pressure Switch for Vacuum/Pressure Sensor: H (Digital Pressure Switch for Vacuum, -100 to 100, PNP 2 Outputs, with Unit Selection Function), Leadwire: L (Standard Leadwires, X2), Unit Options: without Option, 1st Nominal Nozzle Size: 2 (ø1.0)

. / N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: K (Digital Pressure Switch for Vacuum with Energy Saving Function / 100 to -100 kPa / NPN 1 Output), Connector: W (With Lead Wire for Switch with Energy Saving Function), Vacuum, V Port: 07 [ø1/4 One-touch Fitting (Inch)], Bracket: w/o Option, Individual Release Pressure Supply: w/o Option, Vacuum Break Flow Adjustment: J (Vacuum Break

. / N.C.), Rated Voltage: 5 (24 VDC), IO-Link compatible vacuum pressure switch: 5 (-100 to 100 kPa, w/ Unit Selection, w/Energy Saving), Connector: H (300mm Lead wire with M12 connector for IO-Link), Vacuum, V Port: 07 (ø1/4 One-touch Fitting, Inch), Bracket: w/o Option, Individual Release Pressure Supply: w/o Option, Vacuum Break Flow Adjustment: K (Vacuum Break Flow Adjustment Needle Screwdriver

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 0 (Meter-out), Model: 1FS, Thread: R (or None), Port Size: U10/32 (10-32UNF), Width Across Flats: E (8mm), Applicable Tubing: 07 (ø1/4"), Seal: without Sealant

Number of Ports: 3 Port, Body Option: U (w/Bottom Mouinting Thread), Port Size: 02 (R 1/4), Actuator Type: 07 (Cross Roller Plunger), Suffix: None

.: 07 (1/4"), Port Size/Applicable Tube: N03 (3/8" Thread)

Body Class: 2 (Orifice Dia. ø4), Applicable Tubing Size: 07 (1/4" x 5/32"), Material: F (Body: PFA; End Plate: PVDF; Diaphragm: PTFE; Seal, Buffer: FKM)

AS-FPQ/AS-FPG

Metric sizes Type 04 06 08 10 12 4 6 8 10 12 2 Elbow Control type 0 1 Meter-out Meter-in Port size M5 01 02 03 04 M5 x 0.8 1/8 1/4 3/8 1/2 With One-touch fitting Clean specifications Metal parts material Q G Brass (electoless nickel plated) Stainless steel 304 Needle Valve/Flow Characteristics AS121FP-M5 AS221FP-01 AS221FP-02 08,10 06,08 06 04 04 AS321FP-03 AS421FP-04 12 10 10,12 08 06 15

Series HAW Water Cooled Aftercooler 1

HA Accessory (Option) AT HAW2 HAW7 HAW22 HAW37 HAW55 HAW75 HAW110 Applicable model Screw flange (With companion flange) HAWF-141 HAWF-142 HAWF-200 HAWF-200 ID Auto-drain AD402-04 AD600-06 AD600-10 AMG Model Selection (Flow Capacity l/min (ANR)) AFF HAW2-04 HAW7-06 HAW22-14 HAW37-14 HAW55-20 HAW75-20 HAW110-30 Model 1000 70C 100C 180C 50C 2000 6000 12000 15000 22000 30 Inlet air temperature

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com D-H7 D-G59F 5 5 5.5 6 7 7.5 8 7.5 D-B5/B6 BA -04 BA -05 BA -06 BA -08 BA -10 BA -32 BA -02 BA -01 CX D-G5NBL 35 40 45 45 45 40 50 45 D-G5/K5 D-B7/B8 BM1 -01 BM1 -02 BM1 -32 BM1 -04 BM1 -05 BM1 -06 Since this is a guideline including hysteresis, not meant

MNB

Auto Switch Mounting Bracket Part No. 32 40 50 63 80 100 Auto switch model Bore size (mm) Bore size (mm) 40 32 50 63 80 100 Foot (1) MNB-L06 MB-L03 MB-L04 MB-L05 MB-L08 MB-L10 D-A5/A6 D-J5/F59F Flange MNB-F03 MNB-F04 MNB-F05 MNB-F06 MB-F08 MB-F10 BT-03 BT-03 BT-05 BT-05 BT-06 BT-06 Single clevis MB-C08 MB-C10 MB-C03 MB-C04 MB-C05 MB-C06 D-A3/A44 D-G39/K39 BMB2 -032 BMB2 -040 BMB1 -050 BMB1

25

One-touch fitting 06 08 10 6 One-touch fitting 8 One-touch fitting 10 One-touch fitting Power supply cable Refer to the table below for selection of One-touch fittings.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

80 9 90 Symbol Valve type Symbol Body material Size 30 40, 50, 60 70, 80, 90 C Brass V V S Stainless steel V V B Bronze V A Aluminum V 2(OUT) 1 N.C. 1(IN) r Seal material t Port size i Electrical entry Symbol Seal material N NBR F FKM E*1 EPDM Symbol Connection Port size Size 30 40 50 60 70 80 90 02 Symbol Electrical entry CE/UKCAcompliant UL Standards 1/4 V 03 3/8 V V 04 1/2 V V 06

Air cooled Thermo-con (Compact type)

Request message to read (from master) 02 30 31 52 50 56 31 03 65 Request to read Address BCC data End code Identification code Start code Response message from the product 02 30 31 06 50 56 31 30 30 32 35 30 03 06 Address Start code BCC data Affirmation code End code Numerical data Identification code Code Symbol/Data ASCII code Start code STX 02H Address 01 30H 31H Required content R

Air cooled Thermo-con (Compact type)

Request message to read (from master) 02 30 31 52 50 56 31 03 65 Address BCC data End code Request to read Start code Identification code Response message from the product 02 30 31 06 50 56 31 30 30 32 35 30 03 06 Address BCC data End code Start code Numerical data Affirmation code Identification code Code Symbol/Data ASCII code Start code STX 02H Address 01 30H 31H Required content R

MNB

Auto Switch Mounting Bracket Part No. 32 40 50 63 80 100 Auto switch model Bore size (mm) Bore size (mm) 40 32 50 63 80 100 Foot (1) MNB-L06 MB-L03 MB-L04 MB-L05 MB-L08 MB-L10 D-A5/A6 D-J5/F59F Flange MNB-F03 MNB-F04 MNB-F05 MNB-F06 MB-F08 MB-F10 BT-03 BT-03 BT-05 BT-05 BT-06 BT-06 Single clevis MB-C08 MB-C10 MB-C03 MB-C04 MB-C05 MB-C06 D-A3/A44 D-G39/K39 BMB2 -032 BMB2 -040 BMB1 -050 BMB1

SL5200

MPa) Sub-atmospheric (A): 100 mm Hg absolute to 10 psig (-88 kPa to 0.07 MPa) Code Range options 1) Specification Code Ports 2 ports 3 ports Standard (Cv: 0.07) Code Specification Standard Sub-atmospheric 2PW 3PW No code 01 No code A High flow (Cv: 0.15) HF 1) Only available with SL5201. 0.5 to 30 psig (0.0034 to 0.2 MPa) 1 to 60 psig (0.007 to 0.4 MPa) 1 to 100 psig (0.007 to 0.7 MPa) 02 06

3 Port Air Operated Valve Series SYJA300 1

Thread type Nil Rc F G N NPT T NPTF 04 1/2 06 3/4 10 1 SA VA JIS Symbol VM N.C. N.O. Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Specifications VR Operating type Air operated type Type of actuation N.C./N.O.

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

For details, please contact SMC. 3-11-17 18 Manifold Specifications Standard Specifications ISO Size 1 ISO Size 2 ISO Size 1 Maniflod block size VSR/S8-6 VSR/S8-8 VSR/S8-6 Applicable solenoid valve 1 to 10 Number of stations 1/4, 3/8, 1/2, 3/4, 1 A, B port Port size 1/4, 3/8, 1/2, 3/4, 1 P , EA, PB port VV82-P-03/04/06 VV81-P-02/03/04 Individual SUP spacer VV82-R-03/04/06 VV81-R-02/03/04