Square Tube Type Air Cylinder Series MB1

Stroke S + Stroke H A F N N C B Cylinder tube sectional view B-B' Width across flats Stroke range Bore size (mm) Effective thread length C B G F E A H ZZ W V S P N MM J MB 32 40 50 63 80 100 32.5 38 46.5 56.5 72 89 13 14 15.5 16.5 19 19 13 13 14 14 20 20 30 35 40 45 45 55 46 52 65 75 95 114 22 30 35 35 40 40 47 51 58 58 72 72 135 139 156 156 190 190 6.5 9 10.5 12 14 15 4 4 5 9 11.5 17 84

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

OFF n-1 n-2 Error correction Real-time flow rate Window comparator mode H : Hysteresis For PF2D300/301 Note 2) "n" H H LED display Contents Solution ON Check the load and the wiring for OUT1. A current of more than 80 mA is flowing to OUT1. NO OFF n-2 n-1 Real-time flow rate Check the load and the wiring for OUT2. A current of more than 80 mA is flowing to OUT2.

IDX-OM-W011

13-1 IDF1E15E1-10 IDF Series 13-1 13-1 IDX-OM-W011 13.S 13-2 IDF1EIDF3E L N PE M3 6.5mm 2 1.25mm IDF4E15E1 L N PE M3 6.5mm 2 1.25mm 13-3 1-1 IDF Series 13-2 13-2 I D XO M W 011 14 T 14 T I D F4E/6E/8E/11E/15E1 141 I EC 142 AC200V / 2A D C24V / 2A ( 20V / 5m A) 143 O N 3 ( ) 5 /1 ( ) I D F Seri es 141 14 1 I D XO M W 011 14 T 144 PE 1 2 3 LN PE PE: L N:

Compact

1 1 2N q w e r t y u i o !

HRX-OM-R005

HRS 20 A 060 Cooling capacity Option 060 4900W/5900W (50/60Hz) Null None B Earth leakage breaker Cooling method J Automatic water-supply A Air-cooled refrigerator type M Pure water piping W Water-cooled refrigerator type W Fixed SI unit(1) 1) Unit : MPa/ (degree Celsius) Piping thread type Null Rc Power supply F G (PT-G conversion fitting is included) 20 1-phase AC200 to 230V(50/60Hz) N NPT

Compact

2-wire 12 V M9BWV M9BW Diagnostic indication (2-color indicator) Relay, PLC Yes Grommet 24 V 3-wire (NPN) 5 V, 12 V M9NAV*1 M9NA*1 IC circuit 3-wire (PNP) M9PAV*1 M9PA*1 2-wire 12 V M9BAV*1 M9BA*1 *1 Water resistant type auto switches are mountable on the above models, but SMC cannot guarantee water resistance.

Support Guide/11-LEFG Series

Environment Clean Room Specification ISO Class 4*1 (ISO14644-1) Built-in vacuum piping Possible to mount the main body without removing the external cover etc. Body-integrated linear guide specification *1 Changes depending on the suction flow rate.

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_~M~a~jo~r~D~im~e~n~s~io~n~s~_ ___ (mm) Clamp Cylinder: Series CK1 SpCpd controller Cushion valve N s-t-Strok.e ___ _ -, ...!t ,r' M -1 6X 1. 5 \ ~~-.~. . I~r ~ 1~ -~ -~t l -,? ~ . ~ I 'S " .. ! /'Vvf..>---'---r-'-~ /i . -l ,~ -0 I .. .i ~ l d1h across flatsl]" 4M6 Screw depth 1 3 ~J:"!-~/ _ H _ O _ '"_ ' _ ' 2 -.< ",, ' +"."

VXA21/22

Refer to table w if ordering bracket separately. Thread T F N Orifice size 2 3 4 5 6 Rc(PT) NPTF G(PF) NPT 3mm 4.5mm 6mm 8mm 10mm Refer to table q for configuration. Port size 01 02 03 04 1 8 1 4 Valve/Body 0 2 Normally closed (N.C.)/single unit Normally open (N.O)/single unit 3 8 1 2 Refer to table q for configuration.

Series: VQ2000, IN Port Size: C8 (One-touch Fitting for ø8), OUT Port Size: C8 (One-touch Fitting for ø8), Option: F (Bracket)

Series: VQ2000, IN Port Size: C8 (One-touch Fitting for ø8), OUT Port Size: C8 (One-touch Fitting for ø8), Option: F (Bracket)

Series: VQ2000, IN Port Size: C8 (One-touch Fitting for ø8), OUT Port Size: C8 (One-touch Fitting for ø8), Option: D [DIN Rail Mounting Style (for Manifold)]

Series: VQ2000, IN Port Size: C8 (One-touch Fitting for ø8), OUT Port Size: C8 (One-touch Fitting for ø8)

Series AP3100

1/4 turn lever knob 6) Pull twist knob 8) Multi turn round knob (1 1/2 turn) Knob Option (Part number: AP PL227) 9) Operational Safety Device (OSD) N/A N/A Standard Option (Part number: AP PL225) 9) LOTO (Lockout) 6) Optional lever color available.

Heavy Duty Stopper Cylinder Series RSH/RS1H

6 i @7 @1 #2 @9 @6 @4 #9 !0 !9 u #0 #6 t #8 q y $0 $1 20 r !1 e @2 !2 #7 #3 #1 32 w 50, 63, 80 @3 Double acting (DL, DM) !3 !5 #6 o @5 @4 i @1 @6 !0 @7 @9 !6 t u !7 !8 q #8 $1 y Single acting spring extended (TL, TM) Double acting spring type (BL, BM) r $0 !1 !

C95Series

Piston gasket N SA !II 18* Cylinder lube qaskel N SA Piston Aluminum alloy Cushion valve Steel wire Nickel plated 1 9 Snap ring Steer for spring ~40~ 1 00 ,.

Peltier-type Chiller Thermo-con/ Compact Type

Note q Dustproof filter set HEF-FL001 Front panel, Filter: 1 piece each w Dustproof filter HEF-FL002 Filter: 1 piece w 11 HEF Series Specific Product Precautions Be sure to read this before handling the products. Refer to the back cover for safety instructions.

NCRBIBwserbs

10-24UNC 10.40) 10-32UNF : 270" Rotation Port Size. @ An gle Adj ustin g U nit/D im e ns io n s NCDRB18W10.15.20.30 (inch) N C R 8 1 8 W U 1 0 . 1 5 . 2 0 . 3 0 6-Q(NCRB1BW15, 20, 30) Include marka Auto Switch Compatible Type NCDRBIBWUi0. 15 NCDRB1BWU20.30 s*nci' u"it { Adjustable rotation{ *or"t "aru"ro. { With Auto Switch Appendix How To Set Rotation Time Ust@: Stable Rotation Time Regulation

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

= 50 [mm] D-X L2 L1 20Data Item Load factor n Note 1.

3 Position Cylinder Series RZQ

(Refer to Table 1 .) Assume PB Pc.