E,R.L.

Series NAC Dimensions rinr t{4C502&5520.5020 Rctulaio. I t Orain Fllto. I.th Aato 0..1n (Flo.t tp.)

,,: ,.

KF 45' Female Elbow Y M a l e R u n T e e . . . . . T Male Branch Tee . , T Union Tee , . . . . . . , TF Female Branch Tee E Bulkhead Connector E Bulkhead Union . . , U Male Branch 'Y" . . . U Union "Y" . . . . . . . .

•

I Special bracket major dimensions , t I ' Matenal :Rolled steel KX l KZ KZZ Part No.

C95

0 @1 r ye t !4 !7 !3 wu !8 @0 @2 @3 !6 q !5 !9 i *1 *1 C95K32 A A-A A !2 !

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Leakage test result a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e CX p r a 0.0 10 0 20 10 w 10-10 0 5 10 t i o o n L DTime [min] Operation cycles -X e e a a l l k k a t e l u w w g a a c 2 e i o

rep-filter-e

Set clamp ring t to case q. The tapered part of clamp ring t must be facing downward. d. Set seal part of the element e to the cover r while the flange part of case q is being placed on clamp ring t. e. Since PTFE is used for the material of gasket w, a large force is required to tighten clamp ring t.

Industrial Filters Replacement Procedure

Set clamp ring t to case q. The tapered part of clamp ring t must be facing downward. d. Set seal part of the element e to the cover r while the flange part of case q is being placed on clamp ring t. e. Since PTFE is used for the material of gasket w, a large force is required to tighten clamp ring t.

C76

9 @0 q w e r t y u i o !

C76

9 @0 q w e r t y u i o !

IDU/IDF

Note 2) Combinations of H and M, R and S, S and T, L and M are not available. Note 3) Option "T" is not available for IDU6D, 8D-4 and -6.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

T V V 2-Rc P Cushion adjustment screw 4-J GA F GA A MA a A MA a Air release R (max.)

IDX-OM-W095

11 T T 11.1 11.2 AC240V / DC24V 5A() / 2A() DC20V 3mA IDFC60/70/80/90 Series 11-1 IDX-OM-W095 T 11.3 AC230V ON A(4-5) B6-7 A4-5A B6-7B 3 5 /() OFF 3 OFF6.2 IDFC60/70/80/90 Series 11-2 IDX-OM-W095 T 11.4 M3.5 1.01.3Nm M4.0 1.42.0Nm 6 5 4 1 2 3 PE N L 7 L,N PE B A IDFC60-23-TIDFC70-23-T IDFC80-23-TIDFC90-23-T M3.5 8.5mm M4.0 9.5mm [3.2.5 ] IDFC60/70/80/90 Series

Air cylinder (Series compatible with secondary batteries)

C a u t i o n When replacing seals, carefully handle parts to prevent injury to your hands or fingers on the corners of parts. 17 3-2-1. Disassembly / Reassembly C a u t i o n Disassemble and assemble the cylinder on a clean cloth in a clean location. Perform on a clean cloth. Make sure no particles are present. Do not scratch the seals.

Air Cylinder NCY2 Series Magnetically Coupled Rodless Cylinder

3ubl6ct to th atrok lgngth incasa ol vsry tllndgr ;iz dus 10 ths lilnil lof a6llocuon of ihe guids shalt (46 c8ful oi collicignt d.l In case ol somo oprational dirscilon, th allowabl load Angle co8lticlsnl lkj: k=t-4s'(-o)l=1 t-601=0 9, I-75'l=0'8' t-90'l=0 7 l0: Dislanosifom rnountlng sudac 10 load's may be dillr6n1ltom th basic dsign val!

NCY2 series

3ubl6ct to th atrok lgngth incasa ol vsry tllndgr ;iz dus 10 ths lilnil lof a6llocuon of ihe guids shalt (46 c8ful oi collicignt d.l In case ol somo oprational dirscilon, th allowabl load Angle co8lticlsnl lkj: k=t-4s'(-o)l=1 t-601=0 9, I-75'l=0'8' t-90'l=0 7 l0: Dislanosifom rnountlng sudac 10 load's may be dillr6n1ltom th basic dsign val!

The ISE2 series is a compact, pressure switch (for positive pressure) and can be integrated with ZX or ZR vacuum systems. The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple. PRESSURE SWITCH, ISE1-6. 3 SCREEN HI PRECISION DIG PRESS SWITCH. 61.00000 lb. N59.

The ISE2 series is a compact, pressure switch (for positive pressure) and can be integrated with ZX or ZR vacuum systems. The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple. PRESSURE SWITCH, ISE1-6. 3 SCREEN HI PRECISION DIG PRESS SWITCH. 61.00000 lb. N59.

The ISE2 series is a compact, pressure switch (for positive pressure) and can be integrated with ZX or ZR vacuum systems. The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple. PRESSURE SWITCH, ISE1-6. 3 SCREEN HI PRECISION DIG PRESS SWITCH. 61.00000 lb. N59.

The ISE2 series is a compact, pressure switch (for positive pressure) and can be integrated with ZX or ZR vacuum systems. The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple. PRESSURE SWITCH, ISE1-6. 3 SCREEN HI PRECISION DIG PRESS SWITCH. 61.00000 lb. N59.

The ISE2 series is a compact, pressure switch (for positive pressure) and can be integrated with ZX or ZR vacuum systems. The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., 3-Screen High Precision Dig Press Switch, PRESSURE SWITCH, ISE1-6, N59, 22 lb