Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

AS121FG-M5-23 AS121FG-U10/32-01 9.6 7 22.2 12.7 17.3 25.8 12.3 28.6 22.1 3.2 M5 x 0.8 25 8 8.4 1/8" 8.4 12.3 17.3 22.1 12.7 AS121FG-M5-04 AS121FG-U10/32-03 12.7 17.3 12.3 22.1 4 9.3 5/32" 9.3 10-32 UNF 22.2 9.6 8 7 M5 x 0.8 22.2 28.6 25.8 28.6 25 25.8 8 25 7 9.6 AS121FG-M5-06 AS121FG-U10/32-05 21.3 26.1 13.5 18.1 11.7 22.9 6 11.6 3/16" 11.4 16.5 11.7 AS221FG-01-23 AS121FG-U10/32-07 14.2 18.3

EX250-SCA1A_eng

Solenoid on side A 0 2 4 6 8 16 28 30 2 3 1 SV24 V +24 V for valve 5 2 SV0 V 0 V for valve Side D Side U URL http://www.smcworld.com 1 4 3 SW24 V +24 V for input (SI unit side) Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 SW0 V 0 V for input 4 Output No.

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

v Deionized water v Sodium hydroxide Ultra deionized water v Toluene v Hydrofluoric acid Concentration 50% or less v Sulfuric acid (except fuming sulfuric acid) Concentration 20% or less v Phosphoric acid Concentration 30% or less v Note 1) The material and fluid compatibility check list provides reference values as a guide only.

Speed Controller: Standard Type Series AS In-line Type 1

1 14143 14144 14147 Stainless steel NBR 15-9-30 4 Speed Controller: Standard Type In-line Type Series AS Dimensions: AS1000-M3 Dimensions: AS1000-M5 Male M5 x 0.8 Female M5 x 0.8 Dimensions: AS2000/3000 Dimensions: AS4000 2-1/4 to 1/2 AS 2-port size ASP ASN AQ ASV Dimensions AK Max. Min.

Information

5 M5 port M5 port y y u u !7 !7 q w e r t q w e r t o o !0 !0 !1 !1 i i !4 !4 !2 !2 !3 !3 !6 !6 Component Parts Description Material Description Material No.

MHT2

IC circuit A76H A96V A96 5 V Grommet A72 A73 A72H A73H 200 V Reed switch Solid state switch 100 V 12 V A93V A93 Relay, PLC 2-wire 24 V A73C 12 V Connector Diagnosis (2-color indication) Grommet A79W 3-wire (NPN) F79 M9NV M9N F7NV 5 V 12 V IC circuit Grommet 3-wire (PNP) F7P M9PV M9P F7PV J79 M9BV M9B F7BV J79C 12 V 2-wire Connector 3-wire (NPN) F79W F7NWV F9NWV F9NW Relay, PLC IC circuit

MHT2

IC circuit A76H A96V A96 5 V Grommet A72 A73 A72H A73H 200 V Reed switch Solid state switch 100 V 12 V A93 A93V Relay, PLC 2-wire 24 V A73C 12 V Connector Diagnosis (2-color indication) Grommet A79W 3-wire (NPN) F79 M9N M9NV F7NV 5 V 12 V IC circuit Grommet 3-wire (PNP) F7P M9P M9PV F7PV J79 M9B M9BV F7BV J79C 12 V 2-wire Connector 3-wire (NPN) F79W F9NW F9NWV F7NWV Relay, PLC IC circuit

Process Gas Diaphragm Valve

OUTLET INLET Mounting hole Top view (Mounting hole on bottom) Porting Symbols OUTLET (Downstream) INLET (Upstream) 2PW 2PWA 2PWC q q q w 2 PORTS w w 3PWD 3PWE 3PWG 3 PORTS q q q e e e w w w 4PWM q e r 4 PORTS w 1114 A

End Lock Cylinder Series CBG1

With front lockR (mm) Bore size (mm) W P WA WB WH 20 M5 x 0.8 16 15 (16) 23 30 25 M5 x 0.8 16 15 (16) 25 30 32 Rc1/8 16 15 (16) 28.5 25 40 Rc1/8 16 15 (16) 33 20 50 Rc1/4 18 17 (18) 40.5 20 63 Rc1/4 18 17 (18) 47.5 20 80 Rc3/8 22 22 60.5 20 100 Rc1/2 22 22 71 20 Dimensions inside ( ) are for long strokes.

Precision Regulator

0 Setting knob ARM q Diaphragm (A) q w !1 q !1 ARP Steel ball w !1 Bleed !2 Nozzle IR-A @2 w !2 Bleed Diaphragm (B) r !3 @4 Bleed Exhaust u IR IR !7 @3 !2 !5 !4 Diaphragm (C) e OUT (2) SUP (1) OUT (2) OUT (2) SUP (1) IRV SUP (1) @3 !8 Exhaust valve !6 @1 @1 !8 e VEX Main valve e @1 Exhaust tValve guide tValve guide tValve guide SRH IR2120 IR3120 SRP @0 !1 SRF @5 !1 ITV @0 @6 !

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

3 e i o w !0 !5 Lateral load resisting type: MQQL (Built-in ball bushing) !1 !6 !

Supply(P),Vacuum(V), One-touch Fitting: Supply (P) Port: ø6; Vacuum (V) Port: ø12, Exhaust Type: Silencer Exhaust, Supply/Release Valve Combination: K1 [Supply Valve (N.C.), Release Valve (N.C.)], Rated Voltage: 5 (24 VDC), Electrical Entry: LO (L Plug Vertical Connector w/o Connector), Light/Surge Voltage Suppressor: U (w/Light/Surge Voltage Suppressor, Non-polar), Manual Override: Non-locking

Supply(P),Vacuum(V), One-touch Fitting: Supply (P) Port: ø6; Vacuum (V) Port: ø12, Exhaust Type: Silencer Exhaust, Supply/Release Valve Combination: K1 [Supply Valve (N.C.), Release Valve (N.C.)], Rated Voltage: 5 (24 VDC), Electrical Entry: L (L Plug Vertical Connector w/Lead Wire 300mm), Light/Surge Voltage Suppressor: Z (w/Light/Surge Voltage Suppressor), Manual Override: Non-locking Push

Vacuum Filter AFJ Series

w (y) e (y) t e t Component Parts No.

Rated Flow Range: 21 (2 to 200 L/min), Flow Adjustment Valve: W (With Flow Adjustment Valve, Rear Ported), Port Size: C8 (ø8), Output Specification: E (Out 1: PNP; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: M (SI Unit Only), Bracket/Panel Mount Adapter: V (Panel Mount Adapter, w/Flow Adjustment Valve)

Rated Flow Range: 21 (2 to 200 L/min), Flow Adjustment Valve: W (With Flow Adjustment Valve, Rear Ported), Port Size: C8 (ø8), Output Specification: E (Out 1: PNP; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: V (Panel Mount Adapter, w/Flow Adjustment

Rated Flow Range: 21 (2 to 200 L/min), Flow Adjustment Valve: W (With Flow Adjustment Valve, Rear Ported), Port Size: N2 (NPT1/4), Output Specification: C (Out 1: NPN; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: M (SI Unit Only), Bracket/Panel Mount Adapter: V (Panel Mount Adapter, w/Flow Adjustment Valve

Rated Flow Range: 10 (0.1 to 10 L/min), Flow Adjustment Valve: W (With Flow Adjustment Valve, Rear Ported), Port Size: N1 (NPT1/8), Output Specification: C (Out 1: NPN; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: M (SI Unit Only), Bracket/Panel Mount Adapter: V (Panel Mount Adapter, w/Flow Adjustment Valve

Rated Flow Range: 11 (1 to 100 L/min), Flow Adjustment Valve: W (With Flow Adjustment Valve, Rear Ported), Port Size: N2 (NPT1/4), Output Specification: C (Out 1: NPN; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: M (SI Unit Only), Bracket/Panel Mount Adapter: V (Panel Mount Adapter, w/Flow Adjustment Valve

Rated Flow Range: 25 (0.3 to 25 L/min), Flow Adjustment Valve: W (With Flow Adjustment Valve, Rear Ported), Port Size: N1 (NPT1/8), Output Specification: C (Out 1: NPN; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: M (SI Unit Only), Bracket/Panel Mount Adapter: V (Panel Mount Adapter, w/Flow Adjustment Valve