CLQ

10 20 25 27 31 39.2 43.2 18 20 8 10 16 20 18.5 22.5 9 10 4.5 5 Rod end nut L1 9-10-15 15 Series CLQ Dimensions: 32 Both ends tapped style: CLQA32 16 3.2 2 x 4-M5 x 0.8 16 3.2 Basic style (Through-hole): CLQB32 Extension locking LOCK 31.5 (unlocks when pressurized) 7.5 42.5 22.5 Rc 1/8 Rod side cylinder port Rc 1/8 Rc 1/8 unlocking port M8 x 1.25 (Effective thread depth 13) Head side cylinder

Micro Mist Separator

Standard specifications Bracket mount Indicator mount P A B C D E G J M N Q R S T U V W AMD20 1/8, 1/4 40 142. 3 17. 5 21 25 21 30 27 22 5. 4 8. 4 60 2. 3 28 50. 4 AMD30 1/4, 3/8 53 178. 1 21. 5 26. 5 30 35 26. 5 41 35 25 6. 5 13 71 2. 3 32 54. 1 AMD40 1/43/81/2 70 223. 5 25. 5 35. 5 38. 4 40 35. 5 50 52 30 8. 5 12. 5 88 2. 3 39 58. 1 Auto drain / semi-standard bowl Auto drain Semi-standard

Vacuum Regulator

IRV10A P P P P IRV20A P P P P P P Accessory q Note 1) C06 C08 C10 N07 N09 N11 6 8 10 1/4" 5/16" 3/8" Metric Nil B L None With bracket With bottom bracket Inch Note 1) Accessories are shipped together.

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

Core wire color A-coded A-coded A-coded 7 1 8 3 2 8 White Brown Green Yellow Gray Pink Blue Shield 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 2 3 1 7 7 1 8 3 2 8 2 3 1 7 White Brown Green Yellow Gray Pink Blue Shield 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 4 5 6 6 5 4 4 5 6 6 5 4 Socket pin arrangement Plug Socket pin arrangement Plug Connections Connections pin arrangement pin arrangement Item Specifications

Mist Separator

P A B C D E G J M N Q R S T U V W AM20 1/8, 1/4 40 142. 3 17. 5 21 25 21 30 27 22 5. 4 8. 4 60 2. 3 28 50. 4 AM30 1/4, 3/8 53 178. 1 21. 5 26. 5 30 35 26. 5 41 35 25 6. 5 13 71 2. 3 32 54. 1 AM40 1/43/81/2 70 223. 5 25. 5 35. 5 38. 4 40 35. 5 50 52 30 8. 5 12. 5 88 2. 3 39 58. 1 Auto drain / semi-standard bowl Auto drain Semi-standard specifications PC/PA bowl Metal bowl Metal bowl with level

3 Port Solenoid Valve Metal Seal Series VZ200 1

VZ22 20 Rc 1/8 VZ22 30 Rc 1/8 (Example) VV3Z2-20-081 (8 stations) VV3Z2-50081-C6 (8 stations) VZ212-1G-M5 5 pcs. VZ215-5M5 pcs. VZ212-1G-M5 2 pcs. VZ215-5M3 pcs. VVZ200-32A-1 1 pc.

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

(mm) 6 tube M14 x 1 ZX Rc 1/8 20 to 50 8 tube Ball joint rotation 15 ZR ZM Buffer Type ZH 10 to 16 20 to 50 ZU Pad dia.

AIR FILTER

Recommended torque unitNm Screw M5 1/8 1/4 3/8 1/2 3/4 Torque *1 79 1214 2224 2830 2830 1 3638 *1: First, tighten it by hand , then give it an additional 1/6 turn with a wrench. Do not apply any torsional moment, or bending moment except the weight of the air filter itself. External piping needs to be supported separately.

LG1H

thread depth 10 Encoder cable 20 4-M8 x 1.25 thread depth 10 8H10 depth 10 Motor power cable LJ1 LG1 LC1 LX LC6D/LC6C Switches 8H10 depth 8 Sensor cable 85 210 107 10 95 Work piece mounting reference plane 78.5 78.5 Stroke + 229 (table movement range) 33 24 55 Body mounting reference plane Stroke + 386 52.5 1 125 8(4)-M6 x 1 thread depth 10 3(2)-8H10 depth 10 30 95 95 100 8(4)-6.2 B (170)

MU

3, contained in one kit, and can be ordered using the order number for each cylinder bore size. 2.4-3 Series MU Basic: MUB Rod end male thread MUB25 SMU25, #1 (#1+#11) MUB32 SMU32, #1 (#1+#11) MUB40 SMU40, #1 (#1+#11) MUB50 SMU50, #1 (#1+#11) MUB63 SMU63, #1 (#1+#11) (mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 Model MUB25 MUB32 MUB40 MUB50

Thermo-chiller

0 Union (Size: 1/2 inch) Stainless steel 1 (197) !1 DI sensor piping assembly Stainless steel 1 !2 Mounting bracket 1 !3 DI filter inlet hose PVC 1 !4 DI filter outlet hose PVC 1 !5 Hose clamp 4 !6 Mounting screw (Size: M5) 2 !7 Cable tie holder 5 !8 Binding band 4 !

Refrigerated Thermo-chiller

Connection thread Proper tightening torque (Nm) Piping Tightening Torque M5 1.5 to 2 Rc 1/8 7 to 9 Rc 1/4 12 to 14 Rc 3/8 22 to 24 Rc 1/2 28 to 30 Rc 3/4 28 to 30 Rc 1 36 to 38 Rc 1 1/4 40 to 42 Rc 1 1/2 48 to 50 Rc 2 48 to 50 5. Confirm the leakage of fluid. Confirm that the hose or tubing is not pulled out and that there is no leakage in the fitted parts.

Refrigerated Air Dryers

Applicable air dryer Port size Rc A B C D Weight [kg] I D F IDF-BP317 IDF22E 1 134 405 928 198 4.4 IDF-BP318 IDF37E 1 1/2 980 7.7 IDU-BP336 IDU22E 1 93 445 1465 46 4.5 IDU-BP337 IDU37E 1 1/2 64 550 1635 70 8.0 I D U Dimensions [mm] IDU-BP338 IDU55E 2 53 530 1783 110 12.3 IDU75E 1918 Part no.

CHKD/CHKG

Rod end male threads (mm) (mm) Bore size (mm) Bore size (mm) a b c e f g h LW M P Q R X1 Y1 Z ZZ SS 20 25 32 40 50 63 80 100 20 25 32 40 50 63 80 100 44.5 43 1/8 16.5 6 10.5 15 7.5 58 73 12.5 15 M10 x 1.25 6 10 33 91 50.5 49 1/8 17 8 10.5 15 7.5 60 75 15.5 18 M12 x 1.25 6 12 36 96 64.5 63 1/4 19.5 10 11 16 8 67 83 22 25 M16 x 1.5 7 14 44 111 71 1/4 20.5 10 20 10 75 95 72.5 13 27 30 M20 x

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

0.5 1 5 10 20 50 0.5 1 5 10 20 50 Load (kN) Load (kN) Bore size 80 B rod C rod 2000 6 4 8 3 7 5 1 5 2 4 8 3 7 6 1 2 1000 Stroke (mm) 500 100 50 1 5 10 20 50 1 5 10 20 50 Load (kN) Load (kN) Bore size 100 B rod C rod 4 8 8 3 3 7 7 5 4 5 2000 6 6 1 2 1 2 1000 Stroke (mm) 500 100 50 1 5 10 20 50 100 1 5 10 20 50 100 Load (kN) Load (kN) 28 Series CH2E/CH2F/CH2G/CH2H Technical Data 3 Relationship

JXCx-OMY0008

S Standard cable Orange 9 B A-6 Black 8 3 Actuator side Controller side (14.2) (2) 2 1 (8) (1) B1 A1 (14) (18) (17.7) 6 5 (3) 2 1 A6 B6 15 16 L (11) (30.7) 14.2 Actuator cable [8 to 20m] (1) (2) LE-CPSignal name Terminal number Cable color Terminal number A B-1 Brown 2 Cable length (L) A A-1 Red 1 B B-2 Orange 6 8 8m B A-2 Yellow 5 COM-A/COM B-3 Green 3 A 10m COM-B/ A-3 Blue 4 (3) B 15m

Slider Type/Ball Bushing Bearing

9 #8!0!2!6 @4 @1 @8 #0 #1 $1 w @9 i #2 !1 o q u r y e @6 @5 @3 @7 CY1L10 to 40 @2#9 @0$0 t !9 #5$2 #8 !2 !0 !6!7@4 @1 !8 !4 !5 $0 @8 #7 #6 $1 F G Area G (10) Enlarged view F 10, 15 w u i o !1 #2 q !3 r y e @6 @5 @3 $1 #0 @7 #1 10 Component Parts Note No. Description Material No.

Speed Controller with Uni One-touch Fitting AS Series

Metric size Inch size Elbow type Universal type 1 8 3.2 4 6 8 10 12 " 5 32" 3 16" 1 4" 5 16" 3 8" 1 2" 1 8 AS221F-U01 AS231F-U01 Gasket 1 4 AS221F-U02 AS231F-U02 1 4 AS321F-U02 AS331F-U02 Female thread 3 8 AS321F-U03 AS331F-U03 Uni thread 1 2 AS421F-U04 AS431F-U04 Note 1) Elbow type only Note 2) indicates the control type (0 for meter-out and 1 for meter-in).

Series LQ3 High Purity Fluororesin Fitting

2 2 3 3 3 4 4 4 5 5 5 6 6 6 Tubing Size (Inch) 1/8 x 0.086 1/4 x 5/32 1/4 x 5/32 3/8 x 1/4 3/8 x 1/4 3/8 x 1/4 1/2 x 3/8 1/2 x 3/8 1/2 x 3/8 3/4 x 5/8 3/4 x 5/8 3/4 x 5/8 1 x 7/8 1 x 7/8 1 x 7/8 Thread Size A A B A B C A B C A B C A B C 1/8" 1/8" 1/4" 1/8" 1/4" 3/8" 1/4" 3/8" 1/2" 3/8" 1/2" 3/4" 1/2" 3/4" 1" Tubing Connection E 1A LQ3 Size Combination Class Fitting Style Symbol E T P U Combination

F

Y S I Z E 1 M5 2 1/8, 1/4 Standard 3 3/8 Standard 4 1/2 Standard T H R E A D P O R T S I Z E M5 ...M5 U01 ..1/8 U02 ..1/4 U03 ..3/8 U04 ..1/2 U32 ..10-32UNF 01 ... 1/8 02 ... 1/4 03 ... 3/8 04 ... 1/2 W I T H O N E-T O U C H F I T T I N G S T Y P E 2 Elbow 3 Universal C O N T R O L M E T H O D 0 Meter Out 1 Meter In Courtesy of Steven Engineering, Inc. !