SMC Corporation of America
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Rated Vacuum Range: -101 to 0 kPa, Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: M5 (Female Thread), Lead Wire: w/o Lead Wire, Bracket: A2 [Bracket B (ZS-46-A2)]

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: M5 (Female Thread), Connector Type: S (M12 Connector Type)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: M5 (Female Thread), Connector Type: S (M12 Connector Type)

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: M5 (Female Thread), Lead Wire: W (Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover), Bracket: B [Panel Mount Adapter, (ZS-46-B)], Operation Manual: K (Operation Manual, Calibration Certificate)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: M5 (Female Thread), Connector Type: S (M12 Connector Type), Bracket: A5 [Bracket E for M12 Connector Type (ZS-46-A5)]

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: M5 (Female Thread), Lead Wire: w/o Lead Wire, Bracket: None, Operation Manual: T (w/o Operation Manual, Calibration Certificate)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread)

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: M5 (Female Thread), Connector Type: S (M12 Connector Type), Bracket: None, Operation Manual: K (Operation Manual, Calibration Certificate)

Before Use Fieldbus system EX500-GPN2 Product Summary Mounting and Installation LED Display Installation System configuration Direct mounting Install the product using 4 M5 screws x 15 mm or longer with a head 5.2 minimum.

CUX32-PS M5 2.55 10% Due to cylinder structure, 10mm bore size seals cannot be replaced. M6 4.02 10% 2. Grease pack When maintenance requires only grease, use the following part numbers to order. Grease pack GR-L-005 (5g) GR-L-010 (10g) GR-L-150 (150g) Operation Warning 1. The speed may not be controllable during low speed operation with the meter-out controller. Caution 1.

Before Use Fieldbus system EX500-GEN2 Product Summary Mounting and Installation LED Display Installation System configuration Direct mounting Install the product using 4 M5 screws x 15 mm or longer with a head 5.2 minimum.

Model MQR1-M5 MQR2-M5 MQR4-M5 MQR8-M5 MQR12-M5 Number of circuits 1 2 4 8 12 Operating fluid Air / Inert gas Seal structure Metal seal Guide structure Bearing supported Bearing supported at both ends Port size Male R1/8 Female M5 x 0.8 M5 x 0.8 Flow rate C[dm3/(s.bar)] b Cv characteristics 0.50 0.40 0.17 Lubrication Not required Min. operating pressure -100kPa Max. operating pressure 1.0MPa

mounting groove (4 locations) 55 Width across flats 10 (4 locations) M5 x 0.8 (Finger closing port) M5 x 0.8 (Finger opening port) 6.5 H 4 x M6 x 1 (Piston rod thread and rack thread) 22.6 2 x M5 x 0.8 Vacuum port 8 0.5 10 11 11 8 8 9 16.5 20.5 11 O S 39 19 K (58) 15 25 19 19 9 4 4 9 25 When open F 13 13 43 4 x M5 x 0.8 through (Thread for mounting attachment) When open G (mm) J 26 50 70

2 Speed Controller for Clean Room Series AS-FPQ/FPG Construction Meter-out type M5 type Meter-in type M5 type Parts list No.

2 Speed Controller for Clean Room Series AS-FPQ/FPG Construction Meter-out type M5 type Meter-in type M5 type Parts list No.

Features 2 Pressure Sensor Series PSE530 How to Order PSE53 0 M5 Pressure sensing range High pressure [0 to 1MPa] Vacuum [0 to 101kPa] Low pressure [0 to 101kPa] Compound pressure [101 to 101kPa] 0 1 2 3 Option Without cable Nil Sensor cable (3m) M5 Port size L M5 x 0.8 Options Sensor cable (3m) + Connector (1 pc.)

System configuration EX500-DX A EX500-DX B How to order: EX500-AC 030 SSPS Power supply cable Cable length (L) 003 0.3 [m] Connector GW unit SSPS Socket side: Straight Plug side: Straight With SI unit Valve manifold (SY/SV/VQC/S0700 Series) 005 0.5 [m] Thank you for purchasing an SMC EX500 Series Fieldbus system.

L (Example) F8NL 5m . Z (Example) F8NZ Auto switches marked with a "" symbol are produced upon receipt of order.

10C 120E 150E Bernoulli type Outer body diameter (mm) 39 59 79 99 l120 l150 Piping port size M5 x 0.8 Rc 1/8 XT661 X322 120E Fluid Air* Operating pressure 0.01 to 0.4 MPa Body size: l Proof pressure 0.6 MPa Ambient and operating temperature 5 to 40C (no freezing) 120E 120 mm 150E 150 mm Grease Grease-free Body material PBT Accessory Weight (g) 26 55 108 170 260 410 Nil A B * Air purication

Main Body Shape: Unit, Additional Function: Silencers / Filter / Valves for Vacuum Generation / Mechanical Pressure Switch for Vacuum / Vacuum Destruction Support, Ultimate Vacuum(kPa): -84, Air Consumption Flow Rate(l/min): 13, Vacuum Port Connecting Port Shape: M5, Air Supply Port Connecting Shape: M5, Application: Individual Item, Operating Temperature Range(°C): 5:50~, Suction Flow(l/