Part Number Description: EXHAUST SUB-ASSY Product Line: Z Product Line Description: VACUUM SERIES Family Code: 604 Family Description: ZL112 MULTI-STAGE VAC. EJECTOR Class Code: 21 Part Code: 2 Reference Code: J Click here to report information errorImage shown may not match exact part number
Part Number Description: VAC ADAPT PLATE M5 Product Line: Z Product Line Description: VACUUM SERIES Family Code: 601 Family Description: ZX MODULAR VACUUM SYSTEM Class Code: 21 Part Code: 2 Reference Code: J Click here to report information errorImage shown may not match exact part number
Part Number Description: VALVE SEAL Product Line: Z Product Line Description: VACUUM SERIES Family Code: 683 Family Description: XLD HIGH VACUUM VALVE Class Code: 21 Part Code: 2 Reference Code: L PDF Documentation: Datasheet Click here to report information errorImage shown may not match exact part number
Part Number Description: NZM MAN EXH ADAPT 3/4 Product Line: Z Product Line Description: VACUUM SERIES Family Code: 602 Family Description: ZM VACUUM SYSTEM Class Code: 21 Part Code: 2 Reference Code: J Click here to report information errorImage shown may not match exact part number
Part Number Description: SEAL KIT XLD-100D-X510 Product Line: Z Product Line Description: VACUUM SERIES Family Code: 683 Family Description: XLD HIGH VACUUM VALVE Class Code: 21 Part Code: 2 Reference Code: L Click here to report information errorImage shown may not match exact part number
Part Number Description: BONNET ASSY Product Line: Z Product Line Description: VACUUM SERIES Family Code: 683 Family Description: XLD HIGH VACUUM VALVE Class Code: 21 Part Code: 2 Reference Code: L PDF Documentation: Datasheet Click here to report information errorImage shown may not match exact part number
Part Number Description: INSERT O-RING 200MM SLITVALVE Product Line: Z Product Line Description: VACUUM SERIES Family Code: 692 Family Description: XGT HIGH VACUUM VALVE Class Code: 21 Part Code: 2 Reference Code: L Click here to report information errorImage shown may not match exact part number
Part Number Description: EXHAUST SPACER FOR ZX Product Line: Z Product Line Description: VACUUM SERIES Family Code: 601 Family Description: ZX MODULAR VACUUM SYSTEM Class Code: 21 Part Code: 2 Reference Code: J Click here to report information errorImage shown may not match exact part number
Part Number Description: NZM MAN EXH ADAPT 1/2 Product Line: Z Product Line Description: VACUUM SERIES Family Code: 602 Family Description: ZM VACUUM SYSTEM Class Code: 21 Part Code: 2 Reference Code: J Click here to report information errorImage shown may not match exact part number
Part Number Description: GASKET NZX ADAP PLATE Product Line: Z Product Line Description: VACUUM SERIES Family Code: 601 Family Description: ZX MODULAR VACUUM SYSTEM Class Code: 21 Part Code: 2 Reference Code: J Click here to report information errorImage shown may not match exact part number
Part Number Description: GASKET NZX INT PLATE Product Line: Z Product Line Description: VACUUM SERIES Family Code: 601 Family Description: ZX MODULAR VACUUM SYSTEM Class Code: 21 Part Code: 2 Reference Code: J Click here to report information errorImage shown may not match exact part number
Part Number Description: ELEMENT (N)ZFA100 Product Line: Z Product Line Description: VACUUM SERIES Family Code: 620 Family Description: ZFA VACUUM FILTER (NON US STD) Class Code: 21 Part Code: 2 Reference Code: J Click here to report information errorImage shown may not match exact part number
Part Number Description: M2.5X.45X5 PHIL FLAT HD Product Line: Z Product Line Description: VACUUM SERIES Family Code: 602 Family Description: ZM VACUUM SYSTEM Class Code: 21 Part Code: 2 Reference Code: J Click here to report information errorImage shown may not match exact part number
Part Number Description: EJECT/V U ADAPT PLATE Product Line: Z Product Line Description: VACUUM SERIES Family Code: 602 Family Description: ZM VACUUM SYSTEM Class Code: 21 Part Code: 2 Reference Code: J Click here to report information errorImage shown may not match exact part number
Part Number Description: VACUUM FILTER (5M) Product Line: Z Product Line Description: VACUUM SERIES Family Code: 620 Family Description: ZFA VACUUM FILTER (NON US STD) Class Code: 21 Part Code: 2 Reference Code: J Click here to report information errorImage shown may not match exact part number
Product Line: Z Product Line Description: VACUUM SERIES Family Code: 602 Family Description: ZM VACUUM SYSTEM Class Code: 21 Part Code: 2 Reference Code: J Click here to report information errorImage shown may not match exact part number
Part Number Description: ELEMENT 5 MIC (ZFB300) Product Line: Z Product Line Description: VACUUM SERIES Family Code: 621 Family Description: ZFB VACUUM FILTER (STD) Class Code: 21 Part Code: 2 Reference Code: J Click here to report information errorImage shown may not match exact part number
Part Number Description: VALVE SEAL FOR XLA Product Line: Z Product Line Description: VACUUM SERIES Family Code: 681 Family Description: XLA HIGH VACUUM VALVE Class Code: 21 Part Code: 2 Reference Code: L Click here to report information errorImage shown may not match exact part number
Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function mount Model Z ARP20(K) H J H J M N Q R S T U V W Y 27.8 1021 1021 1021 44 40 69 30 34 47 5.4 15.4 55 2.3 28 28.5 14 6 ARP30(K) 27.8 44 41 70 41 40 44 6.5 8 53 2.3 31 38.5 19 7 ARP40(K) 27.8 44 45 74 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 Note 1) The total length of B direction is the length when the filter regulator knob is unlocked.
Fittings & Tubing Air Cylinders Rotary Actuators -ARP20/ARP20K 10 21 -ARP30/ARP30K 10 21 -ARP40/ARP40K 10 21 Clean room compliant, copper-free, fluorine-free, silicone-free Air Preparation Equipment Clean room compliant Description Symbol Body size Body size 30 20 40 20 40 30 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting