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4 !7 !0 !4 @1 u q !3 !2 @6 t @4 w @8 r !1 @5 @3 @2 e !6 A A C B M(D)LUB25 y !9 i o !5 @0 Extension locking w q Section A-A !

Buffer connection thread Symbol Thread dia. 1 A8 Symbol Pad dia. 1 02 to 08 2 A10 B5 3 A14 2 10 to 16 3 20 to 32 B8 4 40, 50 4 ZP U6 B8 Y [qY type adaptor] B 3 ZP K20 [wBuffer] 3.8-63

Specialty Regulators NAR Series Pressure Regulator NAR425, 435, 625, 635, 825, 835, 925, 935 s n o i t a c i f i c e p S l e d o M 5 2 4 R A N 5 3 4 R A N 5 2 6 R A N 5 3 6 R A N 5 2 8 R A N 5 3 8 R A N 5 2 9 R A N 5 3 9 R A N e z i S t r o P 2 / 1 8 / 3 4 / 1 1 4 / 3 2 / 1 1 4 / 1 1 2 ) a P M ( g i s p e r u s s e r p f o o r P ) 5 . 1 ( 0 2 2 e r u s s e r p g n i t a r e p o . x a

<> [F 2] ON OFF OFF ON ON [F 2] OUT2 1 2 2 3ON(H_4)OFF(H_2) 25 - [F 3] <> [F 3] , [F 3] 26 - [F 4] <> [F 4] , [F 4] , (28 -) ,ON/OFF 27 - OUT1 , AP1 OUT1 OUT1 OUT1 A1L A1H P_1H_1 (n_1H_1) P_1=A-(A-B)/4 A= H_1=|(A-B)/2| B= 1 28 - [F 6] 5R.D. <> [F 6] [FSC] 1 [F 6] 29 - [F11] <> [F11] , 1000 100 [F11] [MPa]/[kPa]/[kgf/cm 2]/[bar]/[psi]/[inHg] 2]/[bar]/[psi]/

) = 2 words (for Data-INT) Configuration = 0 (1) (4) (5) (2) (3) -21No.EX-OMX1001 Setting using the EDS file Install in advance the EDS file using the Rockwell Automation software RSNetWorxTM for EtherNet/IPTM.

B-1 A-1 B-2 A-2 B-3 A-3 Connector C terminal no. Signal Cable color S Standard cable Brown Red Orange Yellow Green Blue A A B B COM-A/COM COM-B/ 2 1 6 5 3 4 Cable color Connector D terminal no.

Ensure that the power source and the power supply of the product is 4 Special Features turned off (or the power plug must come off). Auto tuning When installing piping or fittings, ensure sealant material does not enter 2. Remove the reservoir cap.

GV*-OMH0003-C PRODUCT NAME High Vacuum Slit Valve MODEL / Series / Product Number XGT312-50336-** XGT313-50336-** B Contents Safety Instructions 2 to 3 1. Specifications 4 2. How to order 5 3. Construction/Operation 6 to 8 4. Precautions 9 to 10 5. Replacement Part List 11 6. Maintenance 12 7.

m 4 m 6 m 13 m Filtration efficiency 99% FQ1 HEPO 2 FGH100 to 300 FN The membrane element cannot be selected for FGH100.

10 ZB1-VPN3A KJ H 04 04 C2 2 H 02 2 C4 4 L 04 4 N1 1/8" 01 1/8" N3 5/32" 03 5/32" L2 2 4 L4 4 LN1 1/8" LN3 5/32" -N KJL04-C1-N 10 Assy ZB1-FE3-A 30m ZA ** 10 1 0-101kPa15V 2%F.S ZA ZB1-SE1-A 3 -100100kPa15V 2%F.S.

PRESS. 1. 0 M Pa O U TPU T PRESS. 0. 010. 2 M Pa M AD E I N J APAN So G No. o S o1 T P2 U Q3 V R4 W Z12 6- (1) Nm 1/4 3/8 1/2 12~14 22~24 28~30 (2) (3) (4) 7- (1) (2) (3) (4) (1) (2) (3) (1) (2) O 3 (3) 3 (4) P.5 0 (5) 0 8- (1) (2) (3) 21Nm (4) ON-OFF 5 79Nm (6) (7) (8) 0.5MPa 0.1MPa (9) AN Rc1/2 (1) (2) 9- (1) (2) 1.5~2 (1) 1 1.5 (2) (3) a b

In the case of diodes, the residual voltage is approximately 1 V. 4 No.DOC1003125 DXT1215 Series 35-Port Solenoid Valves Precautions 2 Be sure to read this before handling products. Design/Selection 4. Connection of piping and fittings When screwing piping or fittings into the valve, tighten them as follows. 1) For a fitting with sealant R or NPT, first, tighten it by hand, then 4.

: IS400-1 to 2 AL Min. clearance for maintenance (mm) With bracket B With float switch B 374 383 383 382 385 C E Model Port size H 25 18 16 35 35 P 47 47 AL30 AL40 AL40-06 AL50 AL60 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 324 333 333 332 335 38 40 38 41 45 53 70 75 90 95 14-2-65

Fittings & Tubing Air Cylinders Rotary Actuators Side tapped mounting [1/N1] Through-holes in open/close direction [2/N2] 4 x MM through Thread for mounting attachment C C B A 4 x H through Hole for mounting attachment S S O O B A (mm) (mm) MM M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 C 2 2.5 4 5 H 2.9 3.4 4.5 5.5 B 5.7 7 9 12 B 5.7 7 9 12 Model A 3 4 5 6 Model A 3 4 5 6 11221122112211221 N1

Thread size Tightening torque (Nm) NPT, R1/8 3 to 5 NPT, R1/4 8 to 12 NPT, R3/8 15 to 20 NPT, R1/2 20 to 25 NPT, R3/4 28 to 30 NPT, R1 36 to 38 NPT, R1 1/4 40 to 42 NPT, R1 1/2 48 to 50 (3) If the product is screwed in with excessive torque, a large amount of sealant will seep out.

Device information Product type : 12 (communication adapter) Product code : 107 -27No.EX-OMK0004-B I/O mapping Input area mapping Input data MSB LSB MSB LSB Offset (word) 15 8 7 0 Sensor input area 0 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 1 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17 16 2 L L L L SP DI L L L L L L L L L L L: Fixed to Low Status input area Diagnostic (Status input area) Item

11 87 95 70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMY0001 6. 200 []1 1.5 1 200 FKM 110Pa <> 13 XL-OMY0001 7 7-1. 2 2P5P6 14 XL-OMY0001 7-2 1 2 1 3 1 1 2 4 1 0.4MPa G 3 4 2 XLA-16 2.4mm 7mm -25 3mm 8mm -40 4mm 10mm -50 5mm 13mm -63 -80 6mm 17mm < 2 < 15 XL-OMY0001 7-3. 1 2 XLA-16/25 2 2 Nm XLA-16 0.9 -25 1.5 -40 2.5 -50 6.3 -63 -80 14 2< 2 3 1 1 4 1 2 2 1

Warning Caution Connection thread Proper tightening torque ( ( ( (N m) Rc1/8 7 to 9 Rc1/4 12 to 14 Rc3/8 22 to 24 Rc1/2 28 to 30 Rc3/4 28 to 30 Rc1 36 to 38 Rc1 1/4 40 to 42 Rc1 1/2 48 to 50 Rc2 48 to 50 5. Connection of piping to products When connecting piping to a product, refer to its operation manual to avoid mistakes regarding the supply port, etc. 6.

VK300-82-2-01 VK300-82-2-02 VK300-82-2-07 VK300-82-4-51 VK300-82-4-06 VK300-82-3-05 VK300-82-3-53 1578