240

Positioning repeatability: 0.05 mm Possible to set position, speed and force. (64 points) LEF LEJ LEL LEM Rod Type LEPY Series Page 374 Size: 6, 10 LEPY6-25 240 g Weight LEY LES LEPY LEPS LEPY LEPS LER LEH LEY -X5 30 mm 11LEFS 125.6 mm 11LEJS 20.5 mm 25ASlide Table Type LEPS Series Page 383 Size: 6, 10 LEC LEPS6-25 290 g Weight LEC S LEC SS-T LEC Y Linear guide integrated Motorless LAT 41

NA-080-INFLW

Flow Meter and CLC Mode ) Settling time as low as 0.5 seconds 150 80 150 80 A2 Port Pilot Port ( Vent ) Tube O.D. 6 Pilot Port Vent Port M3 NPT 1/8 A1 Port 129 80 20.5 45 160 30 30 2000 61 73 120.5 2000 LFU20-Z07-3A-X2 LFU20-Z07-1A-X2 126 (Includes controller & connectors) (Includes controller & connectors) 110 100 29.5 Operating Pressure to 0.5MPa, Operating Temperature to 60C Media 2000 (41

LMU100/200 Series Mist Spray Unit

T0604 (6 tube) applicable T0425 (4 tube) applicable T0806 (8 tube) applicable AIR OIL AIR BLOW Port size LMV110 How to Order LMV 0 1 1 20 Nozzle tubing length: L Air blow circuit Nozzle tubing construction 20 25 30 35 200 mm 250 mm 300 mm 350 mm LMV220 1 2 Flexible tubing Copper tubing Mixing valve 1 2 Available Not available Construction Dimensions LMV10/With air blow circuit LMV10L 45 41

08-ca2wh-e

.: GR-S-010 (10 g), GR-S-020 (20 g) 41

Precision Regulator

rInterface tInterface with bracket 225 173 130 97 129 169 30 eAFM20-A 41 wAF20-A eAFM30-A qIR100--X170 wAF30-A eAFM40-A 50 qIR20--X170 qIR30--X170 wAF40-A 820 Made to Order IR1000/2000/3000 Series With Digital Pressure Switch 7 Manifold Specifications (Except IR2120 and IR3000 series) 8 With digital pressure switch (model no: ISE30A-01--ML).

ITVH

M5 x 0.8 hole Built-in regulator EXH Built-in regulator EXH IRV Solenoid valve EXH 1/4 (Rc, NPT) Port 3 (Exhaust port) VEX 38.5 24 72 41 24 Port 3 (Exhaust port) 58 39 SRH Port 2 (Output port) Port 1 (Supply port) SRP 1/4, 3/8 (Rc, NPT) Port 1 (Supply port) SRF 1/4, 3/8 (Rc, NPT) Port 2 (Output port) ITV 36 IC 36 4 x M5 x 0.8 depth 11 Bracket mounting hole ITVH ITVH Do not block three EXH

Floating Joint

Reduction of length when using JT and JCM Max. 77 mm Product length Reduction when using JT Overall Length Comparison JT Series New New Size JA + CM2 Series New NewJT + JCM Series Reduction rate Workpiece 20 139.5 mm 90.2 mm 35% 32 149.0 mm 96.0 mm 36% 40 189.0 mm 112.0 mm 41% Cylinder (JCM) Weight Comparison JA Series Size JA + CM2 Series New NewJT + JCM Series Reduction rate 20 190 g 102

KN Series Nozzles for Blowing

Model Nozzle size D L1 L2 Cassette size H1 Weight (g) L2 M L3 M D KNP-2 0.7 4 5 41 23 4 12.7 987.3 A 1 m polyurethane tube is included. H1 L1 L3 Polyurethane tubing Use to measure workpiece collision pressure.

KRM

(mm) Model N L1 L2 Port B Min. bore Weight (g) L3 L4 L5 L6 P Q1 Q2 MA MB FA FB KRM11-06-10-10 KRM11-06-10-6 76 10 6 6 10 29 47 19.5 31.5 21.5 31 13 13.5 17 21 7.5 10 102 6 85 10 116 41 39 55 73 KRM11-08-12-10 KRM11-08-12-6 8 12 11.5 22.5 35.5 24 34.5 15.5 14.7 18.5 22 9 57 86 Dimensions: KRM12 2-connection thread 2-4.5 mounting hole N-applicable tubing O.D.

Inch size Rotary One-touch Fittings Standard Type KS Series Applicable Tubing: Inch Size

(inch) Connection thread UNF NPT Min. port size Weight (g) A D1 D2 L M Model Applicable tubing Nylon Urethane KSH03-34S KSH03-32 9 14 17 23 23 29 55 63 8 10-32 UNF 36.5 37.6 38.6 42 43.1 46.5 53.5 53.9 33 34.5 35.5 36.5 40 41 48 48.5 16 2.5 5 32 10.4 4.0 4.0 12 1 8 12.7 KSH07-34S 14.29 17 1 8 1 4 13.4 10.4 4 13.2 1 4 14 KSH07-35S KSH09-34S KSH09-35S KSH11-35S KSH11-36S 1 8 18.5

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

m 20 m 0 1 2 4 5 None Nil IN left IN right Differential pressure indicator Construction/Connection L Differential pressure indication switch Note) Note) The paper elements for water-glycol or emulsion is 10 m only. 40 42 Element upward removal Element upward removal Differential pressure indicator Threaded Differential pressure indication switch Note) Element Note) N.C. and N.O. common 41

Fluoropolymer Tubing Variations

Fittings KF series Stainless Steel 316 Insert Fittings KFG series Miniature fittings M, MS series (Hose nipple type) Fluoropolymer fitting LQ series H/DL L/LL Applicable fittings Note 2) Flexibility: Improved by approx. 20% * SMC comparison (Fluoropolymer tubing, TL/TIL series) KC 20C 100C 200C 260C 1.6 0.9 0.45 0.23 15 8 0.9 0.5 0.25 0.15 45 31 0.9 0.5 0.25 0.15 55 35 0.9 0.5 0.25 0.15 75 41

AR20-B to AR60-B

125.2 43 43.3 M62 x 1.5 43.3 3.2 28 44.3 27.8 54.8 42.5 80.8 42.5 80.8 AR60(K)-B 1 1/8 95 129.6 46 43.3 M62 x 1.5 43.3 3.2 28 44.3 27.8 54.8 42.5 80.8 42.5 80.8 Optional specifications Model Bracket mount Panel mount M N Q R S T U V W Y Z AR10-A 25 28 30 4.5 6.5 40 2 18 18.5 AR20(K)-B 30 34 43.9 5.4 15.4 55 2.3 24.7 28.5 14 6 AR25(K)-B 30 34 43.9 5.4 15.4 55 2.3 25.7 32.5 16 6 AR30(K)-B 41

ChemicalThermo-con

2.6 (65) 1.06 (27) 3.9 (100) 5.1 (130) Circulating fluid outlet (1.2 )30)) 12.6 (320) 0.8 (20) 0.8 (21) Terminal block Display panel 6.7 (170) 5.6 (143) 4.7 (120) AL SI 8.5 (215) OUT FG B B A FG + EXT.SENSOR REMOTE ON/OFF 3.8 (97) 3.1 (79) ALARM PURGE OUT PURGE IN SIGNAL Purge inlet (M5) Fluid leak sensor CHEMICAL 3.0 (75) 2.1 (53) POWER COMMUNICATION IN WATER I N O N WATER OUT DC 1.6 (41

HRL

CH2: Stainless steel, Alumina ceramic, Carbon, Fluororesin, PP, PBT, POM, PU, PVC, PPS, AS, PS, EPDM, NBR, Ion replacement resin Power supply 3-phase 200 VAC (50 Hz), 3-phase 200 to 230 VAC (60 Hz) Allowable voltage range 10% (No continuous voltage fluctuation) Earth leakage breaker Rated current [A] 30 40 50 Electrical system Sensitivity current [mA] 30 Rated operating current4 [A] 17 32 41

Lightweight and Compact

Environmental friendly as refrigerant R410A Convenient functions Self diagnosis function and check display Page 70 Page 71 Timer operation function/Unit conversion function/Power failure auto-restart function/Anti-freezing operation function 41 types of alarm codes Communication function Page 71 Easy maintenance Page 69 Equipped with serial communication (RS232C/RS485) and contact I/Os (2

33

HED Polypropylene skid HEA Model Weight [kg] Dimensions [mm] HRSE012-A-10 35 Height 745 x Width 465 x Depth 575 HRSE018-A-10 HRSE012-A-10-T 42 Height 745 x Width 465 x Depth 620 HRSE018-A-10-T HRSE012-A-20 38 Height 745 x Width 465 x Depth 575 HRSE018-A-20 HRSE024-A-20 HRSE012-A-20-T 45 Height 745 x Width 465 x Depth 620 HRSE018-A-20-T HRSE024-A-20-T HRSE012-A-23 41 Height 790 x Width 470

Series 10-, 21- AF-A Air Filter

Standard specifications Model B Metal bowl With bowl guard B B V U T R Q N M J G D E C B A P S 10-/21-AF20-A 10-/21-AF30-A 10-/21-AF40-A 10-/21-AF40-06-A 10-/21-AF50-A 10-/21-AF60-A 142.1 174.1 176.1 247.1 261.1 93.9 122.1 154.1 156.1 227.1 241.1 91.4 28 30 35 34 47 47 2.3 2.3 2.3 2.3 3.2 3.2 40 53 70 70 90 90 8.4 13 12.5 12.5 13 13 5.4 6.5 8.5 8.5 11 11 22 23 26 25 35 35 27 35 52 52 66 66 30 41

Environment

LEY -X5 LEFB/Belt Drive 11LEFS Horizontal 11LEJS 14 LEFB32 25A12 LEC 10 Work load: W [kg] LEC S 8 LEC SS-T LEFB25 6 LEC Y 4 Motorless LEFB16 2 0 LAT 0 500 1000 1500 2000 Speed: V [mm/s] LZ LC3F2 41 LEF Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specication SpeedWork Load Graph (Guide) Servo Motor (24 VDC) The following graph shows the values when moving force is 250%

Silencer Metal Case Type Series 25

1 Model 0.5 A B D Dimensions (mm) Recommended flow (m3/min (ANR)) 2.2 or less 3.0 or less 4.0 or less 8.0 or less 10.0 or less 1.5 or less 1.5 or less Model Port size R Effective area (mm2) Weight (g) 0.2 Inlet pressure (MPa) Noise level (dB (A)) 1 4 2504-002 33.9 111 62 30 24 106 64 30 24 113 68 30 24 0.1 2505-003 45.9 3 8 2506-004 50.0 1 2 310 88.5 48 35 2507-006 105.6 3 4 514 97.5 60 41