ITV

Output deviation (%F.S.) 0.5 0.5 Out VE 40 0 0 Return VY G 60 0.5 0.5 AL 80 1.0 1 0 2 4 6 8 10 0 25 50 75 100 0 25 50 75 100 Input signal (%F.S.) Input signal (%F.S.)

MK

5.5 40 0.1 62 0.15 28 M6 X 1.0 REA 35 50 63 9 89 67 6.6 0.1 50 0.15 76 M8 X 1.25 9 108 80 9 60 92 M10 X 1.5 REC Arm for width across flats RHC Rod end width across flats With arm MTS CC Model MKl32-llN MKl40-llN MKl50-llN MKl63-llN Model MKl32-llM MKl40-llM MKl50-llM MKl63-llM H A A D G B B E C C F D F G M8 X 1.25 18 6 36 6.2 67 14 18 20 9 45 35.5 25 53.5 M8 X 1.25 61 18 6 36 6.2 67 14 18

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

Lightweight Size 1: 552 g (1.21 lb) Size 2: 824 g (1.81 lb) Size 3: 1,000 g (2.21 lb) Top mounted manual override Easy access for trouble shooting the circuit VS4 VQ7 Specifications EVS Rubber seal Metal seal Valve operation Pilot operated, 5 port VFN Fluid Air, Inert gas 0.1 to 1.6 (14.5 to 230) Note) Operating pressure range MPa (psi) 0.1 to 1.0 (14.5 to 145) 2.4 (348) Proof pressure

Pin Cylinders Series CJP2/CJP

Contents -X Applicable bore size (mm) 4 6 10 15 H B C d Part no. 4 6 10 15 CJPS4-G NTJ-004 NTP-006 NTP-010 NTP-015 M2 x 0.4 1.6 4 4.6 Individual -X CJPS6-G For the plug mounting style Since gaskets (10 pcs./set) do not include a grease pack (10 g), order it separately.

VXR21/22/23

Add 10 g for conduit type, 30 g for DIN terminal 60 g for conduit terminal type respectively. Refer to Glossary on page 17-3-15 for details of max. operating pressure differential min. operating pressure differential and max. system pressure.

Digital Flow Switch

1190 g 1680 g NPT 610 g 1190 g 1680 g G 630 g 1220 g 1720 g Lead wire with connector +90 g Weight Piping specification *6 If the flow fluctuates around the set value, the width for setting more than the fluctuating width needs to be set.

1.1

HRGC-FL001 HRGC-FL005 475 430 310 530 D Connection thread E Mounting Example (mm) A B 110 110 C D E F G Part no. HRGC-BP001(G) HRGC-BP005(G) 275 300 q This dustproof filter is secured with hook-and-loop tape.

Clean Air Filter SFD Series

See Specific Product Precautions. 0.2 GD 0 0 10 20 30 40 50 Operating temperature (C) Port size Model Rated flow (L/min (ANR)) Note 1) Weight 60 80 100 100 100 100 300 400 500 500 35 g 35 g 35 g 35 g 60 g 150 g 190 g 190 g 190 g 260 g 4 (One-touch fittings) 6 (One-touch fittings) 8 (One-touch fittings) Rc, NPT, G 1/4 Rc, NPT, G 1/4 Rc, NPT, G 1/4 8 (One-touch fittings) 10 (One-touch fittings

KR

Note) D1: Max. diameter Union Elbow: KRL M Effective area (mm 2) Weight (g) Applicable tubing O.D.

Precision Regulator Series IR1000/2000/3000

eInterface rInterface with bracket 231 180 128 OUT 2 G G 2 OUT 2 OUT EXH 3 97 133 169 G 30.2 wAFM20 40.7 wAFM30 qAF20 qAF30 50 qAF40 wAFM40 IR200--X120 IR100--X120 IR300--X120 Accessory (Option)/Part No. Part no.

Digital Flow Switch (Integrated display type)

PPS, PBT, FKM, SUS304, brass (Electroless nickel plating), Si, Au, GE4F One-touch fitting Straight: 40 g Straight: 48 g Rear: 55 g Rear: 63 g Body Straight: 72 g (G1/4: 117 g) Screw fitting Straight: 60 g Rear: 75 g Rear: 87 g Weight (G1/4: 132 g) Flow adjustment valve +34 g Lead wire +35 g Bracket +20 g Panel mount adapter +15 g DIN rail mounting bracket +65 g 1: Refer to the recommended

PSxx-OMM0006CN

79 g 97 g 97 g 104 g 101 g 101 g G ()JIS B0202(ISO228-1) ISO1179-1(G )ISO16030(G )JIS B0202(ISO228-1) ISO1179-1(G ) () ISO1179-1 ISO1179-2 ISO1179-3 ISO1179-4 () ISO16030(G )()ISO16030 () [V] [mA] A B C 0.0-101.3 kPa 0 -101.3 kPa -100.0100.0 kPa -100 kPa 100 kPa -0.1001.000 MPa -0.1 MPa 0 1 MPa -61No.PS-OMM0006CN-E M8(3 ) ZSE40A() ISE40A() 0-101.3 kPa -0.1001.000 MPa 10.0-105.0 kPa

PSxx-OMR0001CN

) CE (EMC RoHS ) 119 2F 3 57 G 20 280 H 20 480 3 427 5 -15No.PS-OMR0001CN-J 2 () (2 ) X276 /(13 )2 -16No.PS-OMR0001CN-J 2 ON 150 kPaON3(50 kPa)ON 1.5 F42.5 GH64 150 kPa (100 kPa200 kPa) 80 kPa220 kPaOFF (62 ) ISA3-F ISA3-G ISA3-H 1 m 1 m 1 m ON [mm] ON [mm] ON [mm] [kPa] [kPa] [kPa] 3 m 3 m 3 m ON [mm] ON [mm] ON [mm] [kPa] [kPa] [kPa] 5 m 5 m 5 m ON [mm] ON [mm] ON [mm] [kPa] [kPa

PSxx-OMT0001CN

ISA3-H M12-4 4 4 5 m 0.72 mm 1.14 mm M12-4 4 4 1.14 mm 23 8 6 5 m46 14 6 5 m 0.50 mm 1.00 mm(26 ) 113 g() CE (EMC RoHS ) 120 2F 3 57 G 20 280 H 20 480 3 428 5OUT2 6OUT2 7 8 -16No.PS-OMT0001CN-E 2 () (2 ) X276 /(13 )2 -17No.PS-OMT0001CN-E 2 ON 150 kPaON3(50 kPa)ON 1.5 F42.5 GH64 150 kPa (100 kPa200 kPa) 80 kPa220 kPaOFF (67 ) ISA3-F ISA3-G ISA3-H 1 m 1 m 1 m ON [mm] ON

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

F D E B With brake (mm) 9.5 26 171 32 Section BB Without brake (mm) 15 19 116 27.5 Coupling 9.2 32.5 P.C.D Thread 8 29.5 30 Motor F E G Section AA (Housing interior) Motor mounting area detail Series LJ1H S20 Motor mounting area dimensions Mitsubishi Electric Corporation Yaskawa Electric Corporation Manufacturer Matsushita Electric Industrial Co., Ltd.

JA/JAH/JB/JS

A R JS20, 32, 40, 63 Center of sphere M M U U D J F H B E G P R A Max. thread depth P Model Center of sphere R Allowable eccentricity U Max. operating tension and compression force (N) (mm) M A B C D E F G H J JS10-4-070 JS16-5-080 0.5 0.5 0.5 0.5 0.75 1 4.7 5.8 7.3 8.5 11.6 14.3 M4 x 0.7 M5 x 0.8 26 34.5 8.5 12 15.5 17.5 18.5 23 9.5 13.5 12 16 21 24 31 41 1.5 2 4.5 5 5 7 4 6 7 8 11 14 4

48

D-G

15

LEC Y Motorless Motorless Grease pack order number: GR-S-010 (10 g)/GR-S-020 (20 g) LAT LZ LC3F2 885

VK300

F Thread type Rc G NPT NPTF Nil F N T Option Part No. Description Part no.

JA/JAH/JB/JS

A R Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com JS20, 32, 40, 63 Center of sphere M M U U D J F H B E G P R A Max. thread depth P Model Center of sphere R Allowable eccentricity U Max. operating tension and compression force (N) (mm) M A B C D E F G H J JS10-4