3% F.S. or less?5% F.S. or less (0 to 50C, based on 25C)70 mA or less700 g1/2, 3/4Karman vortex3-digit, 7-segment LEDl/min, gal(US)/minl, gal(US)0 to 1 MPa1.5 MPa0 to 999999 lOperating: 0 to 50C, Stored: ?
s [3 cP] or less) Note 1)Karman vortex30 to 250 L/min0 to 70oC (with no freezing and condensation)p3% F.S.p2% F.S.p5% F.S. (25oC reference)0 to 1 MPa Note 2)1 MPa45 kPa or less at the maximum flow1 sVoltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCFor power supply status, flow rate indicator (Blinking speed changes
(Inert gas)1.5 MPa1.0 MPa0 to 50C (With no condensation)0.03 s or less3% F.S.3% F.S.0.5% F.S.
s [3 cP] or less) Note 1)Karman vortex30 to 250 L/min0 to 70oC (with no freezing and condensation)p3% F.S.p2% F.S.p5% F.S. (25oC reference)0 to 1 MPa Note 2)1 MPa45 kPa or less at the maximum flow1 sVoltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCFor power supply status, flow rate indicator (Blinking speed changes
3% F.S. or less?5% F.S. or less (0 to 50C, based on 25C)70 mA or less700 g1/2, 3/4Karman vortex3-digit, 7-segment LEDl/min, gal(US)/minl, gal(US)0 to 1 MPa1.5 MPa0 to 999999 lOperating: 0 to 50C, Stored: ?
3% F.S. or less?5% F.S. or less (0 to 50C, based on 25C)70 mA or less700 g1/2, 3/4Karman vortex3-digit, 7-segment LEDl/min, gal(US)/minl, gal(US)0 to 1 MPa1.5 MPa0 to 999999 lOperating: 0 to 50C, Stored: ?
(de-energized)490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?s, Rise time 1 ns
5.1, 3 m, Conductor area: 0.2 mm2, Insulator O.D.: 1.12 mm PSE56 - -28: Oil proof heavy-duty vinyl cable with air tube, 2 cores, ?5.1, 3 m, Conductor area: 0.2 mm2, Insulator O.D.: 1.12 mm194 g102 g
5.1, 3 m, Conductor area: 0.2 mm2, Insulator O.D.: 1.12 mm PSE56 - -28: Oil proof heavy-duty vinyl cable with air tube, 2 cores, ?5.1, 3 m, Conductor area: 0.2 mm2, Insulator O.D.: 1.12 mm194 g102 g
5.1, 3 m, Conductor area: 0.2 mm2, Insulator O.D.: 1.12 mm PSE56 - -28: Oil proof heavy-duty vinyl cable with air tube, 2 cores, ?5.1, 3 m, Conductor area: 0.2 mm2, Insulator O.D.: 1.12 mm194 g102 g
s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min0 to 70oC (with no freezing and condensation)p3% F.S.p2% F.S.p5% F.S. (25oC reference)0 to 1 MPa Note 2)1 MPa45 kPa or less at the maximum flow1 sVoltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCFor power supply status, flow rate indicator (Blinking speed
(No load)ResistanceWeight Note 3)Port size (Rc, NPT, G)PF2A521Air, NitrogenHeater type20 to 200 l/min?
(Inert gas)1.5 MPa1.0 MPa0 to 50C (With no condensation)0.03 s or less3% F.S.3% F.S.0.5% F.S.
4 , 3 8Air (Inert gas)1.5 MPa1.0 MPa0 to 50C (With no condensation)0.03 s or less3% F.S.3% F.S.0.5% F.S.3% F.S. or lessNot required (Use turbine oil Class 1, ISO VG32, if lubricated.)0.9
(kg)Pressure typeVEP31211 4 , 3 8Air (Inert gas)1.5 MPa1.0 MPa0 to 50C (With no condensation)0.03 s or less3% F.S.3% F.S.0.5% F.S.3% F.S. or lessNot required (Use turbine oil Class 1, ISO VG32, if lubricated.)0.9
s [3 cP] or less) Note 1)Karman vortex30 to 250 L/min0 to 70oC (with no freezing and condensation)p3% F.S.p2% F.S.p5% F.S. (25oC reference)0 to 1 MPa Note 2)1 MPa45 kPa or less at the maximum flow1 sVoltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCFor power supply status, flow rate indicator (Blinking speed changes
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Grommet terminal, Conduit terminal, DIN terminal 1 (P) 3 (R) Note 1) Use dry-air at low temperature.
Model: 20 (1500 L/min), Pressure Range: 3 (0.005~0.5MPa), Power Voltage: 0 (24VDC), Input Signal: 3 (Voltage Style 0~10VDC), Monitor Output: 3 (Switch Output PNP), Thread: F [G(PF)], Port Size: 3 [3/8 (2000,3000)], Accessory: B (Flat Bracket), Cable Connector: S (Straight Style 3m), Pressure Display Unit: 3 (Bar)