S070

lead type VQZ VZ VS 0.1 W with power saving circuit 150 (Lead wire AWG#26) 3.5 27 6 VFN 26 23.5 20.5 3 9.5 28.5 3.5 4-11-5 Series S070 Dimensions Base mounted with screws S070B-G-M5 Grommet type 16.5 3 7 15 21 2-3.4 mounting hole 150 (Lead wire AWG#26) 22 5 6 22 20.5 3 2 11 1 7 6 5 12 12.3 12 25 M5 x 0.8 3 (EXH) port M5 x 0.8 2 (OUT) port M5 x 0.8 1 (SUP) port S070B-C-M5 Plug lead type 0.1

Guide Cylinder/Compact Type Series MGC

, 125, 150 200, 250, 300 107 19 16 22 75 40 M8 x 1.25 depth 16 37 160 34.5 50 140 8.6 14 depth 10 M10 x 1.5 depth 18 142 25 19 22 110 45 M10 x 1.5 depth 20 42 194 37 80 170 10.5 17 depth 12 M12 x 1.75 depth 21 Bore size (mm) P Note 2) I J K L M N O Q R S T U V W X Y Z WH 20 25 32 40 50 60 80 86 80 25 44 38 25 M6 x 1 M5 x 0.8 21 12 26 12 40 36 30 140 23 30 52 70 95 46 32 M6 x 1 M5 x 0.8 21

ZSE40/ISE40

Time Repeatability 0.2% F .S. 1 digit or less IP65 compatible Dusttight/Splash proof type 16-2-16 3 Series ZSE40/ISE40 High Precision, Digital Pressure Switch How to Order 0.100 to 1.000 MPa For positive pressure Set pressure range Nil ISE40 01 22 For positive pressure ZSE ISE ZSE40 01 22 For vacuum/compound pressure PSE Z I SE3 PS Option Set pressure range Nil F Nil For vacuum pressure

VCB

1/8 VCB21 M4 12.8 18 28 12.5 8.5 31 67.5 36 6 18 86 66 53 99 53 44 62 22 1/4 M5 19 20 32 15 11 36.5 81.5 40 8 22 99 68 66.5 101 66.5 46 76 24 1/4, 3/8 VCB31 M5 23 25 32 15 13.5 36.5 86 50 8 30 104 68 71 101 71 46 80 24 1/2 M5 23 22.5 36 17 11 41 90 45 8 22 107 70 74.5 103 74.5 48 84 26 1/4, 3/8 VCB41 M5 23 25 36 17 13.5 41 94 50 8 30 111.5 70 78.5 103 78.5 48 88 26 1/2 M5 28.2 30 36 17 17.5

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

Rubber seal 10.8 (0.6) VQZ242 20 or less 15 or less Metal seal 14.4 (0.8) VQZ312 22 or less 17 or less N.C. Rubber seal 16.2 (0.9) VQZ332 33 or less 25 or less 92 VQZ300 Metal seal 13.5 (0.75) VQZ322 22 or less 17 or less N.O.

%silltr

22 Direct solenoid operated 512 Valve with spring retum To limit the size of th6 solenoid, larger and elastomer sealed valves have indirect (piloted) solenoid ooration.

IIIIIII

Supplv Pressure 220 PSIG (15 Kqflcmz) Operating Pressure 22-150 PS|G (1.5-9.9 Kqf/cm2) 15-150 PS|G (1-9.9 Kqf/cm2) Ooeratino TemDerature 40-140'F (5-60'C) Bodv Aluminum Die Cast Spool & Sleeve 440F Stainless Steel, passivated & heat treated to 58-63 Rockwell C. Sleeve O-Rinqs Buna N Soacer Delrin Shock Pad Urethane Rubber Max. Cycle Rate 300 cPM Weight (Valve Body Only) oz.

5.0 MPa Pilot Operated 2/3 Port Solenoid Valve & Check Valve Series VCH

Model Pilot operated, diaphragm poppet Air, Insert gas Valve construction Fluid Orifice VCH42 ON response 50 17.5 22 dm3/(sbar) (110 mm2) 0.11 5.8 16 17 dm3/(sbar) (85 mm2) 0.08 4.5 Flow characteristics 40 C value (Effective area) b Cv Response time [ms] Valve specification Coil specification VCH41 ON response 30 5.0 MPa 0.5 to 5.0 MPa 5 to 80C 5 to 80C Brass Polyurethane elastomer Drip proof

Thermo-dryer

Therefore, the amount of condensed water is as follows (per 35 ft3 (1 m3)): 122 (50) 104 (40) 86 (30) Pressure dew point F (C) 68 (20) B A 50 (10) 218psi (1.5 MPa) 189psi (1.3 MPa) 160psi (1.1 MPa) 131 psi (0.9 MPa) 102psi (0.7 MPa) 73psi (0.5 MPa) 44psi (0.3 MPa) 15psi (0.1 MPa) Atmospheric pressure 32 (0) 14 (10) 4 (20) 22 (30) 40 (40) 58 (50) C 76 (60) 76 (60) 58 (50) 40 (40) 22 (30) 4

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

21 22 21 22 19 21 19 21 21 23 21 23 21 23 23 24 23 24 23 24 22 23 30 31 39 41 47 49 61 63 69 74 73 78 95 100 6 8 6 8 8 10 8 10 8 10 10 12 10 12 10 12 10 R 1/8 23.4 27.4 39.8 45.8 17.6 14 R 1/4 25.4 31.4 39.8 45.8 17.6 12 R 1/8 26.7 30.7 45.3 52.8 24 14 R 1/4 28.7 34.7 45.3 52.8 24 17 R 3/8 30.4 36.7 45.3 52.8 24 17 R 1/4 33.8 39.8 49.6 55.6 30 17 R 3/8 35.5 41.8 49.6 55.6 30 22 R 1/2 37.6

Booster Regulator/Air Tank

Make sure to refer to the procedure for maintenance. 9 Booster Regulator Series VBA Dimensions VBA10A-02 With elbow silencer (Option) 150 Pressure gauge (Option) Elbow silencer (Option) 60 IN side gauge port Rc 1/8 OUT side gauge port Rc 1/8 28 7 28 7 Silencer (Option) 113 113 IN port Rc 1/4 IN port Rc 1/4 OUT port Rc 1/4 23 27 23 27 OUT port Rc 1/4 22 22 4 x 5.5 EXH port Rc 1/4 60 40 60

e

Nominal size Stroke Nominal size: 16 101.7 (74.7) (40) 60 80 Workpiece mounting center line 70 27 27 74.7 (60) LJ1 LJ1 72 40 Motor 102 42 60 LG1 LG1 43.5 71 (60) 60 LTF LTF 123 43 129 72.4 4 x counterbore depth 3.5 22 21.3 40 LC1 LC1 32 3.5 through 9.8 LC7 LC7 4 5 6 16.5 28 4 x M4 x 0.7 depth 7 LC8 LC8 T-slot section for mounting 4 5.6 (Max. 8.6) 14.4 152 + Stroke LXF LXF Encoder cable on

Series CA2 10-/11- 21-/22- Air cylinder ø40, ø50, ø63

10-/21-CA263 11-/22-CA240 11-/22-CA250 11-/22-CA263 Relief type 50, 75, 100, 125, 3/8 Non-lube Double acting, single rod Air cushion Available 150, 200, 250, 300, 1/4 Vacuum suction type 350, 400, 450, 500 3/8 Note) Consult SMC for long stroke.

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

Copper, fluorine and silicone-free + Low particulate generation Action 21 22 Relief type Vacuum suction type D Double acting Rod end thread Nil M Standard (Rod end female thread) Rod end male thread Model Model Bore size (mm) Port size Relief port Action Standard stroke (mm) 10-/21-CQSB12 10-/21-CQSB16 10-/21-CQSB20 10-/21-CQSB25 11-/22-CQSB12 11-/22-CQSB16 11-/22-CQSB20 11-/22-CQSB25 12

Refrigerated Thermo-chiller

Connection thread Proper tightening torque (Nm) Piping Tightening Torque M5 1.5 to 2 Rc 1/8 7 to 9 Rc 1/4 12 to 14 Rc 3/8 22 to 24 Rc 1/2 28 to 30 Rc 3/4 28 to 30 Rc 1 36 to 38 Rc 1 1/4 40 to 42 Rc 1 1/2 48 to 50 Rc 2 48 to 50 5. Confirm the leakage of fluid. Confirm that the hose or tubing is not pulled out and that there is no leakage in the fitted parts.

Process Valve Series VNA

32 22 32 28 40 28 40 33 50 33 50 0.7 0.5 1 2 3 4 1.0 0.8 1.4 1.2 1 1 4 1 2.4 2.2 5.2 5.0 32 1 2 1 3.8 3.6 JIS Symbol 7.0 6.8 40 Valve type Operation N.C.

3

Sensor Flow range 0.5 L/min 2 L/min 5 L/min 20 L/min 40 L/min 250 L/min 140 L/min 100 L/min 350 L/min 0.5 L/min 4 L/min PF3W704 PF3W504 0.35 L/min 5.5 L/min 5.5 L/min 0.35 L/min 2 L/min 16 L/min PF3W720 PF3W520 1.7 L/min 1.7 L/min 22 L/min 22 L/min 5 L/min 40 L/min PF3W740 PF3W540 3.5 L/min 3.5 L/min 55 L/min 55 L/min 10 L/min 100 L/min PF3W711 PF3W511 7 L/min 7 L/min 140 L/min 140 L/min

AC Servo Motor Driver (Pulse input type)

(Note 2) Alarm deactivation Display Name Alarm code AL.92 Battery cable Press disconnection warning Display CN1 CN1 CN1 Name "SET" on Alarm AL.96 Home position setting Power 22 23 24 current reset error OFF ON (bit2) (bit1) (bit0) alarm (RES) AL.99 Stroke limit warning screen.

AC Servo Motor Driver (SSCNET /H Type)

When the logic of FLS and RLS is set to "positive logic" using Pr.22, Input signal logic selection", positioning control can be performed, even if FLS and RLS are not wired. -58- 7.4 Operating conditions The following conditions must be satisfied in order to start operation.

ZQ-OM01601

,ONOFF ON-OFF ON (22 -) "digit" 0 () SI ONOFF ON 12 - ON (22 -) (OUT1) "" 22 5R.D.(5) () "()" () F () 13 - ,FG 14 - NPN NPN 2 26.4V 80mA 2 V NPN (ZQ1-LW6-N-A) PNP PNP 2 80 mA2 V PNP (ZQ1-LW6-P-A) 15 - 133 1 1 1 1 16 - OUT1 (P_1),ON (P_1)(H_1)OFF P_1-70.0 kPa H_1:10.0 kPa OUT2 OUT2ON (P_1)OFF ((P_1)(H_2)),ON ONOFF H_2:5.0 kPa (OUT2) OFF ON (V) 17 - <> OUT1 (