Model Selection 1

In the case of liquid: P Q = 1.9 x 106Av (9) G Q : Flow rate [l/min] Av : Flow coefficient [m2] P : Pressure difference [MPa] G : Relative density [water = 1] In the case of saturated aqueous vapor: Q = 8.3 x 106Av P(P2 + 0.1) (10) Q : Flow rate [m3/s] Av : Flow coefficient [m2] P : Pressure difference [Pa] P1 : Relative density [MPa]: P = P1 P2 P2 : Relative density [MPa] Front matter 4

VCC

.: XT13-406-X200) Note) Applicable to special manifold, too. 644 Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve) VCC Series VCC Series I N D E X P.646 How to Order P.648 Specifications/Weight P.650 Dimensions Single valve unit P.651 Manifold P.652 SUS316L Stainless steel fittings P.654 Special Tools VNA VNB Disassembly/Assembly/ Maintenance Procedure P.656 SGC

S070

Grommet type 16.5 3 7 15 21 2-3.4 mounting hole Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 150 (Lead wire AWG#26) 22 5 6 22 20.5 3 2 11 1 7 6 5 12 12.3 12 25 M5 x 0.8 3 (EXH) port M5 x 0.8 2 (OUT) port M5 x 0.8 1 (SUP) port S070B-C-M5 Plug lead type 0.1 W with

Guide Cylinder Series MGG

T 2 x P (Rc, NPT, G) Q B S W U K L E R I AA AL AP X A AB J V Y + Stroke Z + Stroke 8 x AF AC AD AE (mm) Bore size (mm) 20 25 32 40 50 Stroke range (mm) A AA AB AC AD AE AF AL AP B C D E F G H I J K L M N 90 11 11 7.5 75 30 6 25 108 15 60 92 5.5 30 55 60 80 25 45 M5 x 0.8 depth 10 M8 x 1.25 depth 14 75, 100, 125, 150, 200 9.5 depth 6 100 14 13 7.5 85 30 6 30 130 17.5 65 113 6.6 35 65 70 100

25

Process Pump (Diaphragm Pump) PB Series Compact, large capacity diaphragm pump, suitable for transferring and collecting a wide range of fluids Compact, large capacity diaphragm pump, suitable for transferring and collecting a wide range of fluids o t p m s l a i PA z P e Built-in solenoid valve only RoHS Smaller, lighter, 25% reduction in volume Smaller, lighter, 25% reduction in volume

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

L Rubber stopper screw Switch rail Mounting tap L Stud fastening: After a temporary tightening, tighten an additional 1/4 turn. Metal stopper screw L Shock absorber 8-9-16

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

C D 4-O MX MTS T MY Q CY 2-P S U W E B K L MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX DAA AB I AP A R X Y + Stroke Z + Stroke -X J V 20Data 8-AF AC AD AE 100 piston rod end connection Stroke range (mm) Bore size (mm) AF AE AD AC AB AA G F N E M D L C K

ITV

Flat bracket Dimensions L-bracket Description Part no.

3

A AA C J L L J K (4 locations) Flat washer With 4 pcs.

Rotary Cylinder Series MRQ

The amount of air requirement of rotary actuator = 0.06 x V x (P/0.1)/t L /min(ANR) V : Inner volume = cm3 P : Absolute pressure = {Operating pressure (MPa) + 0.1} t : Operating time = s Calculate the required air volume separately for the linear motion part and the rotary motion part.

TABLE OF CONTENTS

V 564 H 364 K 332 J 116 J 116 J 116 V 564 J 116 K 332 V 564 V 564 V 564 K 332 K 332 K 332 Model LW53 3 Way Normally Closed Piped Exhaust LW53GG8XGB LW53GH8XGB (G or L) LW53GJ8XGB (G or L) LW53GV8XGB (G or L) LW53GK8XGB (G or L) LW53HH8XGB (G or L) LW53HJ8XGB (G or L) LW53HV8XGB (G or L) LW53HK8XGB (G or L) LW53JJ8XGB (G or L) LW53JV8XGB (G or L) LW53JK8XGB (G or L) LW53VV8XGB (G or L) LW53VK8XGB

CATALOG VC10

V 564 H 364 K 332 J 116 J 116 J 116 V 564 J 116 K 332 V 564 V 564 V 564 K 332 K 332 K 332 Model LW53 3 Way Normally Closed Piped Exhaust LW53GG8XGB LW53GH8XGB (G or L) LW53GJ8XGB (G or L) LW53GV8XGB (G or L) LW53GK8XGB (G or L) LW53HH8XGB (G or L) LW53HJ8XGB (G or L) LW53HV8XGB (G or L) LW53HK8XGB (G or L) LW53JJ8XGB (G or L) LW53JV8XGB (G or L) LW53JK8XGB (G or L) LW53VV8XGB (G or L) LW53VK8XGB

MLU

MLU Clevis pin and knuckle pin Rod end nut ML1C D30 d Dd9 -X d 20D C l m m t t L H B Data (mm) (mm) Part no. Size 25 32 40 50 l 18.2 22.2 26.2 32.2 d 7.6 9.6 9.6 13.4 L 23 27 31 38 d M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 D 16.5 18 21 26 Dd9 C 19.6 21.9 25.4 31.2 B 17 19 22 27 H 6 7 8 11 Size 25 32 40 50 Part no.

VCL

LVC DIN terminal: D Conduit terminal: T Cable 6 to 12 LVA F S Q 27.5 34 F (Q) LVH LVD LVQ LQ R C U 25 LVN C (44) R E R TI/ TIL G1/2 E PA G1/2 A H D (S) B B A H D 2-P Port size 2-P Port size PAX 2-M Thread depth N 2-M Thread depth N PB L L K K N.C.

KA

(mm) <M5, M6> <M5, M6> A Weight (g) D P M L Model Urethane 2-applicable tubing KAU23-M5 38 9.6 15.5 34.5 9 M5 x 0.8 M6 x 1 2.2 2.2 10 38.5 3.4 2.9 11 1 8 KAU23-M6 KAU23-U01 11 3.2 9.6 KAU04-M5 39.5 M5 x 0.8 M6 x 1 4 2.2 2.2 KAU04-M6 10 11 10.4 16 36 10.4 40 4 1 8 KAU04-U01 11 4.2 4.2 K 1 4 KAU04-U02 42 16 14 KAU06-M5 42.5 M5 x 0.8 M6 x 1 39 2.2 2.2 12 KAU06-M6 43 13 M Connection thread 17

PSxx-OMR0001CN

DCISA3-P DC+ OUT1 N.C.

VM

supply L Model A 1.5 mm P.T. 20 N F.O.F. 7.5 VM122-M5-00 VM132-M5-00 37.5 VA 1.5 mm O.T. 3.5 VM123-M5-00 VM133-M5-00 2-4.6 mounting hole 33.5 3.0 mm T.T.

VM

Twist Selector (3 position)/VM131-01-35R, B, G, Y/VM151-01-35R, B, G, Y Panel mounted hole JIS Symbol 2 port 3 port 15N F.O.F. 0.5MPa supply 45 T.T. 3.5-15 VM100 Series VM100/Bottom Piping Basic/VM122-M5-00, VM132-M5-00 VM123-M5-00, VM133-M5-00 JIS Symbol 2 port 3 port SlA 20N F.O.F. 0.5MPa supply A L Model 7.5 VM122-M5-00 VM132-M5-00 VlA 37.5 1.5mm P.T. 3.5 VM123-M5-00 VM133-M5-00 1.5mm

VCA

How to find the flow rate for air/ Flow rate formulas based on the air temperature of 20C For subsonic range where P + 0.1013 < 1.89 (P + 0.1013) Q = 226S P(P + 0.1013) For sonic range where P + 0.1013 1.89 (P + 0.1013) Q = 113S (P + 0.1013) Q : Flow rate [l/min(ANR)] S : Effective area (mm) P : Pressure drop P P (MPa) P: Upstream pressure (MPa) P: Downstream pressure (MPa) How to make

MU

Data Clevis Pin, Knuckle Pin Rod End Nut l Bore size (mm) Bore size (mm) l d B Dd9 H L C D d Part no.