2 Phase Stepper Motor/Without Motor Brake Series LXS

Home position switch (optional) De-energized operating type 0.1Nm 24VDC 5% 5W (at 75C) Model Static torque Rated voltage Power consumption Brake specifications Applicable driver Positioning repeatability LC6D-220AD-Q (Refer to page 306 for details.) LC6D-507AD-Q (Refer to page 306 for details.) 0.05mm Holding plate: MB1 (1 pc.), Phillips countersunk head screw: M3 x 6l (1 pc.)

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

M5 x 20 Hexagon socket head cap screw Tightening torque: 3.5 0.5 Nm J D side G1/4 port part Tightening torque: 10 1 Nm K G e w q Note) H r q w e Note) e w q Note) F q w E C A U side B D M5 x 20 Hexagon socket head cap screw Tightening torque: 3.5 0.5 Nm Block Assembly C: 2 port valve manifold block assembly Manifold block assembly for gate valve D: 3 port valve manifold block assembly

VQ5000

How to Find the Flow Rate (at air temperature of 20C) Subsonic flow when P1 + 0.1013 < 1.89 (P2 + 0.1013) Q = 226S P(P2 + 0.1013) Sonic flow when P1 + 0.1013 1.89 (P2 + 0.1013) Q = 113S (P1 + 0.1013) Q: Air flow rate [l/min (ANR)] S: Effective area (mm) P: Differential pressure (P1P2) [MPa] P1: Upstream pressure [MPa] P2: Downstream pressure [MPa] Correction for different air temperatures

4 Port Solenoid Valve Series VQD1000

How to Order Valves 10 V Q D 1 1 5 1 5 L M5 Clean series Body type 3 Body ported 5 Base mounted Valve option Nil Standard (2 W) V Vacuum (2 W) U For large flow (3.2 W) W For large flow, Vacuum (3.2 W) Note) Energy saving type Note) Note) Rated voltage 5 24 VDC 6 12 VDC Electrical entry L: Plug lead type L plug connector, With lead wire With light/surge voltage suppresser LO: Plug

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

30 50 Lead 8: LEKFS32(L/R)EB Lead 8: LEKFS32(L/R)EB 40 Work load: W [kg] Work load: W [kg] 20 30 Lead 16: LEKFS32(L/R)EA Lead 16: LEKFS32(L/R)EA 20 10 Lead 24: LEKFS32(L/R)EH Lead 24: LEKFS32(L/R)EH 10 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 Speed: V [mm/s] Speed: V [mm/s] Vertical LEKFS40(L/R)/Ball Screw Drive Horizontal 70 60 30 Lead 10: LEKFS40(L/R)EB Lead 10: LEKFS40

Compact Cylinder with Air Cushion and Lock Series RLQ

K ( across flats) H (With locking) 80 9 6.5 10 18 50 YB-03 32, 40 120 11 6.5 12 22 60 YB-05 50, 63 d2 d1 L UT C UA (mm) UA C d1 d2 H k L UT Weight (g) 25 Part No.

5 Port Air Operated Valve

e (B)2 4(A) SYA w (B) 2 (A) 4 (A) 4 (B) 2 w y SYJA 1 (P) (EB)3 5(EA) VFA3000 VFA5000 VZA t (A)4 2(B) 3 (EB) 5 (EA) 1 (P) 5 (EA) 3 (EB) 1 (P) VFA VFA r y 1 (P) (EA)5 3(EB) VFRA 2 position double VPA4 Symbol 2 position double SYJA r t q q VFA1000 (B)2 4(A) w w (A) 4 (B) 2 (A) 4 (B) 2 VZA 5(EA) 1 (P) (EB)3 VTA VFA3000 VFA5000 2(B) (A)4 VGA 3 (EB) 5 (EA) 1 (P) 1 (P) 5 (EA) 3 (EB) t r (EA)5 1

CQM

-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (KB) D-A7/A8 Auto switch KA A + Stroke B + Stroke W L S EA EB EC M J 2 x 2-OA 2 x 2-RA Both ends tapped style (CQMA) (mm) Without auto switch With auto switch Stroke range (mm) Bore size (mm) P P EA EB EC B F Q A B F Q A TN TF NN NN TN TF 5 5.5 11.5 M5 x 0.8 M5 x 0.8 40 23 32 10 to 50 50 33

Precision Regulator

min (ANR) or less 4.4 L/min (ANR) or less 4.4 L/min (ANR) or less 4.4 L/min (ANR) or less 11.5 L/min (ANR) or less Rc 1/4, 3/8, 1/2 Rc 1/8 (2 locations) Rc 1/4, 3/8, 1/2 Port size Pressure gauge port Rc 1/4 Rc 1/4 Rc 1/8 SRP Ambient and fluid temperature Weight (kg) 5 to 60C (No freezing) 0.64 0.71 0.35 0.30 0.14 SRF Note 1) With the condition of no flow on the output side.

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

cable. 1-5-11 Series SYJ3000 2 Position Double [ ]: AC G H Grommet (G), (H): SYJ3240-M5 M5 x 0.8 (A, B port) 10 5 10 2-3.2 (For mounting) 22 2.5 Manual override B A 11 A B 34.4 G: Approx. 300 H: Approx. 600 (Lead wire length) 78.8 [83.2] (Light/Surge voltage suppressor) 41.5 [48.5] + 35.6 26.1 R1 P R2 13 5 10 10 10 M5 x 0.8 (P, R1, R2 port) 17.5 14 28 L plug connector (L): SYJ3240-L-M5 M8

Compact Cylinder with Air Cushion Series RQ

Knuckle Pin (common with double clevis pin) Rod End Nut d d Dd9 C m l L t m t H B Material: Carbon steel mm Material: Rolled steel mm Part no. Applicable bore size (mm) 20 25 32, 40 50 Applicable bore size (mm) Snap ring l Part no.

Clean Air Module

Digital Flow Switch Unit Specifications Detection type Heat type Measured flow range 50 to 500 L/min 5 to 100 L/min Minimum unit setting 5 L/min 1 L/min Accumulated pulse flow rate exchange value (Pulse width: 50 [ms]) 5 L/pulse 1 L/pulse Accumulated flow range 0 to 9 L 5% F.S. or less (15 to 35C: Based on 25C) Linearity 2% F.S. or less Repeatability 5% F.S. or less (15 to 35C: Based on 25C

Free Mount Cylinder for Vacuum Series ZCUK

40 40 50 62 3 4 5 8 10 12 9 10 11 8 10 12 16 20 24 20 22 29 33 43.5 51.5 19 21.5 23 33.5 34 34.5 8 5 to 50 11.5 5 to 50 H J L P Q QA R S SA T W Y Z Model ZC(D)UKD16 ZC(D)UKD20 ZC(D)UKD25 ZC(D)UKD32 ( ): In the case of a mounted auto switch.

Booster Regulator Series VBA1110 to 4200 1

VBA200: Qb = 500 [l/min (ANR)] VBA400: Qb = 1050 [l/min (ANR)] NO VBA400 NO Max. 0.05 MPa Avoid pulsation Judgement of flow rate Qb < Q YES VBA200 YES Can not get necessary pressure. Tank capacity (l) Tc [s] = L W Obtain the tank capacity V. Select tank from table below.

4

Disassembly 1) After loosening the screw q, then if the housing w is pulled in the direction of the screw q, the connector will be removed from the body of equipment (solenoid, etc.). 2) Pull the screw q out of the housing w. 3) On the bottom part of the terminal block e, theres a cut-off part o.

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

q q PA PA PA e e e A B A B A B A B A B t y r w u t y With reducer With flow rate adjustment With bypass i PB PA i A B A B Description Material Parts list No.

mb1

5 u q y e t !2 w i A CJ1 CJP CJ2 A Cylinder tube sectional view A-A !0 o CM2 CG1 Component Parts MB No. q w e r t y u i o !0 !1 No.

NCRBIBwserbs

(D NCDRB10W10.15.20.30 Dimensions Oside eorts: NcRBlowo-os Top ports: I{CFBIOWO-OSE Tt t F f l l . ' ,-t L 1 5 1 I I Oim. for NCFETOWIO l) : Dim tor NCnBtowl5 l Flans ("F') ,dl P4 ct F > 1 '. 111 '.I!.

Rotary Actuator NCRB1BW Series Single Vane / Double Shaft

(D NCDRB10W10.15.20.30 Dimensions Oside eorts: NcRBlowo-os Top ports: I{CFBIOWO-OSE Tt t F f l I l . ' ,-t L 1 5 1 I Oim. for NCFETOWIO l) : Dim tor NCnBtowl5 l Flans ("F') ,dl P4 ct F > 1 '. 111 '.I!.

70astamb1

5 u q y e t !2 w i A CJ1 CJP CJ2 A Cylinder tube sectional view A-A !0 o CM2 CG1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Component Parts MB No. q w e r t y u i o !0 !1 No.