SMC Corporation of America
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VQZ (47.5) 9.9 9.9 3-M5 x 0.8 P, R port VQD Foot bracket VZS 5 1 3 VFS 22.2 Die cast hole For manifold gasket positioning PE port VS VS7 L plug connector (L): VQZ112 wLwC3, C4, C6, M5 0 1 M plug connector (M): VQZ112 wMwC3, C4, C6, M5 0 1 Cover diameter 1.5 Cross section 0.23mm2 34 <39> 300 (Lead wire length) 76 (Metal seal) <77> 73.5 (Rubber seal) <74.5> 300 82 (Metal seal) <83> 54 <55

Indicator light SET2 30 V, 80 mA + Analog output 12 to 24 VDC Load White Blue DC () ZSE1-55 Brown DC (+) When using to confirm adsorption, set to the minimum vacuum pressure at which adsorption is possible. If set below this valve, the switch will turn ON even when adsorption has failed or is insufficient.

23 23 23 23 24 24 24 24 26 26 27 28 55 55 J5 57 - C o T E N T S T A B L E o F Load Fatio Speed Control Air Flow and Consumption Rotary Actuators Rack and Pinion Type Vane Type Rotary Actuators: Sizing Rotary Actuato|s Torque and Inertia Spcial Actuators Locking Cylinder Rodless rylinders Wilh magnetic coupling, unguided Guided types, with magnetic coupling Guided, with mechanical coupling

Stations: 1 Station, SUP Port Thread: G(PF), Port Location: B [Port Location: Both Sides,Vacuum Supply(Ejector,External Vacuum):PV]

Stations: 5 Stations, SUP Port Thread: G(PF), Port Location: B [Port Location: Both Sides,Vacuum Supply(Ejector,External Vacuum):PV]

8.30 1.5 Rc3/8 IDF3E 11.3 13.1 2.2 IDF4E 18.4 20.1 3.7 Rc1/2 Single-phase 100/200 VAC (50 Hz) IDF6E 26.5 29.0 5.5 Single-phase 100/110 VAC, 200/220 VAC (60 Hz) IDF8E 43.1 46.6 7.5 Rc3/4 IDF11E 58.3 64.3 11 IDF15E1 98.9 109.5 15 Rc1 IDF22E 137.7 151.8 22 R1 Single-phase/Three-phase 200 VAC (50 Hz) Single-phase/Three-phase 200/220 VAC (60 Hz) IDF37E 201.3 215.4 37 R1 1/2 IDF55E 296.6 346.0 55

15 AS231FS1-G01-08 8 13.2 10.2 16.4 30.1 21.5 39.7 14.2 16 AS231FS1-G02-04 4 7.2 9.6 12 13.2 24 17.5 35.7 43.8 42.4 38.3 36.9 13.3 20 15 1/8 13 ASN AQ 26 AS231FS1-G02-06 6 10.4 19 33.8 21.4 43.9 28 AS231FS1-G02-08 8 13.2 34.9 23.5 46 14.2 29 AS231FS1-G02-10 10 15.9 20.9 38.1 24.7 47.3 15.6 32 AS331FS1-G02-06 6 8.2 16.5 29.9 17.5 40.1 49.7 48.3 43.2 41.8 13.3 21.5 16.2 1/4 17 12.9 13 ASV 55

41 (41) AS321F-02-11(S)A 3/8" 15.5 26.7 37 35.9 15.6 AS321F-03-07(S)A 1/4" 3/8 19 11.2 16.6 21.8 32.1 28.7 42.3 40.7 37.1 35.5 13.3 31 (32) AS321F-03-09(S)A 5/16" 13.2 22.7 33 14.2 AS321F-03-11(S)A 3/8" 15.5 26.7 37 28.2 15.6 32 (33) AS421F-04-11(S)A 3/8" 1/2 24 (23.8) 15.5 18.8 27.4 40.3 (40.2) 36.2 50.8 49.2 43.7 42.1 15.6 54 (53) AS421F-04-13(S)A 1/2" 19.3 30.9 43.8 (43.7) 34.7 17 56 (55

Intermedial e stroke between 50-100 (55, 60, 65. ). are obtained through the use 01 spacers (5, 10. I S, 2Omm) (Example) CDOBPSo-55 OM: SMC would install a 2Qmm width spacer in the C002BP 50-750M. Not.. No. Auto Switch Mounting Bracket Part No. AutoPart Specifications Auld ..

21.6 26.4 33.6 41.6 52.4 65.4 E 4 1.5 2 2 2 2 3 8 8 F 8 9 10 13 13 16 16 2 2 G 5 5 5.5 7.5 7.5 8 11 14 14 H 13.5 12.5 13 20 20.5 22 29 33 33 I 28 34 40 50 58 72 J 4.5 4.5 6 6 8 8 10 12 12 N 9.5 11 11 18 18.5 20 26 25 25 Q NN S 62 63 83 106 111 124 150 176 188 K 5 4 11 8 10 15 16 25 26 V A 4 4 4 8 8 8 10 T C 8 14 14 26 32 32 41 L 35 38 57 66 70 80 92 110 122 MM NA 10 14 17 24 30 36 46 55

HIROSE ELECTRIC CO., LTD. 55 2 x M2.6 x 0.45 Socket side 14 25 1 13 Terminal no. 47.04 Note 1) Types with 15 pins are also available. Refer to page 561 for details. Note 2) Lengths other than the above are also available. Please contact SMC for details. Note) For CE compliant models, DC-type only.

TdH9 TB +0.036 0 +0.036 0 +0.043 0 CLG-020-24 CLG-025-24 CLG-032-24 CLG-040-24 20 25 32 40 42 48 53 60 10 10 10 10 5.5 5.5 6.6 6.6 31 37 38.5 42.5 40 47 47 55 20 25 32 40 36 43 50 58 10 10 10 10 5.5 5.5 6.6 6.6 25 30 35 40 (29.3) (33.1) (40.4) (49.2) 8 10 12 14 8 10 12 +0.043 0 14 CG-020-24A CG-025-24A CG-032-24A CG-040-24A Applicable bore size (mm) Applicable bore size (mm) Part no.

shaft) Variations With angle adjuster (WJ shaft) With auto switch and angle adjuster (WJ shaft) Option Mounting With flange F Pattern Shaft pattern Made to Order Rotating angle pattern The CRB series only 50 C O N T E N T S Rotary Actuator/Vane Type CRB2 Series CRB2 CRB2 CRB1 V Rotary Actuator/Vane Type CRB2 Series MSU How to Order Page 52 CRJ Specifications Page 53 CRA1 Construction Page 55

Model Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S T U VNB2-10A VNB2-15A VNB3-20A VNB4-25A 3 8 1 2 3 4 1 144.5 55 125.5 52 26 4.5 24.3 2.3 25 34 63 42 28 14 72.5 80.5 75 80 84.5 124 60.5 73 135.5 151.5 137 153 156 172 62 72 31 36 5.5 6.5 28.3 33.3 2.3 2.3 30 35 43 49 80 90 50 60 35 44 17.5 22 84 100 92 108 84 90 89 95 93.5 99.5 Port size: 10A, 15A, 20A, 25A Vacuum pilot K L N

55 60.5 73 Note) ( ): CE-compliant product (-Q) Threaded Type/Port size: 32A, 40A, 50A Pg9 Applicable cable O.D. 6 to 8 Pilot port 12(P1), 10(P2) Port size: refer to table below F H (Air operated) J (External pilot solenoid) Light/surge voltage suppressor (For DZ) Manual override (Non-locking push type) P2 P1 E D 32 A K B C Main port 1(A) [Back side 2(B)] Port size: refer to table below

55 3/4, 1, 1 1/4 (IN, OUT port) 1 1/4 (EXH port) 22.6 (Guide) 36 82.6 36 In the case of B spec. of -X81 (N.O. spec.), VF3140 solenoid has to be positioned at left, when looking at the EXH port in the front face.

HIROSE ELECTRIC CO., LTD. 2 x M2.6 x 0.45 55 Socket side 1425 16 113 Terminal no. 47.04 Note) Lengths other than the above are also available. Please contact SMC for details.