SZ3000

For details on attachment of sockets, refer to the section "How to use plug connectors" on page 36.

VHK

Refer to p.0-33 to 0-36 for Safety Instructions and common precautions. w To screw in the fitting, first hand-tighten; then, use a tool to rotate it 2 to 3 turns. If it is tightened excessively, the amount of sealing agent that protrudes will increase, so make sure to remove the sealing agent that has protruded.

VHS

Filtration rating has to be 5m or smaller. 3(R) Model VHS2500 VHS3500 VHS4500 VHS5500 A 60 78 85 136 B 20 29 32 56 C 12.8 12.8 12.6 32 D 40 53 70 90 E 44 53 64 80 F 33 42 49 65 G 28 29 36 54 H 7.5 7.5 10 10 3.6-18

VQ

L size Blank plate with 2 screws and gasket 39 498 38 485.5 37 473 36 460.5 35 448 34 435.5 33 423 32 410.5 31 398 No. L size 40 510.5 2.9-15

VXA21/22

VXA225l VXA226l VX070-022 1 4 1 4 03 ( ) 3 8 04 ( ) 1 2 VX070-029 Ordering Example (Example) Series VXA21, Orifice size 4.5mm, Normal closed, Rc(PT)1/4 (Part number)VXA2130-02 4.1-59 VXA21/22 Dimensions (Orifice size 3 mm, 4.5 mm, 6 mm) VXA212m, VXA213m, VXA223m, VXA224m Model Port size P Rc(PT) A B C D E F With bracket G H I J VXA21 VXA22 , , 18 21 9 10.5 40 45 21 27 55 62 64 71 11 13 36

XL

the bonnet assembly (1) is a heat resistant structure. 10 High Vacuum Angle Valve Series XLC, XLCV Dimensions (mm) 1in = 25.4mm (b) XLC/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) H J Heater (optional) B G A A (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 B 110 120 171 183 209 250 E Note 1) A 40 50 65 70 88 90 J 26 28 36

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F 3 COMPRESSED AIR THEORY Units Pressur Prooerties of Gases lsothermic change (Boyle's Law) lsobaric change Charles Law Law of Gay Lussac lsochoric change Adiabatic (lsentropic) change Standard Volume Flow Bernoulli's Equation Air Humidity Relative humidity Pressur and Flow Use of the diagram: Formulae: 6 6 I 1 0 1 0 1 1 1 1 1 1 1 1 1 2 1 2 1 2 1 2 1 2 1 3 1 5 1 6 1 6 AE 36 36 5 AIR TBEATMENT

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t.o7 (78) 0.98 (25) 2.05 (52) t.55 i14l 0.43 121) ).43 t l l I 1.89 (44) M22xL5 1.46 ) 7 9 (20t 457 1 1 1 5 1 1 . 1 0 (2Al r.21 :;dd5r 3 1 . 5 : 3 : l 2.36 (60) 2.gJ 171) 9.25 t235) I0.04 t255) 2.56 (65) 0.49 1 2 5 ) 1 . 1 5 t80l 9.61 1244\ (264) 1.57 4.57 ( 1 1 6 ) 3.62 (92) 1 . 1 8 (30) 2.05 (52) ).55 (14) 0 4 3 t21) 1.43 l l 1 ) 2.25 (54) M26xl 5 1.57 (40) 1.98 (25) 4.96 (1261 1.42 (36

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

With gasket is provided as standard. 1/8, 1/4 standard 3/8 standard 1/2 standard Port size Symbol Cylinder side In the side of solenoid valve M5 01 M5 x 0.8 R 1/8 M5 x 0.8 Rc 1/8 Rc 1/4 Note 1) Elbow 02 R 1/4 Rc 3/8 Note 2) 03 04 F01 Rc 3/8 Rc 1/2 G 1/8 G 1/4 Note 1) R 3/8 R 1/2 R 1/8 F02 R 1/4 G 3/8 Note 2) Caution Control F03 F04 U10/32 N01 G 3/8 G 1/2 10-32 UNF NPT 1/8 NPT 1/4 Note 1)

Dual Speed Controller with One-touch Fitting Series ASD 1

1/4" ASD330F-N01-07S 42.2 25.6 NPT 1/8 13.2 12.7 36.1 31.1 11.8 14.2 32 27 10.6 ASF 38.9 15.8 33.9 31 18.5 5/16" ASD330F-N01-09S 44.8 28.2 15.2 17 1/4" ASD430F-N02-07S 43.9 25.6 13.2 18 55 18.5 5/16" ASD430F-N02-09S 46.5 28.2 41.7 NPT 1/4 17.5 15.2 15 18.5 36.7 29.6 34.6 11 40.4 35.4 21 3/8" ASD430F-N02-11S 49.3 31 19.7 62 18.5 17 1/4" ASD530F-N02-07S 48.7 25.6 13.2 20.3 76 18.5 5/16" ASD530F-N02

Speed Controller with Pilot Check Valve with One-touch Fitting Series ASP 1

Model L5 T2 17 18.7 17 18.7 18.7 20.8 20.8 21.8 25.6 28.2 25.6 28.2 28.2 32.6 32.6 34.7 42.2 44.7 43.9 46.4 51.3 54.1 64.2 66.3 13.2 15.2 13.2 15.2 15.2 18.5 18.5 21.7 1/4" 5/16" 1/4" 5/16" 5/16" 3/8" 3/8" 1/2" ASP330F-N01-07S ASP330F-N01-09S ASP430F-N02-07S ASP430F-N02-09S ASP530F-N03-09S ASP530F-N03-11S ASP630F-N04-11S ASP630F-N04-13S 10.5 35.1 39.5 33.9 11.8 1/2" 10-32 UNF NPT 1/8 8 14.2

ASD

AS Weight (g) d T H D1 D2 D3 L1 L2 L3 Model 1/8" ASN ASD230F-U10/32-01 8.4 12 10-32 UNF 12.9 8 25.5 28.6 22.2 25.8 29.4 9.6 10 11.7 7.8 28.3 17.5 25 5/32" ASD230F-U10/32-03 9.3 13 3/16" AQ ASD330F-N01-05S 16.5 11.6 34.6 39.5 14 39.6 23.9 30 1/4" NPT1/8 ASD330F-N01-07S 17 13.2 42.2 25.6 12.7 36.1 27 31.1 14.2 11.8 10.6 32 33.9 38.9 15.8 31 5/16" ASV ASD330F-N01-09S 18.5 15.2 44.8 28.2 1/4"

With Bracket, Gauge, 1/8" NPT Fitting $152.00 VMW-140-B-G-N02 With Bracket, Gauge, 1/4" NPT Fitting $154.00 VMW-140-B-G-N07 With Bracket, Gauge, 1/4" Push to Connect Fitting $71.00 VMW-140-B-G-N09 With Bracket, Gauge, 5/16" Push to Connect Fitting $71.00 VMW-140-G-N01 With Gauge, 1/8" NPT Fitting $151.00

With Bracket, Gauge, 1/8" NPT Fitting $152.00 VMW-140-B-G-N02 With Bracket, Gauge, 1/4" NPT Fitting $154.00 VMW-140-B-G-N07 With Bracket, Gauge, 1/4" Push to Connect Fitting $71.00 VMW-140-B-G-N09 With Bracket, Gauge, 5/16" Push to Connect Fitting $71.00 VMW-140-G-N01 With Gauge, 1/8" NPT Fitting $151.00

With Bracket, Gauge, 1/8" NPT Fitting $152.00 VMW-140-B-G-N02 With Bracket, Gauge, 1/4" NPT Fitting $154.00 VMW-140-B-G-N07 With Bracket, Gauge, 1/4" Push to Connect Fitting $71.00 VMW-140-B-G-N09 With Bracket, Gauge, 5/16" Push to Connect Fitting $71.00 VMW-140-G-N01 With Gauge, 1/8" NPT Fitting $151.00

With Bracket, Gauge, 1/8" NPT Fitting $152.00 VMW-140-B-G-N02 With Bracket, Gauge, 1/4" NPT Fitting $154.00 VMW-140-B-G-N07 With Bracket, Gauge, 1/4" Push to Connect Fitting $71.00 VMW-140-B-G-N09 With Bracket, Gauge, 5/16" Push to Connect Fitting $71.00 VMW-140-G-N01 With Gauge, 1/8" NPT Fitting $151.00

With Bracket, Gauge, 1/8" NPT Fitting $152.00 VMW-140-B-G-N02 With Bracket, Gauge, 1/4" NPT Fitting $154.00 VMW-140-B-G-N07 With Bracket, Gauge, 1/4" Push to Connect Fitting $71.00 VMW-140-B-G-N09 With Bracket, Gauge, 5/16" Push to Connect Fitting $71.00 VMW-140-G-N01 With Gauge, 1/8" NPT Fitting $151.00

With Bracket, Gauge, 1/8" NPT Fitting $152.00 VMW-140-B-G-N02 With Bracket, Gauge, 1/4" NPT Fitting $154.00 VMW-140-B-G-N07 With Bracket, Gauge, 1/4" Push to Connect Fitting $71.00 VMW-140-B-G-N09 With Bracket, Gauge, 5/16" Push to Connect Fitting $71.00 VMW-140-G-N01 With Gauge, 1/8" NPT Fitting $151.00

With Bracket, Gauge, 1/8" NPT Fitting $152.00 VMW-140-B-G-N02 With Bracket, Gauge, 1/4" NPT Fitting $154.00 VMW-140-B-G-N07 With Bracket, Gauge, 1/4" Push to Connect Fitting $71.00 VMW-140-B-G-N09 With Bracket, Gauge, 5/16" Push to Connect Fitting $71.00 VMW-140-G-N01 With Gauge, 1/8" NPT Fitting $151.00

With Bracket, Gauge, 1/8" NPT Fitting $152.00 VMW-140-B-G-N02 With Bracket, Gauge, 1/4" NPT Fitting $154.00 VMW-140-B-G-N07 With Bracket, Gauge, 1/4" Push to Connect Fitting $71.00 VMW-140-B-G-N09 With Bracket, Gauge, 5/16" Push to Connect Fitting $71.00 VMW-140-G-N01 With Gauge, 1/8" NPT Fitting $151.00