SMC Corporation of America
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Refer to p. 0-33 to 0-36 for Safety Instruction and common precautions.

219 244 255 240 251 284 295 2 103 114 139 150 117 128 161 172 L1 Side ported L2 VV2CA3 L1 Front ported L2 L1 Side ported L2 VV2CA4 L1 Front ported L2 (mm) Dimensions Electrical entry Grommet: G Conduit: C DIN connector: D Conduit terminal: T A B C E F G H J1 J2 J3 K L M N Model Q 30 32 R 36 41 S 50 52 T 32 38 U 54 57 V 66 69 W 30 36 X 71 74 Y 101 104 Z 65.5 71 55 62 26 31 17 19 19.5 21 33

Caution Refer to p.0-33 to 0-36 for Safety Instruction and common precautions. 3.2-13 VFA3000 Dimensions/Body Ported 2 position single: VFA3122-F 01 02 SlA VlA SlA VlA VM/VR VH 2 position single: VFA3130-01 02 3.2-14 VFA3000 Dimensions/Body Ported 2 position double: VFA3230-01 02 3 position closed center/exhaust center/pressure center: VFA3 30-X1 01 02 3 4 5 3.2-15 VFA3000 Dimensions/Base

Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K

silencer) ZX Model ZR Maximum suction flow rate (/min (ANR)) Air consumption (/min (ANR)) Connection (One-touch/Screw-in) Max. vacuum pressure Model Nozzle diameter (mm) (kPa) Body type Weight (g) ZM ZH05B 0.5 Type S Type L Type S Type L Type S/Type L 5 8 13 12 20 23 6/Rc 6/Rc 24 34 46 40 70 78 8/Rc 10/Rc 5 8 13 12 20 23 24 34 46 40 70 78 55 75 95 65 110 150 85 135 185 SUP VAC EXH 28 28 33

The VZM series is a 5 port mechanical valve. It is compact in design with a large flow capacity (VZM400 Cv 0.55, VZM500 Cv 0.6). The VZM is available in a metal or rubber spool style, with a variety of actuator choices and optional external pilot.Fluid: air, inert gas, Operating pressure: 0.15 to 1.0MPa, Ambient and fluid temp: -5 to 60C (no freezing), Effective area (Cv): 0.55, Port size

The VZM series is a 5 port mechanical valve. It is compact in design with a large flow capacity (VZM400 Cv 0.55, VZM500 Cv 0.6). The VZM is available in a metal or rubber spool style, with a variety of actuator choices and optional external pilot.Fluid: air, inert gas, Operating pressure: 0.15 to 1.0MPa, Ambient and fluid temp: -5 to 60C (no freezing), Effective area (Cv): 0.55, Port size

The VZM series is a 5 port mechanical valve. It is compact in design with a large flow capacity (VZM400 Cv 0.55, VZM500 Cv 0.6). The VZM is available in a metal or rubber spool style, with a variety of actuator choices and optional external pilot.Fluid: air, inert gas, Operating pressure: 0.15 to 1.0MPa, Ambient and fluid temp: -5 to 60C (no freezing), Effective area (Cv): 0.55, Port size

The VZM series is a 5 port mechanical valve. It is compact in design with a large flow capacity (VZM400 Cv 0.55, VZM500 Cv 0.6). The VZM is available in a metal or rubber spool style, with a variety of actuator choices and optional external pilot.Fluid: air, inert gas, Operating pressure: 0.15 to 1.0MPa, Ambient and fluid temp: -5 to 60C (no freezing), Effective area (Cv): 0.55, Port size

The VZM series is a 5 port mechanical valve. It is compact in design with a large flow capacity (VZM400 Cv 0.55, VZM500 Cv 0.6). The VZM is available in a metal or rubber spool style, with a variety of actuator choices and optional external pilot.Fluid: air, inert gas, Operating pressure: 0.15 to 1.0MPa, Ambient and fluid temp: -5 to 60C (no freezing), Effective area (Cv): 0.55, Port size

The VZM series is a 5 port mechanical valve. It is compact in design with a large flow capacity (VZM400 Cv 0.55, VZM500 Cv 0.6). The VZM is available in a metal or rubber spool style, with a variety of actuator choices and optional external pilot.Fluid: air, inert gas, Operating pressure: 0.15 to 1.0MPa, Ambient and fluid temp: -5 to 60C (no freezing), Effective area (Cv): 0.55, Port size

The VZM series is a 5 port mechanical valve. It is compact in design with a large flow capacity (VZM400 Cv 0.55, VZM500 Cv 0.6). The VZM is available in a metal or rubber spool style, with a variety of actuator choices and optional external pilot.Fluid: air, inert gas, Operating pressure: 0.15 to 1.0MPa, Ambient and fluid temp: -5 to 60C (no freezing), Effective area (Cv): 0.55, Port size

The VZM series is a 5 port mechanical valve. It is compact in design with a large flow capacity (VZM400 Cv 0.55, VZM500 Cv 0.6). The VZM is available in a metal or rubber spool style, with a variety of actuator choices and optional external pilot.Fluid: air, inert gas, Operating pressure: 0.15 to 1.0MPa, Ambient and fluid temp: -5 to 60C (no freezing), Effective area (Cv): 0.55, Port size

The VZM series is a 5 port mechanical valve. It is compact in design with a large flow capacity (VZM400 Cv 0.55, VZM500 Cv 0.6). The VZM is available in a metal or rubber spool style, with a variety of actuator choices and optional external pilot.Fluid: air, inert gas, Operating pressure: 0.15 to 1.0MPa, Ambient and fluid temp: -5 to 60C (no freezing), Effective area (Cv): 0.55, Port size

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, VALVE, MECH VZM 400, VALVE, VM (VFM/VZM) MECHANICAL VALVE, FE, VM BODY PT 1/4, .24250 lb

The VZM series is a 5 port mechanical valve. It is compact in design with a large flow capacity (VZM400 Cv 0.55, VZM500 Cv 0.6). The VZM is available in a metal or rubber spool style, with a variety of actuator choices and optional external pilot.Fluid: air, inert gas, Operating pressure: 0.15 to 1.0MPa, Ambient and fluid temp: -5 to 60C (no freezing), Effective area (Cv): 0.55, Port size